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SEMI E49.4-0298 © SEMI 1995, 1998 4 8 Component Guidelines 8.1 For com po nent leak rate and c y c le life requirements, see Section 7, Materials G uidelines. 8.2 Valves sho uld be ball (dry asse m b ly, l ubricant- free…

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SEMI E49.4-0298 © SEMI 1995, 19983
Table 1 Summary of Recommended Specifications
Description Value Units
Internal Surface Chemistry (AUGER)
Surface chromium oxide enhanced layer thickness at
1/2 peak height of measured oxygen signal level
For an example of a test method, see SEMASPEC 90120573B (ESCA)
≥ 15 Å
Internal Surface Chemistry (ESCA)
Total chromium to iron ratio including both reduced
and oxidized stated
For an example of a test method, see SEMASPEC 90120403B (ESCA)
≥ 1.25:1 value
Internal Surface Chemistry (EDX)
Surface foreign elements, those elements not in the
Smelter’s Test Report (SMTR)
Test procedures per ASTM F 1375 (EDX)
0value
Internal Surface Defects
Photos per test method
Counts per photo
Test procedures per ASTM F 1375 (SEM)
5
≤ 50
value
value
Internal Surface Roughness
Average surface roughness
Roughness average (R
a
)
Maximum surface R
a
(individual reading)
For example of a test method, see SEMASPEC 90120400B (Contact Profilometry)
≤ 0.25
(≤ 10)
≤ 0.38
(≤ 15)
µm
(µin.)
µm
(µin.)
Particulate Contribution
at ≥ 0.1 µm size
at ≥ 0.02 µm size
Test procedures per ASTM F 1394 (Particles)
≤ 0.71 (20)
≤ 2.6 (75)
ptc/L (ptc/ft
3
)
ptc/L (ptc/ft
3
)
Internal Absorbed Moisture
Time to recover to base line from a 2 ppm spike
for low surface area component (valve, regulator)
Time to recover to baseline from a 2 ppm spike
for high surface area component (filters, tubing)
Test procedures per ASTM F 1397
≤ 4
≤ 6
hour
hour
Total Anionic Contamination
Total anionic contamination added to test water
Individual anionic contaminant
Test procedures per ASTM D 4327 (Total Anions)
≤ 1
≤ 0.2
ppm
ppm
Leak Rate
Inboard leak rates for He
Outboard leak rate for He
Cross-seat leak rates for He
Test procedures per SEMI F1 (Leak Rate)
≤ 1 × 10
-9
≤ 1 × 10
-5
≤ 1 × 10
-8
scc/s
scc/s
scc/s
Cycle Life
Manual values pressure automatic valves
High Pressure automatic valves
Low Pressure automatic valves
Test procedures per ASTM F 1375 (Cycle Life)
≥ 25 K
≥ 25 K
≥ 500 K
cycles
cycles
cycles
SEMI E49.4-0298 © SEMI 1995, 1998 4
8 Component Guidelines
8.1 For component leak rate and c ycle life
requirements, see Section 7, Materials Guidelines.
8.2 Valves should be ball (dry asse mbly, lubricant-
free) or bellows type. Metal diaphragm valves are
optional.
8.3 Regulators should be packless in design with all
metal bonnet seals.
8.4 Regulators and valve flow coefficient (C
v
) should
be selected based on liquid flow requirements and
liquid characteristics.
8.5 Mechanical fittings should be compression type or
metal face seal type with solid nickel gaskets.
8.6 Pressure gauges should be liquid-filled type with
compression or metal face seal fittings. Gauge isolators
are recommended.
8.7 Filters should be PTFE media rated at 0.1 µm pore
size.
8.8 Check valves should be disk poppet type.
9 Subsystem Assembly Gui delines
See SEMI E49.6 for recommended SS system assembly
procedures.
10 Related Documents
10.1 SEMATECH Documents
4
SEMASPEC 90120400B — Test Method for
Determination of Surface Roughness by Contact
Profilometry for Gas Distribution System Components
SEMASPEC 90120403B — Test Method for XPS
Analysis of Surface Composition and Chemistry of
Electropolished Stainless Steel Tubing for Gas
Distribution System Components
SEMASPEC 90120573B — Test Method for AES
Analysis of Surface and Oxide Composition of
Electropolished Stainless Steel Tubing for Gas
Distribution System Components
4 SEMATECH, Technology Transfer Department, 2706 Montopolis
Drive, Austin, TX 78741
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E49.5-0298 © SEMI 1995, 19981
SEMI E49.5-0298
GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS
IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
1 Purpose
1.1 This document specifies guidelines for ultrahigh
purity (UHP) solvent distribution systems in
semiconductor production equipment.
2 Scope
2.1 The distribution systems consi st of stainless steel
(SS) piping designed to supply flammable solvents
only.
2.2 Typical tools include photolith ography track
equipment, solvent wet stations, and isopropyl alcohol
vapor dryers.
3 Referenced Documents
3.1 SEMI Standards
SEMI E49 — Guide for Standard Performance,
Practices, and Sub-Assembly for High Purity Piping
Systems and Final Assembly for Semiconductor
Manufacturing Equipment
SEMI E49.6 — Guide for Subsystem Assembly and
Testing Procedures - Stainless Steel Systems
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
3.2 ASM Document
1
ASM UNS S31603 — Composition of Standard
Stainless Steels
3.3 ASTM Standards
2
See Section 3.3 of SEMI E49.
4 Terminology
See Section 4 of SEMI E49.
5 Performance Guidelines
5.1 Leak Test and Purity Indices
5.1.1 Pressure Decay Test
• Test Media — Nitrogen (N
2
)
Pressure — 2 times system operating pressure
1 American Society of Metals, Metals Park, OH 44073
2 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
• Time — 24 hours
• Temperature — Constant
• Fail-Pressure Loss — > 1% of test pressure
5.1.2 N
2
Particle Count (ptc), at ≥ 0.1 µm Size
• < 0.18 ptc/L (< 5 ptc/ft
3
) average single count
• < 1.8 ptc/L (< 50 ptc/ft
3
) maximum single count
5.1.3 Moisture Level — ≤ 200 ppb
5.2 All performance measures are absolute values,
relative to respective test instrument background level.
5.3 See SEMI E49.6 for recommended solvent system
testing procedures.
5.4 Reliability and Maintainability Indices —
Equipment supplier should provide actual gas system
performance data and/or component reliability data,
accompanied by the associated failure analysis method.
Indices Hours
Mean time between failure (MTBF)
Mean time between assists (MTBA)
Mean time to repair (MTTR)
Start-up time (Initial)
6 Design Guidelines
6.1 All weld joints should be automatically orbital butt
welded.
6.2 Mechanical fittings should be used where required
for component removal/replacement.
6.3 Dead volumes should be less t han three pipe
diameters in length/height. Blind runs such as pressure
gauges should not be used.
6.4 A means of process liquid sampling should be
installed as close as possible to point of dispense.
6.5 Incoming process liquids require filters and should
be located downstream of any regulator and as close as
possible to point of dispense.
6.6 The system internal volume should be minimized
by use of Dead Space Free (DSF) branch valves and/or
multi-component integrated assemblies.