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SEMI E127-0705 © SEMI 2003, 2005 54 Comments Client Dir IMM Comments DateTime = 0004…0011 TableTyp e = “TableIMM_RawData” TableID = “FR100” RecipeID = “Reflection33- LEVEL5” SubsrID = “XYZ” 3  Event.nfy 1 st row of conv…

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SEMI E127-0705 © SEMI 2003, 2005 53
R1-1.4.2 The controlling process job may be complete prior to the completion of the IMM Raw Data Table Object,
as soon as the measured substrate has been unloaded by the STPO. This is not shown.
R1-1.4.3 DataTime values in the example below indicate sequence only. Actual date/time values are needed for
implementations.
Table R1-6 Typical Flow of Events for IMM Data Table Objects
Comments Client Dir IMM Comments
1
Event.nfy Process job “ABC” starts.
PrJobID = “ABC”
SubstrID = “XYZ”
DateTime = 0000
Check on right prjob id
name.
Event.nfy Data table created –
IMMDTSM-T1.
DateTime = 0001
TableType =
“TableIMM_RawData”
TableID = “FR100”
RecipeID = “Reflection33-
LEVEL5”
SubsrID = “XYZ”
2a
Event.nfy Row complete –
IMMDTSM-T2.
DateTime = 0002
TableType =
“TableIMM_RawData”
TableID = “FR100”
RecipeID = “Reflection33-
LEVEL5”
SubsrID = “XYZ”
RowNum = 1
Event.nfy IMM Converted Data
Table created –
IMMDTSM-T1.
DateTime = 0003
TableType =
“TableIMM_ConvertedData”
TableID = “FT100”
RecipeID = “FilmThickness-
LEVEL5”
SubsrID = “XYZ”
2b
Event.nfy The above message is sent
as rows i = 2-8 complete.
DateTime = 0004…0010
TableType =
“TableIMM_RawData”
TableID = “FR100”
RecipeID = “Reflection33-
LEVEL5”
SubsrID = “XYZ”
RowNum = i
Event.nfy Raw data table completed
– IMMDTS
M-T4.
SEMI E127-0705 © SEMI 2003, 2005 54
Comments Client Dir IMM Comments
DateTime = 0004…0011
TableType =
“TableIMM_RawData”
TableID = “FR100”
RecipeID = “Reflection33-
LEVEL5”
SubsrID = “XYZ”
3
Event.nfy 1
st
row of converted data
completed – IMMDTSM-
T2.
DateTime = 0012
TableType =
“TableIMM_ConvertedData”
TableID = “FT100”
RecipeID = “FilmThickness-
LEVEL5”
SubsrID = “XYZ”
RowNum = 1
4
Event.nfy Row complete –
IMMDTSM-T2, for row i
= 2–8.
DateTime = 0013 - 0019
TableType =
“TableIMM_ConvertedData”
TableID = “FT100”
RecipeID = “FilmThickness-
LEVEL5”
SubsrID = “XYZ”
RowNum = i
3b
Event.nfy Table completed –
IMMDTSM-T4.
DateTime = 0020
TableType =
“TableIMM_ConvertedData”
TableID = “FT100”
RecipeID = “FilmThickness-
LEVEL5”
SubsrID = “XYZ”
SummaryData =xxx
SEMI E127-0705 © SEMI 2003, 2005 55
RELATED INFORMATION 2
USE OF IMMC WITH EPT
NOTICE: This related information is not an official part of SEMI E127 and was derived from work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R2-1 Association of IMMC State Changes with EPT Module State Changes
R2-1.1 The IMMC defines the IMM as an EPT Module, and the tool connected to the IMM is required to include
the IMM among its EPT Modules.
R2-1.2 The EPT state of the IMM as a whole is based on three components: the state of the STPO, the state of the
portion of the IMM that is independent of the STPO (representing loading and unloading of substrates) and the
combined state of any IMM Data Table Object (representing either current measurement (raw data) or calibration)
or data conversion activities. The IMMC does not require the IMM-only (exclusive of STPO and IMM Data Table
Object states) to have a state model representing any other activities that it may be performing, but to correctly
calculate the EPT state as a whole, its own EPT states must be done.
R2-1.2.1 IMM-Only State — Excluding activities performed by, and subsystems used only by, an STPO or
represented by an IMM Data Table Object state, the IMM-only may contain various subsystems, such as an aligner,
the various sensors used for measuring, and mechanisms for moving a substrate from one Substrate Location to
another, but excludes those mechanisms used solely by an STPO. The IMM-only, then, will be either:
actively performing some task, with or without material, with no faults (EPT-BUSY),
inactive, without material, and with no reason that would prevent it from performing any of its normal tasks
(EPT-IDLE), or
inactive, either with material present or because of a fault in one of its subsystems (EPT-BLOCKED).
R2-1.2.2 The IMM Service state is not related to the IMM EPT State. Whether IN SERVICE or OUT OF
SERVICE, the IMM-Only can be in any of the three EPT states.
R2-1.3 STPO State
R2-1.3.1 The STPO is IDLE only in the READY TO LOAD state. Here it has no material, is performing no
activity, and has nothing to prevent it from performing a load activity.
R2-1.3.2 The STPO is BUSY only in the ASSIGNED state.
R2-1.3.3 The STPO is BLOCKED in the BLOCKED state.
R2-1.3.4 The STPO is BLOCKED in the READY TO UNLOAD state, because, although it is not performing an
activity, it has material.
R2-1.4 IMM Data Table Object State
R2-1.4.1 The combined IMM Data Table Object state, for EPT purposes, is determined by the combination of all
IMM Data Table Objects stored within the IMM.
R2-1.4.2 The combined state is BUSY if at least one IMM Data Table Object is IN PROCESS.
R2-1.4.3 If no IMM Data Table Object is IN PROCESS, then the combined state is IDLE.
R2-1.4.4 There is no state for an IMM Data Table Object that corresponds to BLOCKED.
R2-1.5 The rules for determining the IMM EPT State are as follows:
If any of the above components is BLOCKED, then the IMM EPT State is BLOCKED.
If no component is BLOCKED and at least one is BUSY, then the IMM EPT State is BUSY.
If all three components are IDLE, then the IMM EPT State is IDLE.