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SEMI E127.1-0705 © SEMI 2004, 2005 1 SEMI E127.1-0705 SPECIFICATION FOR SECS-II PROT OCO L FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC) This specificatio n was technically approved by the gl obal Information &…
SEMI E127-0705 © SEMI 2003, 2005 56
R2-1.6 The statements in the above sections are summarized in tabular format by Table R2-1. It illustrates the fact
that BLOCKED has precedent over BUSY and IDLE, and BUSY has precedence over IDLE.
Table R2-1 Determination of IMM EPT State
IMM ONLY State STPO State IMM Data Table State IMM EPT State
IDLE READY TO LOAD all IN RETENTION IDLE
BLOCKED any any BLOCKED
BUSY any but BLOCKED any BUSY
any BLOCKED any BLOCKED
any but BLOCKED ASSIGNED any BUSY
any but BLOCKED any but BLOCKED one or more IN PROCESS BUSY
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SEMI E127.1-0705 © SEMI 2004, 2005 1
SEMI E127.1-0705
SPECIFICATION FOR SECS-II PROTOCOL FOR INTEGRATED
MEASUREMENT MODULE COMMUNICATIONS (IMMC)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published March 2004;
previously published November 2004.
1 Purpose
1.1 This document maps the services and data of IMMC to SECS-II streams and functions and data definitions.
2 Scope
2.1 This document applies to all implementations of IMMC that use the SECS-II message protocol (SEMI E5).
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E90.1 — Provisional Specification for SECS-II Protocol Substrate Tracking
SEMI E127 — Specification for Integrated Measurement Module Communications: Concepts, Behavior, and
Services (IMMC)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Conventions
4.1 Names of SECS-II data items are in all upper case. Names of SEMI E127 services, parameters, and attributes
are in Title or mixed case.
4.2 SML notation is used for SECS-II format codes. See SEMI E30, Section 8.4.
5 Services Mapping
5.1 Table 1 shows the specific SECS-II streams and functions that shall be used for SECS-II implementations of the
services defined in IMMC.
Table 1 Services Mapping Table
Message Name Stream, Function SECS-II Message Name
ChangeService S14, F19/20 Generic Service Request/Acknowledge
ClientConnect S14, F19/20 Generic Service Request/Acknowledge
ClientDisconnect S14, F19/20 Generic Service Request/Acknowledge
RequestRetentionConditions S14, F19/20 Generic Service Request/Acknowledge
SetAutoTableSend S14, F19/20 Generic Service Request/Acknowledge
SetRetentionConditions S14, F19/20 Generic Service Request/Acknowledge
TransferPathCalibration S14, F19/20 Generic Service Request/Acknowledge
SEMI E127.1-0705 © SEMI 2004, 2005 2
Message Name Stream, Function SECS-II Message Name
XfrCmdListReq S14, F19/20 Generic Service Request/Acknowledge
XfrCommand.req S4, F29 Handoff Command (HO)
XfrCommand.rsp S4, F31 Handoff Command Complete (HCC)
XfrVerify.req S4, F33 Handoff Verified (HV)
XfrVerify.rsp S4, F33 Handoff Verified (HV)
XfrHalt.req S4, F39 Handoff Halt (HH)
XfrHalt.rsp S4, F41 Handoff Halt Acknowledge (HHA)
#1
All Stream 4 messages are primaries with no replies defined. This avoids transaction timeouts.
#2
The response to S4, F33 is another S4, F33.
#3
Mappings for UpdateSubstrateObject are defined in SEMI E90.1. Mappings for Delete, GetAttr and SetAttr are defined in SEMI E39.1.
6 Service Parameter Mapping
6.1 Two tables providing mappings service parameter mappings are provided, one for those services mapped to S14,
F19/20 and one for those services mapped to Stream 4.
6.2 Table 2 shows the mapping for service parameters and their elements for services mapped to S14, F19/20. The
data item SVCNAME is the text string representation of the service name found in Table 1 and should be assumed
as case-sensitive. The name of each parameter is the text string representation of the parameter name as it appears in
Table 2.
Table 2 Service Parameter Mapping Table for S14, F19/20
Parameter Name (SPNAME) Parameter Range (SPVAL) SECS-II Data Item Reference SECS-II Format
AutoSendCalibrationData TRUE/FALSE SPVAL BOOLEAN
AutoSendConvertedData TRUE/FALSE SPVAL BOOLEAN
AutoSendRawData TRUE/FALSE SPVAL BOOLEAN
ClientID Text SPVAL A[1,40]
ClientInterfaceVersion Text SPVAL A[1,80]
ClientConnectAck TRUE/FALSE SVCACK BOOLEAN
ClientConnectStatus — L, 2
1. <SVCACK>
2. <Status>
ClientType Enumerated: “Ctrl” or “Data” SPVAL A[4]
Deltas — SPVAL L,3
1. <F8>
2. <F8>
3. <F8>
ErrorCode Enumerated ERRCODE U2
ErrorText 80 characters ERRTEXT A[1,80]
OrientationIn Any SPVAL F8
OrientationOut Any SPVAL F8
Properties — SPVAL L, n
1. L, 2
1. <ATTRID
2. <ATTRDATA>
.
n. L,2
1. <ATTRID
2. <ATTRDATA>