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SEMI E125-0305 © SEMI 2003, 2005 15 10.4 Parameters 10.4.1 Parameters can re present any concept that can be descri bed by any of the primitive or com posite types described in Secti on 10.5 . A parameter can gene rally …

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SEMI E125-0305 © SEMI 2003, 2005 14
EquipmentNodeDescrip tio n
1
parameters0..*
1..*
ex cept ions0..*
1..*
objT ypes0..*
Parameter
CEM::Nameable
node 1
1
SEMIObjType Exception
StateMachin eInstance
s tateMachines 1
0..*
Figure 8
Describing Equipment Nodes
10.3.1.2 EquipmentNodeDescription — This class is used to identify a specific element of the equipment hierarchy,
and to describe the Parameters, Exceptions, ObjTypes, and Events for which this node is the source. This is
achieved through the StateMachineInstance (Section 10.8.6), SEMIObjType (Section 10.8.5 ), Exception (Section
10.7 ), and Parameter (Section 10.4 ) classes. Only one EquipmentNodeDescription shall be provided for a given
equipment node. Equipment elements may be any concrete class derived from Nameable, as defined in the SEMI
E120 specification, Common Equipment Model.
10.3.1.3 EquipmentNodeDescription Association Definition Table
Table 22 EquipmentNodeDescription Association Definition
Association Role Name Definition Comments
stateMachines An unordered list of state machines that are supported by
this equipment node.
List of elements of type
StateMachineInstance, described in
Section 10.8.6. There shall be one map
provided for each event that the node
can generate, including events for which
no Parameters are available.
objTypes An unordered list of the SEMIObjTypes that are
associated with this equipment node.
List of elements of type SEMIObjType,
describe in Section 10.8.5 .
exceptions An unordered list of exceptions that can be reported by
this equipment node.
List of elements of type Exception
described in Section 10.7 .
parameters An unordered list of typed parameters provided by this
equipment node.
List of elements of type Parameter,
described in Section 10.4 . Any
parameters that represent variables from
SEMI standards shall be typed and
named according to Sections 10.5.4 and
10.4.10 . Each parameter name for this
node shall be unique. Parameter names
need not be unique across equipment
nodes.
node The equipment node being described. Element of a type derived from the
SEMI E120 Nameable class.
SEMI E125-0305 © SEMI 2003, 2005 15
10.4 Parameters
10.4.1 Parameters can represent any concept that can be described by any of the primitive or composite types
described in Section 10.5 . A parameter can generally be thought of as a named, typed field that has a specific
meaning, utility or other information value. Examples are process control variables, equipment configuration
settings, measurement results, wafer maps, data variables, etc. Parameters can only be defined by an equipment
node (Section 10.3 ), a SEMI ObjType (Section 10.9 ), or an exception (Section 10.7 ).
10.4.2 Figure 9 shows how to describe named, typed parameters with units, constraints, and associations with other
parameters. Type and units information is provided through the ParameterTypeDefinition referred to by the
DefinedType class. ParameterTypeDefinition is described in Section 10.5.1 .
description
AssociatedParameter
name
desc ription
defin itio n
Constraint
name
des cription
Parameter
1
ass ociatedParamet ers
0..*
cons traints1
0.. *
typeInformation 0..*
1
ParameterTypeDefini tion
paramet er 0..*
1
ParameterCl assi fication
classification
1
1
Figure 9
Describing Typed Parameters
10.4.3 Suppliers shall provide a model of those Parameters for which it is necessary and practical to facilitate (at
least) utilization tracking, process control, and technical support objectives.
10.4.4 Parameter Attribute Definition Table
Table 23 Parameter Attribute Definition
Attribute Name Definition Required Form
name The name of the parameter. Y Text.
description A human-readable description of the purpose or
usage of the Parameter.
Y Text.
SEMI E125-0305 © SEMI 2003, 2005 16
10.4.5 Parameter Association Definition Table
Table 24 Parameter Association Definition
Association Role Name Definition Comments
constraints A description of any restrictions associated with
this parameter.
List of structured data, of type Constraint,
described in Table 26 . Logical AND semantics
apply between constraints if more than one is
described.
associatedParameters List of other parameters in the system that are
related to this parameter.
List of structured data, of type
AssociatedParameter, described in Section 10.4.7
.
typeInformation Refers to a type definition that describes the type
and units of this parameter.
One and only one element of type
ParameterTypeDefinition.
classification Describes the nature of the Parameter One and only one element of any type derived
from ParameterClassification, described in
Section 10.4.11.2 .
10.4.6 Each parameter can provide a list of zero or more associated parameters, and a human-readable description
of the meaning of the relationship.
10.4.7 AssociatedParameter — This class can be used to describe a generic association with another parameter
anywhere in the equipment hierarchy. If such an association is created, this indicates that the Parameter being
defined is related in some way to the parameter referenced by this class. The meaning of the relationship is
documented in the description attribute of the AssociatedParameter class. More specific meaning can be attributed
to an associated Parameter via the classification types described in Section 10.4.11 .
10.4.7.1 AssociatedParameter Attribute Definition Table
Table 25 AssociatedParameter Attribute Definition
Attribute Name Definition Required Form
description Description of the relationship between the
defined parameter and the parameter identified
by this association.
Y Text.
10.4.7.2 AssociatedParameter Association Definition Table
Table 26 AssociatedParameter Association Definition
Association Role Name Definition Comments
associatedParameters A list of parameters that are associated with this
parameter.
Unordered list of structured data, of type
Parameter.
10.4.8 Constraint — Represents a constraint associated with this parameter. A constraint can be used to describe
limitations on the valid values of a parameter, the rate at which the parameter can be collected for off-tool reporting,
or any other similar restriction on the value or usage of the parameter.
10.4.8.1 Constraint Attribute Definition Table
Table 27 Constraint Attribute Definition
Attribute Name Definition Required Form
name The name of the constraint. Y Text.
description A description of the purpose or meaning of the
constraint.
Y Text.
definition The definition of the constraint. Y Text, formatted according to Section
10.4.9 .