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SEMI E127-0705 © SEMI 2003, 2005 34 Attribute Name Definition Access Reqd Form ObjID Object ID. RO Y Text string assigned by the IMM. Shall conform in conformance with SEMI E39 restrictions on ObjID. ObjType Type of Obje…

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SEMI E127-0705 © SEMI 2003, 2005 33
Table 12 IMM Data Table Object Transitions
# Previous State Trigger New State Actions Comments
1 (no state) A measurement data table object is
created.
IN PROCESS The conversion recipe name
must be known at creation of
the object.
2 IN PROCESS All data for one location has been
stored. Note: This is a required
transition for all rows, from the first to
the last.
IN PROCESS Site Measurement
Data is available
for conversion.
All data for the newly
completed row must be
available for an event report.
3 IN PROCESS All data for a specified group of sites
has been stored. Note: If this transition
is supported, it is required for every
such transition, including the last, prior
to transition 4.
IN PROCESS Measurement Data
available for a site
group per recipe
specifications.
Optional transition.
Implementation-specific.
Region should be defined in
the measurement recipe.
4 IN PROCESS Data Table Object complete. Retention
conditions exist.
IN
RETENTION
Monitor conditions
for retention until
satisfied.
Data Table Object may be
required internally or
transferred to tool controller
or remote host. All summary
data for the table shall be
available for a Table
Complete Event report. If the
automatic send feature is
enabled, the table is sent to
the designated client.
5 IN
RETENTION
All client and internal retention
conditions are satisfied and the table is
removed from IMM storage.
(extinction) Event notification
required.
Normal exit.
6 IMM DATA
TABLE
Abnormal conditions cause the Data
Table object to be discarded, or to be
removed from IMM storage due to
Automatic Rollover.
(extinction) Event notification
required.
Table is not available due to
abnormal circumstances,
including forced deletion.
Retention rules have not been
satisfied.
14.3 IMM Data Table Object Attributes
14.3.1 Table 13 defines the attributes of the abstract IMM Data Table Object. Most of the information about the
substrate that is maintained to be able to keep with the data is defined here. When a type of IMM_Data Table
Object is first created, it has no row data, but it does have a RowDataTemplate that it will use.
14.3.2 All three subtypes of the IMM Data Table Object, or the IMM Data Table Object itself, may need additional
implementation-specific attributes for summary data that applies to the substrate rather than to a specific location on
the substrate. This could include totals, averages, mean, standard deviation, and similar calculations. Use of this
type of data is encouraged and in some cases may be important for advanced process control.
14.3.3 GetAttr and SetAttr services may be directed to IMM Data Table objects. In this case, all subtypes of the
IMM Data Table Object may be targets of the service request.
Table 13 IMM Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
DataValidity Qualifies the “goodness”. RO Y Enumerated:
Valid and complete, incomplete, out-
of-spec data.
EventList List of event name/event number pairs. RO Y List of text/integer pairs.
IMM_ID ObjID of IMM object where measured. RO Y Text.
LotID Lot identifier. RO Y Text, shall conform to SEMI E39
restrictions on ObjID.
SEMI E127-0705 © SEMI 2003, 2005 34
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text string assigned by the IMM.
Shall conform in conformance with
SEMI E39 restrictions on ObjID.
ObjType Type of Object. RO Y Text = “TableIMM_Data”
ProcessFlowStep Identifies exposure-level step in product
fabrication process.
RO Y User-supplied text.
ProcessRecipeID Identifies recipe of previous process. RO Y User-supplied text.
ProcessToolID Name of last process tool or ObjID of last tool
process module.
RO Y Text, shall conform to SEMI E39
restrictions on ObjID.
RegionRanges Identifies first and last row for regions.
Required if regions supported.
RO N Ordered nested list of 0+ structures of
RegionDef.
Empty list if no regions have been
defined.
Status Current state. RO Y Enumerated:
IN PROCESS
IN RETENTION
SubstID Substrate identifier. RO Y Text, shall conform to SEMI E39
restrictions on ObjID.
SubstIDRead Substrate identifier as determined from
Substrate ID reader in IMM.
RO N Required only if the IMM has a
Substrate ID Reader.
SubstOrientation Specifies angle of rotation in radians. RO Y Floating point.
