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SEMI E130-1104 © SEMI 2003, 2004 13 18.5.2.3 ReferenceDeviceX — This is the Column number correspond in g to the Reference De vice. This value is dependent upon th e Orientation and OriginLocation recipe attributes but n…

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18.4.3 A non-matrix substrate is a substrate where the step size between adjacent devices spanning an exposure
field is no different from the step size between adjacent devices within an exposure field.
18.4.4 Matrix Attributes
18.4.4.1 MatrixDeviceRows — This is the number of device rows within an exposure field. This value is dependent
upon the Orientation recipe attribute but not the OrientationOnChuck attribute. For non-matrix substrates, the value
of this attribute is 1.
18.4.4.2 MatrixDeviceCols — This is the number of device columns within an exposure field. This value is
dependent upon the Orientation recipe attribute but not on the OrientationOnChuck attribute. For non-matrix
substrates, the value of this attribute is 1.
18.4.4.3 MatrixSizeX — The X-axis step size in microns between a device in one exposure field and the same
device in an adjacent exposure field. For non-matrix substrates, the value of this attribute is equal to the StepSizeX
attribute. This attribute is dependant on the Orientation recipe attribute.
18.4.4.4 MatrixSizeY — The Y-axis step size in microns between a device in one exposure field and the same
device in an adjacent exposure field. For non-matrix substrates, the value of this attribute is equal to the StepSizeY
attribute. This attribute is dependant on the Orientation recipe attribute.
18.5 Reference Device
18.5.1 The Reference Device establishes the link between the coordinate system Row and Column and the physical
location on the substrate.
18.5.2 Reference Device Attributes
18.5.2.1 RefDevicePosX — This is the offset of the center of the reference device in the X direction from the center
of the substrate with the substrate Orientation at 0º and OriginLocation = 3.
18.5.2.2 RefDevicePosY — This is the offset of the center of the reference device in the Y direction from the center
of the substrate with the substrate Orientation at 0º and OriginLocation = 3.
y
-x
+x
+y
SUBSTRATE CENTER
REFERENCE DEVICE CENTER
Figure 4
Reference Device Position (RefDevicePosX and RefDevicePosY)
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18.5.2.3 ReferenceDeviceX — This is the Column number corresponding to the Reference Device. This value is
dependent upon the Orientation and OriginLocation recipe attributes but not the OrientationOnChuck attribute.
18.5.2.4 ReferenceDeviceY — This is the Row number corresponding to the Reference Device. This value is
dependent upon the Orientation and OriginLocation recipe attributes but not the OrientationOnChuck attribute.
18.5.2.5 RefDeviceMatrixX — This is the Column number corresponding to the Reference Device within a given
exposure field. This value is dependent upon the Orientation and OriginLocation recipe attributes but not the
OrientationOnChuck attribute. For non-matrix substrates, this attribute is 1.
18.5.2.6 RefDeviceMatrixY — This is the Row number corresponding to the Reference Device within a given
exposure field. This value is dependent upon the Orientation and OriginLocation recipe attributes but not the
OrientationOnChuck attribute. For non-matrix substrates, this attribute is 1.
18.6 Coordinate Origin — The Coordinate Origin identifies the axis quadrant occupied by the substrate for
addressing devices on the substrate.
+
y
+x
Type: "BottomLeft"
+y
+x
Type: "TopLeft"
+x
Type: "TopRight"
+y
+x
Type: "BottomRight"
+y
+x
Type: "Center"
+y
0
0
0
0
0
Figure 5
Coordinate Origin (OriginLocation)
18.6.1 Origin Recipe Attributes
18.6.1.1 OriginLocation — Coordinate system on substrate to address devices. Enumerated:
0 = Center, 1 = Upper Right, 2 = Upper Left 3 = Lower Left (default), 4 = Lower Right.
18.7 Orientation
18.7.1 Orientation addresses the location of the substrate primary fiducial (flat or notch).
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90 deg. 270 deg.
180 deg.
0 deg.
Figure 6
Orientation of the Substrate Notch
18.8 Orientation Attributes
18.8.1 Orientation — Identifies the orientation of the fiducial when defining the coordinate system on a substrate.
This parameter in conjunction with the OriginLocation recipe attribute determines the coordinate and size attributes
of devices on a substrate.
18.8.2 OrientationOnChuck — Identifies the orientation of a substrate loaded on the chuck. This attribute does not
affect the coordinate and size attributes of devices on a substrate.
18.9 Example Coordinate References — The values presented in this section are for demonstration purposes
(measurements are not exact).
18.9.1 Orientation — The recipe attributes presented in Figure 7 reflect an Orientation attribute setting of 0º. The
recipe attributes presented in Figure 8 reflect an Orientation attribute setting of 90º.