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SEMI E127-0705 © SEMI 2003, 2005 48 18.3.11 XfrVerify Service Parameters — This service is used to verify to th e partner that the substrate trans fer was completed successf ully from the point of view of t he sender. Pa…

SEMI E127-0705 © SEMI 2003, 2005 47

Parameter Req/Ind

sp/Con

Description

(list of 0+) RetentionRules M — New list of rules, or empty list to clear all rules.

Status — M Status of request.

18.3.7 TransferPathCalibration Service — This service is sent by the Control Client to request a STPO to perform

an automatic calibration. Its parameters are defined in Table 36.

Table 36 TransferPathCalibration Service Parameters

Parameter Req/Ind

sp/Con

Description

ObjID M M(=) Identifier of the STPO.

OrientationIn C — Expected orientation of substrate loaded.

OrientationOut C — Expected orientation of substrate unloaded.

Deltas M An ordered list of changes in the load plane in the x-, y-, and z-position of the

center of the substrate in millimeters respectively.

Status M Status of request.

18.3.8 XfrCmdListRequest — This service provides the Control Client with an ordered list of necessary micro

commands required during a substrate transfer that effect either a Load or Unload operation. Table 37 defines the

parameters of this service. The individual micro commands are then passed to the STPO in the XfrCommand

service below. These micro commands are proprietary, with the exception of two required micro commands, and

need not be understood by the Control Client but must be used in the order in which they appeared in the list.

Table 37 XfrCmdListRequest Service Parameters

Parameter Req/Ind

sp/Con

Description

ObjID M M(=) Identifies the SubstrateTransferPath object.

XfrType M M Identifies the request is for either a load or unload operation.

XfrCmdList — M List of 0+ micro commands.

18.3.9 XfrCommand Service Parameters — This service is used to effect an actual substrate transfer with the IMM

object. Parameters for the XfrCommand service are defined in Table 38.

Table 38 XfrCommand Service Parameters

Parameter Req/Ind

sp/Con

Description

ObjID M — Identifies the STPO.

XfrLink M M(=) Identifies the specific transfer.

XfrCmdName M — Specific micro command to be executed.

XfrStatus — M Reports the success or failure of the micro command. If failure, supplies error

detail.

18.3.10 XfrHalt Service Parameters — The XfrHalt service may be sent by either the Control Client or the IMM to

effect an immediate halt. Parameters for the XfrHalt service are defined in Table 39.

Table 39 XfrHalt Service Parameters

Parameter Req/Ind

sp/Con

Description

XfrLink M M(=) Identifies the specific transfer.

XfrHaltAccept M M True if halt accepted. May be denied only if the specified transfer does not

exist.

SEMI E127-0705 © SEMI 2003, 2005 48

18.3.11 XfrVerify Service Parameters — This service is used to verify to the partner that the substrate transfer was

completed successfully from the point of view of the sender. Parameters for the XfrVerify service are defined in

Table 40.

Table 40 XfrVerify Service Parameters

Parameter Req/Ind

sp/Con

Description

XfrLink M M(=) Identifies the specific transfer.

XfrStatus M M Reflects the transfer status from the point of view of the sender of the request.

19 Services Provided by Client

19.1 List of Client Services

19.1.1 In addition to the services defined in §19, the client is also expected to provide specific services. These are

listed in Table 41. The column labeled Defined identifies the standard where the service is defined. The column

labeled Control indicates if the message is only sent to the Control Client.

Table 41 List of Client Services

Operation Description Defined Control*

UpdateSubstrateObject Used by the STPO when unloading a substrate to provide

information about the substrate.

E90 Y

TableSend Used by the IMM for the AutoTableSend capability. E58 —

20 IMMC Compliance

20.1 Overview of Requirements

20.1.1 An Integrated Measurement Module may be said to be fully compliant to IMMC if and only if all

fundamental IMMC requirements, as shown in Table 42 Compliance below, are fully implemented as specified in

the cited sections. All object attributes, state models, events, and event data shall be implemented.

20.1.2 Additional capabilities, specified in Table 42, are optional for the IMM supplier. If implemented, then they

shall be fully implemented as specified in the cited sections.

20.1.3 Further capabilities, not covered in this standard, may be provided. However, they shall not contradict those

capabilities that are specified here.

20.1.4 IMM Data Table Objects may be implemented by independent software modules for the purpose of allowing

conversion of data in an IMM Raw Data Table, producing an IMM Converted Data Table. Such objects may be

termed IMMC-compliant IMM Data Table Objects. Such an implementation that is not part of a fully IMMC-

compliant Integrated Measurement Module shall not term itself as an IMMC-compliant IMM object.

20.1.5 Table 42 shows the sections that are required for IMMC Compliance.

Table 42 IMMC Compliance

Fundamental IMMC Requirements IMMC Section Level of Compliance

SEMI E40, SEMI E90, and SEMI E116 7.2