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SEMI E130-1104 © SEMI 2003, 2004 12 18.4.3 A non-matrix substrate is a substr ate where the step size between ad jacent devices spanning an e xposure field is no di fferent from the step si ze between a djacent de vices …

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SEMI E130-1104 © SEMI 2003, 2004 11
17.2.3 The Z coordinate is zero if the wafer is out of contact (the chuck is down) with the probes and one if it is in
contact (the chuck is up).
17.2.4 The MOVE command specifies the number of rows and columns to move from the current position. When
the move is complete, DieXCoordinate will be changed to DieXCoordinate+X; DieYCoordinate will be changed to
DieYCoordinate+Y. When the Z parameter is included in the MOVE command, a value of (Z = –1) moves the
chuck to the down coordinate, a value of (Z = +1) moves the chuck to the up coordinate, and a value of (Z = 0)
leaves the chuck in the starting Z coordinate.
17.2.5 The MOVE-ABS command specifies the new die coordinates. When the move is complete, DieXCoordinate
will be changed to X; DieYCoordinate will be changed to Y; and the chuck will be down (Z = 0) or up (Z = 1).
17.2.6 The MOVE-SUBSTEP remote command moves the substrate in units smaller than the die size. The step
resolution for the X,Y and Z axis is available for query from the equipment status variables MinXStep, MinYStep
and MinZStep. X, Y, and Z are all relative motions in the specified units. The prober may apply an appropriate
compensation factor to adjust for thermal expansion, etc.
18 Coordinate System
18.1 This standard provides a coordinate system capable of describing simple geometries. Additional user-defined
attributes may be required in addition to the attribute definitions contained in this specification.
18.2 This coordinate system does not include information for establishing which devices on a substrate are “good”
devices. The guidelines for assigning the row and column index number are set forth in SEMI G81.
18.3 General Coordinate Attributes
18.3.1 Rows — The number of rows on a substrate in the Y-axis. A row must contain at least one complete device
to be included in this count.
18.3.2 Columns — The number of columns on a substrate in the X-axis. A column must contain at least one
complete device to be included in this count.
MatrixSizeX
MatrixSizeY
StepSizeX
StepSizeY
DeviceSizeY
DeviceSizeX
Figure 3
Dimensional Attributes
18.4 Matrix Substrates
18.4.1 The term “Matrix” is used to describe the step periodicity associated with an exposure field. Applicable
when the step size between adjacent devices spanning an exposure field is different from the step size of adjacent
devices within an exposure field.
18.4.2 This standard does not address complex geometries where individual device sizes vary within an exposure
field or between exposure fields or where exposure step sizes vary across the substrate.
SEMI E130-1104 © SEMI 2003, 2004 12
18.4.3 A non-matrix substrate is a substrate where the step size between adjacent devices spanning an exposure
field is no different from the step size between adjacent devices within an exposure field.
18.4.4 Matrix Attributes
18.4.4.1 MatrixDeviceRows — This is the number of device rows within an exposure field. This value is dependent
upon the Orientation recipe attribute but not the OrientationOnChuck attribute. For non-matrix substrates, the value
of this attribute is 1.
18.4.4.2 MatrixDeviceCols — This is the number of device columns within an exposure field. This value is
dependent upon the Orientation recipe attribute but not on the OrientationOnChuck attribute. For non-matrix
substrates, the value of this attribute is 1.
18.4.4.3 MatrixSizeX — The X-axis step size in microns between a device in one exposure field and the same
device in an adjacent exposure field. For non-matrix substrates, the value of this attribute is equal to the StepSizeX
attribute. This attribute is dependant on the Orientation recipe attribute.
18.4.4.4 MatrixSizeY — The Y-axis step size in microns between a device in one exposure field and the same
device in an adjacent exposure field. For non-matrix substrates, the value of this attribute is equal to the StepSizeY
attribute. This attribute is dependant on the Orientation recipe attribute.
18.5 Reference Device
18.5.1 The Reference Device establishes the link between the coordinate system Row and Column and the physical
location on the substrate.
18.5.2 Reference Device Attributes
18.5.2.1 RefDevicePosX — This is the offset of the center of the reference device in the X direction from the center
of the substrate with the substrate Orientation at 0º and OriginLocation = 3.
18.5.2.2 RefDevicePosY — This is the offset of the center of the reference device in the Y direction from the center
of the substrate with the substrate Orientation at 0º and OriginLocation = 3.
y
-x
+x
+y
SUBSTRATE CENTER
REFERENCE DEVICE CENTER
Figure 4
Reference Device Position (RefDevicePosX and RefDevicePosY)
SEMI E130-1104 © SEMI 2003, 2004 13
18.5.2.3 ReferenceDeviceX — This is the Column number corresponding to the Reference Device. This value is
dependent upon the Orientation and OriginLocation recipe attributes but not the OrientationOnChuck attribute.
18.5.2.4 ReferenceDeviceY — This is the Row number corresponding to the Reference Device. This value is
dependent upon the Orientation and OriginLocation recipe attributes but not the OrientationOnChuck attribute.
18.5.2.5 RefDeviceMatrixX — This is the Column number corresponding to the Reference Device within a given
exposure field. This value is dependent upon the Orientation and OriginLocation recipe attributes but not the
OrientationOnChuck attribute. For non-matrix substrates, this attribute is 1.
18.5.2.6 RefDeviceMatrixY — This is the Row number corresponding to the Reference Device within a given
exposure field. This value is dependent upon the Orientation and OriginLocation recipe attributes but not the
OrientationOnChuck attribute. For non-matrix substrates, this attribute is 1.
18.6 Coordinate Origin — The Coordinate Origin identifies the axis quadrant occupied by the substrate for
addressing devices on the substrate.
+
y
+x
Type: "BottomLeft"
+y
+x
Type: "TopLeft"
+x
Type: "TopRight"
+y
+x
Type: "BottomRight"
+y
+x
Type: "Center"
+y
0
0
0
0
0
Figure 5
Coordinate Origin (OriginLocation)
18.6.1 Origin Recipe Attributes
18.6.1.1 OriginLocation — Coordinate system on substrate to address devices. Enumerated:
0 = Center, 1 = Upper Right, 2 = Upper Left 3 = Lower Left (default), 4 = Lower Right.
18.7 Orientation
18.7.1 Orientation addresses the location of the substrate primary fiducial (flat or notch).