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SEMI E127.1-0705 © SEMI 2004, 2005 9 Table 13 IMM Conve rted Data Tabl e Object Attribute Specification Attribute Name Range/Value SECS-II Format ObjType Text = “TableIMM_ConvertedData”. A[22] ObjID Text. Conforms to res…

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SEMI E127.1-0705 © SEMI 2004, 2005 8
7.5.1 Elements of the complex attributes of the IMM Data Table Object are mapped in Table 11.
Table 11 Elements of Complex Attributes of IMM Data Table Object
Attribute Name Range/Value SECS-II Format
RegionDef List of 0+ structures consisting of RegionID, FirstRowID,
FirstRowNum, LastRowNum.
L, n
1. L,4
1. <RegionID
1
>
2. <FirstRowID
1
>
3. <FirstRowNum
1
>
4. <LastRowNum
1
>
.
n. L,4
1. <RegionID
n
>
2. <FirstRowID
n
>
3. <FirstRowNum
n
>
4. <LastRowNum
n
>
RegionID Text. For tables containing measurements from both sides of
a substrate, the text shall begin with the string “Front” or the
string “Back”.
A[1,80]
FirstRowID Any integer or text. A[1,80], In, Un
FirstRowNum 0–65,535 U2
LastRowNum 0–65,535 U2
SummaryData Structure consisting of SummaryDataName, SummaryData-
Value, SummaryDataForm, and SummaryDataUnits.
L, n
1. <SummaryDataName>
2. <SummaryDataValue>
3. <SummaryDataForm>
4. <SummaryDataUnits>
SummaryDataName Text. A[1,80]
SummaryDataValue Any valid range. Dependent on IMM supplier documentation. Any
SummaryDataForm Enumerated per SEMI E5, §9. Any
SummaryDataUnits Enumerated text per SEMI E5, §9. Alphanumeric text.
7.6 IMM Calibration Data Table Object — Table 12 specifies the attributes of the IMM Calibration Data Table
Object.
Table 12 IMM Calibration Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “TableIMM_CalibratedData”. A[23]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
CalibrationDuration 0–65,535 U2
CalibrationStatus Enumerated:
1 = Success
2 = Failed
U2
CalibrationTimeStamp Timestamp format. A[16]
RefSubstid Text. Conforms to restrictions for SubstID in SEMI E90,
SEMI E90.1
A[1,80]
7.7 IMM Converted Data Table Object — Note that the IMM Converted Data Table Object inherits the attributes of
the IMM Data Table Object (Table 10). Table 13 specifies the additional attributes of the IMM Converted Data
Table Object.
SEMI E127.1-0705 © SEMI 2004, 2005 9
Table 13 IMM Converted Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “TableIMM_ConvertedData”. A[22]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
ConversionRecipeID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
FeatureType Enumerated text:
“CD linewidth”
“Thickness”
“Reflectivity”
“GoodnessOfFit”
….
A[]
RawDataTable Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
7.8 IMM Raw Data Table Object — Table 14 specifies the attributes of the IMM Raw Data Table Object. Note that
the IMM Raw Data Table Object inherits the attributes of an IMM Data Table Object (Table 10)
Table 14 IMM Raw Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “TableIMM_RawData”. A[16]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
MeasurementRecipeID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
7.9 Data Row Object — Table 15 specifies the attributes of the Data Row Object.
Table 15 Data Row Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “DataRow”. A[7]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
DataItem
i
Any except list of mixed types of data. Array, A[], In, Un, Fn
RowNum 0–65,535 U2
RowOwner A valid object specifier conforming to the form of ObjSpec in
SEMI E39.
A[1,80]
7.10 Data Row Template Object — Table 16 specifies the attributes of the Data Row Template object.
Table 16 Data Row Template Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “DataRow_Template”. A[16]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
DataInfoIDList List of 0+ text. L, n
1. A[1,80]
.
1. A[1,80]
NumEntries 0–65,535 U2
7.11 Data Information Object — Table 17 specifies the attributes of the Data Table object.
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Table 17 Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “DataInfo”. A[8]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
Assurance Any
DataType Enumerated text.
arrays of integers =AR[In, Un] for n = 1, 2, 4, 8
arrays of floats = AR[F4, F8]
ASCII = A[n] for n characters or A[min, max] for variable
length strings
Integers = I2, I4, I8, U2, U4, or U8
binary bytes = B[n] for n bytes
Boolean = BOOLEAN
A[n]
Description Text. A[1,80]
InterdependencyRule Text. A[1,400]
Units Enumerated per SEMI E5, §9. A[1+]
Use Text. A[1,80]
ValidityRule Text. A[1,80]
7.12 Additional Attributes of the Substrate Object — Table 18 specifies the attributes of the Substrate object in
addition to those specified in SEMI E90.
Table 18 Additional Substrate Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ProcessFlowStep Text. A[1,80]
OrientationIn Any F8
OrientationOut Any F8
ProcessToolID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
ProcessRecipeID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
SubstrSide Enumerated:
Unknown = 0
Front = 1
Back = 2
Both = 3
>3 reserved
U2
8 Event Variables
8.1 Table 19 shows the mapping of event variables to SECS-II format. All event variables are DVVALs.
Table 19 Event Variables mapped to SECS-II
Event Variables Associated Object Format
DateTime IMM, STPO Timestamp format. A[16]
Service IMM U1
SubstrateListChangeType IMM U1
Enumerated:
1 = Addition
2 = Deletion
SubstrateID IMM A[1,80]. Conforms to restrictions for SubstID in SEMI E90, E90.1