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SEMI E127-0705 © SEMI 2003, 2005 49 Fundamental IMMC Requirements IMMC Section Level of Compliance Substrate Transfer Path Object 12.1–12.5 , 12.7.3, 12.9–12.10, 12.11.2.3 , 12.11.3.3  Full  Partia l  Not Implemented …

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SEMI E127-0705 © SEMI 2003, 2005 48
18.3.11 XfrVerify Service Parameters — This service is used to verify to the partner that the substrate transfer was
completed successfully from the point of view of the sender. Parameters for the XfrVerify service are defined in
Table 40.
Table 40 XfrVerify Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
XfrLink M M(=) Identifies the specific transfer.
XfrStatus M M Reflects the transfer status from the point of view of the sender of the request.
19 Services Provided by Client
19.1 List of Client Services
19.1.1 In addition to the services defined in §19, the client is also expected to provide specific services. These are
listed in Table 41. The column labeled Defined identifies the standard where the service is defined. The column
labeled Control indicates if the message is only sent to the Control Client.
Table 41 List of Client Services
Operation Description Defined Control*
UpdateSubstrateObject Used by the STPO when unloading a substrate to provide
information about the substrate.
E90 Y
TableSend Used by the IMM for the AutoTableSend capability. E58 —
20 IMMC Compliance
20.1 Overview of Requirements
20.1.1 An Integrated Measurement Module may be said to be fully compliant to IMMC if and only if all
fundamental IMMC requirements, as shown in Table 42 Compliance below, are fully implemented as specified in
the cited sections. All object attributes, state models, events, and event data shall be implemented.
20.1.2 Additional capabilities, specified in Table 42, are optional for the IMM supplier. If implemented, then they
shall be fully implemented as specified in the cited sections.
20.1.3 Further capabilities, not covered in this standard, may be provided. However, they shall not contradict those
capabilities that are specified here.
20.1.4 IMM Data Table Objects may be implemented by independent software modules for the purpose of allowing
conversion of data in an IMM Raw Data Table, producing an IMM Converted Data Table. Such objects may be
termed IMMC-compliant IMM Data Table Objects. Such an implementation that is not part of a fully IMMC-
compliant Integrated Measurement Module shall not term itself as an IMMC-compliant IMM object.
20.1.5 Table 42 shows the sections that are required for IMMC Compliance.
Table 42 IMMC Compliance
Fundamental IMMC Requirements IMMC Section Level of Compliance
SEMI E40, SEMI E90, and SEMI E116 7.2
Full Partial Not Implemented
Basic Capabilities: Clock, Events, Alarms,
Exceptions, Recipes
7.3
Full Partial Not Implemented
State Models 7.4
Full Partial Not Implemented
Objects and SEMI E39 7.5
Full Partial Not Implemented
Communication Ports and Clients 9–all
Full Partial Not Implemented
IMM Object 11–all
Full Partial Not Implemented
SEMI E127-0705 © SEMI 2003, 2005 49
Fundamental IMMC Requirements IMMC Section Level of Compliance
Substrate Transfer Path Object 12.1–12.5, 12.7.3,
12.9–12.10, 12.11.2.3,
12.11.3.3
Full Partial Not Implemented
IMM Data Table Object 13, 14.1–14.4
Full Partial Not Implemented
IMM Raw Data Table Object 14.5.1–14.5.3
Full Partial Not Implemented
IMM Converted Data Table Object 14.5.1–2, 14.5.4
Full Partial Not Implemented
IMM Calibration Data Table Object 14.5.1–2, 14.5.5
Full Partial Not Implemented
Data Table, Data Row, Data Row Template, and
Data Information Objects
15.1–15.2
Full Partial Not Implemented
Additional Requirements for Substrate Object 16.1–all
Full Partial Not Implemented
Additional Requirements for Process Job
Management
16.2–all
Full Partial Not Implemented
Event Data 17–all
Full Partial Not Implemented
Message Service Definitions 18–all
Full Partial Not Implemented
Additional IMMC Capabilities IMMC Section Level of Compliance
Substrate Verification (Substrate ID Reader) 12.6
Full Partial Not Implemented
Substrate Orientation Detection 12.7–12.7.2, 12.7.4
Full Partial Not Implemented
Transfer Path Calibration (X,Y,Z Detection) 12.8
Full Partial Not Implemented
Master Data Table 15.3
Full Partial Not Implemented
21 Related Documents
21.1 List of Documents
21.1.1 This section is for useful documents related to this standard but not referenced within the specification.
21.1.1.1 Developing Software with UML,
Addison-Wesley c1999 by Oestereich, Bernd
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
SEMI E127-0705 © SEMI 2003, 2005 50
RELATED INFORMATION 1
USE CASES AND SCENARIOS
NOTICE: This related information is not an official part of SEMI E127 and was derived from work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R1-1 Data Tables Objects
R1-1.1 Obtaining A Directory Of Existing Table Objects
R1-1.1.1 The scenario in Table R1-1 illustrates getting a directory of all IMM Data Table Objects using GetAttr.
Table R1-1 Getting a Directory of Tables
Comments Client Dir IMM Comments
1 GetAttr.req
ObjSpec = object
specifier for IMM
ObjType =
‘TableIMM_Data
list of AttrName =
(“Objtype”, “ObjID”)
GetAttr.rsp
list of ObjSetting = pairs o
f
ObjType, ObjID for all existing
tables.
R1-1.2 Getting Table Templates
R1-1.2.1 The client is able to obtain the Data Row Template and Data Information either from an actual table object
or for the Master Data Table Object of interest. In the example shown in Table R1-2, the client wants the
information from the Master Converted Data Table. The same scenario, with different values for ObjType and
ObjID, could be used to get the specific templates for an actual table object.
Table R1-2 Getting IMM Data Table Object Templates
Comments Client Dir IMM Comments
1 GetAttr.req
ObjSpec = object specifier for IMM
ObjType -=
“TableIMM_ConvertedData”
list of ObjID =
“MasterConvertedData”
list of AttrName =
(“RowTemplateID”)
GetAttr.rsp
list of ObjSettings =
(“RowTemplateID”,
“MasterConvertedDataRowTemplate”)
GetAttr.req