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SEMI E127-0705 © SEMI 2003, 2005 21 12.4 Object Services 12.4.1 This section specifies the services provide d by the STPO . The client for these services is restricte d to the IMM’s Contr ol Client due to the phy si cal …

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SEMI E127-0705 © SEMI 2003, 2005 20
# Previous State Trigger New State Comment
11 BLOCKED 1. All fault conditions are cleared
AND
2. Conditions allow a substrate transfer
into the STPO to occur.
READY TO
LOAD
The substate load location is unoccupied.
12 BLOCKED 1. All fault conditions are cleared
AND
2. Conditions allow a substrate removal
from the STPO to occur.
READY TO
UNLOAD
The substrate unload location is occupied.
13 READY TO
UNLOAD
A fault condition occurred that prevents
substrate transfers.
BLOCKED
12.3 Object Attributes
12.3.1 The diagram for the STPO object is shown in Figure 5.
Substrate Transfer Path
EventList: list of text/integer pairs
SubstrateList: list of text
SubstIDRead: text
TransferState: enumeration
Delete
TransferPathCalibration
UpdateSubstrateObject
XfrCmdListRequest
XfrCommand
XfrVerify
XfrHalt
Figure 5
Substrate Transfer Path Object
12.3.2 Table 7 defines the attributes of the STPO object.
12.3.3 The attribute EventList identifies all of the errors that may be generated by the STPO. Each such event shall
have both a descriptive name and a numeric identifier, each of which shall be unique within the EventList list.
Table 7 Substrate Transfer Path Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjType Defines object type. RO Y Text = “SubstrateTransferPath”.
ObjID Identifier of specific module. RO Y Conforms to requirement of ObjID
(SEMI E39).
EventList List of event name/event number pairs. RO Y List of text/integer pairs.
SubstrateList A list of zero or more ObjID for substrates
within the STPO.
RO Y List of 0+ text.
SubstIDRead Substrate identifier last read by the STPO
substrate ID reader.
RO N Required only if substrate ID reader
supported. May be a null string if
reader out of service.
TransferState Current operational status. RO Y Enumerated:
ASSIGNED
BLOCKED
READY TO LOAD
READY TO UNLOAD
SEMI E127-0705 © SEMI 2003, 2005 21
12.4 Object Services
12.4.1 This section specifies the services provided by the STPO. The client for these services is restricted to the
IMM’s Control Client due to the physical requirements of the transfer.
12.4.2 Services starting with the prefix “Xfr” are based on similar services specified in SEMI E32 for micro moves
that start with the prefix of “HO”. The transfer services specified in this document include an object specifier that
can be used to differentiate between multiple instances of a STPO.
12.4.3 Table 8 provides an alphabetical list of services required from the STPO. Message details are provided in
§18. All services provided by a STPO shall be available to the Control Client and only to the Control Client.
12.4.4 List of Substrate Transfer Path Services
Table 8 List of Substrate Transfer Path Services
Operation Description Type Reqd
Delete The Control Client requests the STPO to delete a
Substrate Object for a substrate that is not physically
present within the STPO or IMM. This service is defined
in SEMI E39.
R Y
TransferPathCalibration A request by the Control Client to provide any
discrepancy in the actual position of an incoming
substrate with the position required by the STPO for
loading. Required only if the STPO is able to detect the
(x,y,z) position of the center of an incoming substrate.
R Y
UpdateSubstrateObject The Control Client informs the STPO about a substrate
that is about to be, or has just been, loaded.
R Y
XfrCmdListRequest The Control Client requests the ordered list of micro
move commands required by the STPO to effect a hand-
off.
R Y
XfrCommand Message sent by the Control Client to the STPO to
request a certain action be performed. The response is
sent when the action has been completed or if the action
can not be performed at this time.
R Y
XfrHalt Message sent by the Control Client to stop all activities
related to substrate transfer. This message ends the
transfer procedure and requires external intervention to
clear.
R Y
XfrVerify Message sent by the Control Client to the IMM when all
necessary actions have been completed to effect a
transfer of a substrate and to ask for confirmation.
R Y
12.4.5 The service UpdateServiceObject must be supported by the Control Client. Receipt of this service request
notifies the Control Client that a specific substate is about to, or just has been, unloaded, and it allows those
substrate properties defined by IMMC to be passed to the Control Client with (possibly) updated values.
