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SEMI E127.1-0705 © SEMI 2004, 2005 4 6.4 Table 4 shows t he data item s in SECS II m essages that do not have a co rresponding service pa rameter. Table 4 A d ditional Data Item Require ment Table Function SECS-II Messag…

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SEMI E127.1-0705 © SEMI 2004, 2005 3
Parameter Name (SPNAME) Parameter Range (SPVAL) SECS-II Data Item Reference SECS-II Format
RetentionRules — SPVAL L,n
1. <RetentionRule
1
>
.
n. <RetentionRule
n>
ServiceAck Enumerated SVCACK BIN
Status — SPVAL L, n
1. L, 2
1. < ErrorCode >
2. < ErrorText >
.
n. L,2
1. < ErrorCode >
2. < ErrorText >
Substid 1–80 characters SPVAL [A1,80]
XfrCmdList — SPVAL L,n
1. <HOCMDNAME
1
>
.
n. <HOCMDNAME
n
>
6.3 Table 3 provides the parameter mappings for services mapped to Stream 4.
Table 3 Service Parameter Mapping Table for Stream 4
Parameter Name Parameter Range SECS-II Data Item Reference SECS-II Format
ErrorCode Enumerated ERRCODE U2
ErrorText 80 characters ERRTEXT A[1,80]
ObjID names/value Text = “ObjID”
Text = value of STPO ObjID
CPNAME
1
CPVAL
1
A[5]
A[1,80]
Status — SPVAL L, n
1. L, 2
1. <ErrorCode>
2. <ErrorText>
.
n. L,2
1. < ErrorCode >
2. < ErrorText >
XfrAck TRUE/FALSE HOACK BOOLEAN
XfrCmdName 1–20 characters HOCMDNAME A[1,20]
XfrHaltAccept 0–1 HOHALTACK I1
XfrLink 0–65,535 TRLINK U2
XfrStatus — — L, 2
1. <HOACK>
2. <Status>
SEMI E127.1-0705 © SEMI 2004, 2005 4
6.4 Table 4 shows the data items in SECS II messages that do not have a corresponding service parameter.
Table 4 Additional Data Item Requirement Table
Function SECS-II Message SECS-II Data Item
Used to satisfy SECS-II conventions for linking a multi-block inquiry with
subsequent multi-block message.
S14,F19 DATAID
Specifies the number of the HOCMDNAME in XfrCmdList, Table 2. S4. F29 MCINDEX
Name of IMMC service. Enumerated text strings:
ChangeService
ClientConnect
ClientDisconnect
RequestRetentionConditions
SetAutoTableSend
SetRetentionConditions
TransferPathCalibration
XfrCmdListReq
S14, F19 SVCNAME
A unique number generated by the service requestor to identify a specific
operation and connect it to a later completion confirmation. If there are multiple
STPOs, OPID in the S14, F19 message used for UpdateSubstrateObject and
TRLINK shall be assigned the same value to allow the hand-off messages in
Stream 4 to be matched to the properties of the substrate being transferred.
S14, F19 OPID
Used to uniquely identify one substrate handoff from another. Assigned by the
Control Client. If there are multiple STPOs, OPID in the S14, F19 message used
for UpdateSubstrateObject and TRLINK shall be assigned the same value to
allow the hand-off messages in Stream 4 to be matched to the properties of the
substrate being transferred.
S4, F29, 31, 33, 39 TRLINK
6.5 Table 5 provides the parameter mapping for IMMC service parameters not specified in Tables 2 or 3.
Table 5 Mapping for Elements of Service Parameters
ElementName Mapping SPVAL Format
RetentionRule Each RetentionRule is either a list of RetentionRules to be
ANDed together, or a single RetentionRule. Each
RetentionRule is sent as a name/value pair.
L,2
1. <RetentionRuleName>
2. <RetentionRuleValue>
or
L, n
1. <RetentionRule>
.
n. <RetentionRule>
RetentionRuleName Enumerated text strings:
“AfterXfr”
“ClientDel”
“MaxTbl”
“RetTime”
A[6,9]
RetentionRuleValue Any non-negative integer. U2
SEMI E127.1-0705 © SEMI 2004, 2005 5
6.6 Table 6 provides the mappings from ErrorCodes in SEMI E127 to ERRCODE values in SEMI E5.
Table 6 ErrorCode Mappings to ERRCODE Values
Service Valid Logical Values for ErrorCode ERRCODE
ClientConnect Client Already Connected
Duplicate ClientID
Invalid ClientType
IncompatibleVersions
32772 = Client Already Connected
32773 = Duplicate ClientID
32774 = Invalid ClientType
32775 = IncompatibleVersions
ClientDisconnect Unrecognized ClientID (Client not currently connected)
32776 = Unrecognized ClientID (Client
not currently connected)
XfrCommand Rejected/Unrecognized Command
Rejected/Parameter Error
32771 = Invalid command
47 – Invalid Parameter
XfrCommand
XfrVerify
Failed (Completed Unsuccessfully)
Failed (Unsafe) – External intervention required
32777 = Failed (Completed
Unsuccessfully)
32778 = Failed (Unsafe) – External
intervention required
XfrVerify Sensor-Detected Obstacle
Material Not Sent
Material Not Received
Material Lost
Hardware Failure
Transfer Cancelled
32779 = Sensor-Detected Obstacle
32780 = Material Not Sent
32781 = Material Not Received
32782 = Material Lost
32783 = Hardware Failure
32784 = Transfer Cancelled
All other services Action performed – no errors
Action will be performed at earliest opportunity
Action can not be performed now
Action failed due to errors
Unrecognized command
At least one parameter has an error
0 - No error.
32768 = Action will be performed at
earliest opportunity
32769 = Action can not be performed
now
32770 = Action failed due to errors
32771 = Invalid command
47 – Invalid Parameter
7 Object Attribute Form
7.1 §7 defines the SECS-II form of the attributes of objects defined in IMMC, presented in alphabetical order. Note
that attribute names in this section indicate the literal text string that shall be accepted in string comparisons for
attribute names in Stream 14 messages.
7.2 By convention, all tables include ObjID as well as ObjType as the two attributes required by SEMI E39.
Table 7 specifies the attributes of the Integrated Measurement Module.
Table 7 Integrated Measurement Module Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType “IMM” A[3]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
EventList List of 0+ text/integer pairs L,n
1. L,2
1. <A[1,80]
2. <U2 or U4>
.
n. L,2
1. <A[1,80]
2. <U2 or U4>