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SEMI E125.1-0305 © SEMI 2005 21 Figure 12 ArrayTypeType Global complexType 7.2.9.5. 18 ArrayTypeType — This global com plexType is the XML Schem a representation of the SEMI E125 ArrayType class. The type of each elem en…

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SEMI E125.1-0305 © SEMI 2005 20
Table 33 SEMI E125 RealType FloatTypeType Translation Table
Attribute or Role Name UML Name/Type XML Element or Attribute XML Name/Type
units Unit element Units: esd:UnitRefType
units UnitConfig element AvailableUnits: esd:UnitConfigArrayType
(See ¶7.2.9.5.10.)
digitsOfPrecision Integer attribute digitsOfPrecision: xsd:int
7.2.9.5.15 DoubleTypeType — This global complexType is an XML Schema representation of the SEMI E125
RealType class. The following table describes the mapping of the UML class to this XML Schema complexType.
The association from RealType to the Unit class in SEMI E125 has been modeled using a reference attribute that
refers to the specific unit using its unique identifier. The association to the UnitConfig class has been modeled using
a container element for a collection of unit ids, a reference to the Parameter that controls their settings, and the
enumeration settings that select those units.
Table 34 E125 RealType
DoubleTypeType Translation Table
Attribute or Role Name UML Name/Type XML Element or Attribute XML Name/Type
units Unit element Units: esd:UnitRefType
units UnitConfig element AvailableUnits: esd:UnitConfigArrayType
(see ¶7.2.9.5.10)
digitsOfPrecision Integer attribute digitsOfPrecision: xsd:int
Figure 11
VariableTypeType Global complexType
7.2.9.5.16 VariableTypeType — This global complexType is an extension to the SEMI E125 type description
classes. VariableTypeType describes Parameters whose values may be of varying type at runtime. For example, a
Parameter’s value may communicate an array of different control variable settings, each setting with a potentially
different data type. The VariableType complexType can be used to describe such Parameters.
7.2.9.5.16.1 The VariableTypeType provides a collection of elements named “TypeHint”, of type xsd:string. Each
TypeHint shall be equal to the name of a ParameterTypeDefinition provided elsewhere in the equipment metadata.
The collection of TypeHints together describes the set of possible types that a Parameter value may assume at
runtime.
7.2.9.5.17 DateTimeTypeType — This global complexType is an extension to the SEMI E125 type description
classes. DateTimeTypeType describes Parameters whose values are communicated using the XML Schema
primitive type “xsd:dateTime”.
SEMI E125.1-0305 © SEMI 2005 21
Figure 12
ArrayTypeType Global complexType
7.2.9.5.18 ArrayTypeType — This global complexType is the XML Schema representation of the SEMI E125
ArrayType class. The type of each element in the array is defined using one of the complexTypes provided for the
various primitive and composite types. The ArrayTypeType can describe arrays of arrays in a recursive fashion.
7.2.9.5.18.1 Values of Parameters that are described as arrays shall be communicated using a single container
element representing the array as a whole, with each element of the array communicated using a nested element
whose data type matches the type defined for the array.
Table 35 SEMI E125 ArrayType
ArrayTypeType Translation Table
Attribute or Role Name UML Name/Type XML Element or Attribute XML Name/Type
minElements integer attribute minElements: xsd:int
maxElements integer attribute maxElements: xsd:int
elementDescription text element ElementDescription: xsd:text
typeInformation ParameterType element TypeInformation:
esd:TypeInformationType
typeInformation ParamterTypeDefinition element (see above) (see above)
SEMI E125.1-0305 © SEMI 2005 22
Figure 13
StructureTypeType Global complexType
7.2.9.5.19 StructureTypeType — This global complexType is the XML Schema representation of the SEMI E125
StructureType class. The type of each field in the structure is defined using the FieldType complexType, which
incorporates the complexTypes provided for the various primitive and composite types. The StructureTypeType can
describe nested structures.
7.2.9.5.19.1 Values of Parameters that are described as structures shall be communicated using a single container
element representing the structure as a whole, with each field of the structure communicated using a nested element
whose data type matches the type defined for the described field.