12.5 Creation of Substrate Objects
12.5.1 Substrate Object Creation — The UpdateSubstrateObject service, defined by SEMI E90, is sent by the
Control Client to the STPO to accomplish three primary objectives:
Identify the substrate through the ObjID attribute specification in the message,
Define other attributes of the substrate that it considers important, and
Prompt the STPO to create the Substrate Object.
12.5.1.1 An UpdateSubstrateObject request that is always assumed to be in connection with the loading of a
specific substrate.
SEMI E127-0705 © SEMI 2003, 2005 22
12.5.1.2 If the STPO receives this message with an ObjId (Substrate ID), and a Substrate Object with the same
identifier already exists, the STPO shall assume that a physical substrate with the same identifier has already been
loaded and still exists with the IMM. In this case, the STPO shall deny the request. If the substrate has been loaded,
it must be unloaded.
12.5.1.3 Otherwise, the STPO creates the Substrate Object when it accepts the UpdateSubstrateObject request and
populates its attributes as specified by the service.
12.5.1.4 The UpdateSubstrateObject object may only be sent and accepted by the STPO and not the IMM or other
objects.
12.5.1.5 This message may be sent by the Control Client either immediately before the physical transfer is initiated
or immediately following the successful completion of this transfer. When this message is received, a Substrate
Object is created and its attributes populated with the attributes as specified by the service.
12.5.1.6 If a Subtrate ID reader is available, then the Substrate ID may be read before the UpdateSubstrateObject
message is received.
12.6 Substate Verification
12.6.1 This section only applies to those implementations that provide a Substrate ID reader.
12.6.2 Whenever a Substrate ID is read, the ID as read is saved in the STPO attribute SubstIDRead, and a
SubstrateIDRead event is triggered. No Substrate Object is created by this event. The STPO must wait until the
UpdateSubstrateObject message is received before creating a Substrate Object with the expected ObjID.
12.6.3 Verification Success — If the ID as read is identical to the value sent in the UpdateSubstrateObject message
as the substrate’s ObjID, then the verification is successful.
12.6.3.1 If the ObjID received is a SEMI E90 compliant ID of “CarrierID” + “.” + ”SlotNumber”, the STPO will
consider the verification to be successful.
12.6.4 The value stored in the STPO SubstIDRead attribute is stored in the Substrate Object’s SubstrIDRead
attribute. The substrate is now ready to continue normally and is available for processing.
12.6.5 Verification Failure — If the ID as read is different from the ObjID received, and the ObjID received is not
in the form of the SEMI E90 default Substate ID, the following actions are required:
12.6.5.1 The STPO shall immediately send an Unexpected ID error message to notify the control client that it has
received a substrate with an unexpected identifier.
12.6.5.2 In addition, the STPO shall set an Unexpected ID alarm. This alarm shall remain set until either the
unexpected substrate is unloaded or a SEMI E39 Delete message for the expected substrate object, followed by a
new UpdateSubstrateObject message for the actual substrate, are received.
12.6.5.2.1 The STPO shall go immediately to the Ready to Unload state and wait for the either services for
unloading or a Delete request, followed by a new UpdateSubstrateObject request.
12.6.5.2.2 When the Control Client receives the error message, it has to determine if the substrate that was
transferred should be processed or unloaded. If it is to be processed, then it will need to ask the STPO to delete the
Substrate Object with the original ID and send another UpdateSubstrateObject message with the ID of the substrate
that was just transferred.
12.6.6 When the Substrate ID has been verified (or, in the case where there is no ID reader present, simply
accepted), at some point it may leave the STPO’s management and be passed to the IMM Object for processing.
12.6.7 Substrate Object Deletion
12.6.7.1 The STPO shall only accept requests to delete a Substrate Object when it has no physical substrate that
corresponds to it. See ¶12.6.6. When the STPO has created a substrate object and has no physical substrate to
which that object corresponds, and the STPO is in either the READY TO UNLOAD or the BLOCKED state, the
Control Client may delete the erroneous Substrate Object with a SEMI E39 Delete message. If the STPO is then
cleared of conditions that may have placed it in the BLOCKED state, it shall return to the READY TO UNLOAD