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SEMI E127.1-0705 © SEMI 2004, 2005 10 Table 17 Data Table Object Attribute Specification Attribute Name Range/Value SECS-II Format ObjType Text = “DataInfo”. A[8] ObjID Text. Conforms to restrictions for OBJID in SEMI E3…

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SEMI E127.1-0705 © SEMI 2004, 2005 9
Table 13 IMM Converted Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “TableIMM_ConvertedData”. A[22]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
ConversionRecipeID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
FeatureType Enumerated text:
“CD linewidth”
“Thickness”
“Reflectivity”
“GoodnessOfFit”
….
A[]
RawDataTable Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
7.8 IMM Raw Data Table Object — Table 14 specifies the attributes of the IMM Raw Data Table Object. Note that
the IMM Raw Data Table Object inherits the attributes of an IMM Data Table Object (Table 10)
Table 14 IMM Raw Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “TableIMM_RawData”. A[16]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
MeasurementRecipeID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
7.9 Data Row Object — Table 15 specifies the attributes of the Data Row Object.
Table 15 Data Row Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “DataRow”. A[7]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
DataItem
i
Any except list of mixed types of data. Array, A[], In, Un, Fn
RowNum 0–65,535 U2
RowOwner A valid object specifier conforming to the form of ObjSpec in
SEMI E39.
A[1,80]
7.10 Data Row Template Object — Table 16 specifies the attributes of the Data Row Template object.
Table 16 Data Row Template Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “DataRow_Template”. A[16]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
DataInfoIDList List of 0+ text. L, n
1. A[1,80]
.
1. A[1,80]
NumEntries 0–65,535 U2
7.11 Data Information Object — Table 17 specifies the attributes of the Data Table object.
SEMI E127.1-0705 © SEMI 2004, 2005 10
Table 17 Data Table Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ObjType Text = “DataInfo”. A[8]
ObjID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
Assurance Any
DataType Enumerated text.
arrays of integers =AR[In, Un] for n = 1, 2, 4, 8
arrays of floats = AR[F4, F8]
ASCII = A[n] for n characters or A[min, max] for variable
length strings
Integers = I2, I4, I8, U2, U4, or U8
binary bytes = B[n] for n bytes
Boolean = BOOLEAN
A[n]
Description Text. A[1,80]
InterdependencyRule Text. A[1,400]
Units Enumerated per SEMI E5, §9. A[1+]
Use Text. A[1,80]
ValidityRule Text. A[1,80]
7.12 Additional Attributes of the Substrate Object — Table 18 specifies the attributes of the Substrate object in
addition to those specified in SEMI E90.
Table 18 Additional Substrate Object Attribute Specification
Attribute Name Range/Value SECS-II Format
ProcessFlowStep Text. A[1,80]
OrientationIn Any F8
OrientationOut Any F8
ProcessToolID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
ProcessRecipeID Text. Conforms to restrictions for OBJID in SEMI E39.1, §6. A[1,80]
SubstrSide Enumerated:
Unknown = 0
Front = 1
Back = 2
Both = 3
>3 reserved
U2
8 Event Variables
8.1 Table 19 shows the mapping of event variables to SECS-II format. All event variables are DVVALs.
Table 19 Event Variables mapped to SECS-II
Event Variables Associated Object Format
DateTime IMM, STPO Timestamp format. A[16]
Service IMM U1
SubstrateListChangeType IMM U1
Enumerated:
1 = Addition
2 = Deletion
SubstrateID IMM A[1,80]. Conforms to restrictions for SubstID in SEMI E90, E90.1
SEMI E127.1-0705 © SEMI 2004, 2005 11
SubstrLocStateChange IMM A[]
Enumerated per SEMI E90.1
TableCount IMM U2
SubstrXfrPathID STPO A[1,80]
SubstrateList STPO L, n
1. <SubstrateID
1>
.
n. <SubstrateID
n>
SubstidRead STPO A[1,80]. Conforms to restrictions for SubstID in SEMI E90, E90.1
OrientationIn STPO F8
OrientationOut STPO F8
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