SubstSide Frontside, backside, or both. RO Y Enumerated:
Front
Back
Both
Unknown
Summary Provides summary data for the substrate. RO Y List of 0+ SummaryData structures.
TimeComplete Date/time when row data for the table was
completed.
RO Y Depends on TimeStampFormat.
TimeStart Date/time when row data entry for the table
was started.
RO Y Depends of TimeStampFormat.
TimeStamp
Format
Indicates format of timestamp. RW Y Conforms to SEMI E98 Clock
TimeStampFormat
Enumerated
14.3.4 The attribute EventList identifies all of the errors that may be generated by the IMM Data Table object and
its subtypes. Each such event shall have both a descriptive name and a numeric identifier, each of which shall be
unique within the EventList list.
14.3.5 Elements of Complex Attributes
14.3.5.1 A complex form is either a list, an array, or a structure. A complex attribute is an attribute with a complex
form for its value. An element of a complex attribute is a list element, an array element, or a structure element. For
a complex attribute, its individual elements must be defined separately, because they themselves are not individually
attributes and can not be accessed individually through SEMI E39 Object Services.
14.3.5.2 Elements of complex attributes of the IMM Data Table Object are defined in Table 14.
SEMI E127-0705 © SEMI 2003, 2005 35
Table 14 Attribute Elements for IMM Data Table Object
Attribute Name Definition Access Reqd Form
RegionDef Defines a region where a sequence of rows
represent measurements within that region.
RO Y Structure consisting of
RegionID
FirstRowID
FirstRowNum
LastRowNum
RegionID A text string that uniquely defines a region.
May be recipe-defined.
RO Y Text. For tables containing
measurements from both sides of a
substrate, the text shall begin with
either “Front” or “Back”. Additional
text may be added to represent
regions within the front or back side.
FirstRowID Row identifier for 1
st
row in the region. RO Y Any simple form except floating
point.
FirstRowNum The sequence number of the first row within
the region as it appears within a table. The first
row in the table has a sequence number of 1,
the second row has a sequence number of 2,
etc.
RO Y Positive integer.
LastRowNum The sequence number of the last row within the
region as it appears within a table.
RO Y Positive integer.
SummaryData Name and value of a specific summary
element.
RO Y Structure consisting of
SummaryDataName
SummaryDataValue
SummaryDataForm
SummaryDataUnits.
SummaryDataName Name of a specific element of summary data. RO Y Text.
SummaryDataValue Actual value of SummaryDataItem. RO Y Any valid form of data.
SummaryDataForm Identifies the data form of SummaryDataValue. RO Y Enumerated per SEMI E39 Data
Form definitions.
SummaryDataUnits Identifies the units, if any, in which
SummaryDataValue is expressed.
RO Y Enumerated text per SEMI E5, §9.
14.3.5.3 RegionRanges — A region is a group or set of site measurement and can be represented within a table by a
sequential set of rows. To describe a region, it is only necessary to define these rows. Completion of measurements
with a region corresponds to transition 3 in the IMM Data Table Object State Model.
14.3.5.3.1 RegionID — The identifier of a region is required for tables containing measurements made at both sides
of a substrate. In addition, it is useful for other applications to be able to quickly identify the region of primary
interest. In the former case, standard text strings are required. In the second case, identifiers are typically defined
by the measurement recipe, but this is not a requirement.
14.3.5.3.2 FirstRowID — A SEMI E58-compliant table requires the first entry within a row to be unique among all
first row entries within the table. In addition, it must have a simple form (numeric, text, or Boolean) and can not be
floating point. This requirement allows the first entry to be used as a row identifier. Using the row identifier
FirstRowID within RegionDef provides a double check for the client when counting rows.
14.3.5.3.3 FirstRowNum and LastRowNum — All rows appear in a certain sequence within a table. There is a first
row, a second row, etc. In a table with n rows of data, the last row would be the nth row. In a generic SEMI E58
table, rows are not required to be ordered, but for an IMM Data Table Object, rows appear in exactly the same
sequence as measurements were made. Providing the row numbers of the first and last rows allow an external
application to count rows quickly. Verification of the counting accuracy occurs through the provision of the
FirstRowID. If the LastRowNum of one region is i, then the FirstRowNum of the FirstRow of the following region
will have a FirstRowNum value of i + 1.