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SEMI E130-1104 © SEMI 2003, 2004 16 Host Pro ber MOVE-ABS( X = 6, Y = 2) PS: AWAITING COMMAND t o MOVING XYZ( ) PS: MOVI NG XYZ t o AWAIT ING COMMAND( X = 6, Y = 2) R eci pe Pa ram eters: Or ie nt at i on = 0 O ri gin Lo…

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A
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DEF
OriginLocation = 3
Orientation = 0
ReferenceDeviceX = 5
ReferenceDeviceY = 15
RefDeviceMatrixX=1
RefDeviceMatrixY=2
ReferenceDevicePosX = -64,646.45
ReferenceDevicePosY = 113,131.13
DeviceSizeX = C
DeviceSizeY = D
MatrixSizeX = A
MatrixSizeY = F
MatrixDeviceRows = 2
MatrixDeviceCols = 3
StepSizeX = B
StepSizeY = E
Rows = 16
Columns = 17
Figure 7
Example Coordinates Orientation = 0
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ABC
OriginLocation = 3
Orientation = 90
ReferenceDeviceX = 15
ReferenceDeviceY = 13
RefDeviceMatrixX = 2
RefDeviceMatrixY = 3
ReferenceDevicePosX = -64,646.45
ReferenceDevicePosY = 113,131.13
DeviceSizeX = D
DeviceSizeY = C
MatrixSizeX = F
MatrixSizeY = A
MatrixDeviceRows = 3
MatrixDeviceCols = 2
StepSizeX = E
StepSizeY = B
Rows = 17
Columns = 16
Figure 8
Example Coordinates Orientation = 90
18.9.2 Orientation on Chuck — The following example demonstrates the effect of probing a substrate with different
settings of the OrientationOnChuck recipe attribute. The OrientationOnChuck attribute has no impact on the
coordinate values communicated between the host and the equipment.
SEMI E130-1104 © SEMI 2003, 2004 16
Host Prober
MOVE-ABS(X = 6, Y = 2)
PS: AWAITING COMMAND to MOVING XYZ()
PS: MOVING XYZ to AWAITING COMMAND(X = 6, Y = 2)
Recipe Parameters:
Orientation = 0
OriginLocation = 3
MOVE-ABS(X = 7, Y = 2)
PS: AWAITING COMMAND to MOVING XYZ()
PS: MOVING XYZ to AWAITING COMMAND(X = 7, Y = 2)
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OrientationOnChuck = 0
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OrientationOnChuck = 90
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OrientationOnChuck = 0
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OrientationOnChuck = 90
Figure 9
Example OrientationOnChuck
19 Collection Event List
19.1 Requirements
19.1.1 All GEM-required events are required by the PSEM300. Since Processing State Model is required by the
PSEM300, all state transitions are required collection events.
19.1.2
All GEM-required events associated with the Communications, Alarm, and Spooling State Models are
required. This section of the PSEM300 lists only those collection events that are not associated with a change of
state or those requiring specific data variables or reports as defined in the PSEM300.
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19.2 Collection Event Table
19.2.1 Table 3 shows events and reports required for the PSEM300 process state transition. Table 4 shows other
collection events.
Table 3 Collection Events Required by Process State Transition
Transition Transition
No.
Current State New State Typical Variable Data
1 No state
6 HANDLING MATERIAL
Into IDLE
18 IDLE WITH ALARMS
IDLE
Into IDLE with ALARMS 17 IDLE IDLE with ALARMS Alarm Id
2 IDLE
Into SETTING UP
7 HANDLING MATERIAL
SETTING UP
3 SETTING UP
Into AWAITING LOAD
5 HANDLING MATERIAL
AWAITING LOAD
4 AWAITING LOAD
Into HANDLING
MATERIAL
9 AWAITING COMMAND
HANDLING MATERIAL
8 HANDLING MATERIAL
11 MOVING XYZ
X, Y,Z
Into AWAITING
COMMAND
13 SERVICE TASK
AWAITING COMMAND
X,Y,Z, Task Result
Into MOVING XYZ 10 AWAITING COMMAND MOVING XYZ
12 AWAITING COMMAND
Into SERVICE TASK
14 SERVICE TASK
SERVICE TASK Task Id
Into PROCESSING
BLOCKED
15 PROCESS PROCESS BLOCKED
Conditional 16 PROCESSING BLOCKED PROCESS
Table 4 Additional Collection Events
Event Name Contents Typical Variable Data
CleaningMediaDepleted The cleaning media has been depleted. Cleaning media identifier
InkingMediaDepleted The inking media has been depleted.
ProbeCardRemoved The probe card has been removed from the prober. ProbeCardId
ProbeCardInstalled The probe card has been installed on the prober. ProbeCardId
ControlMapCompleted The prober has completed indexing to each of the sites
identified in the control map.
20 Data Item Variables
20.1 The purpose of this section is to define the list of data item variables required by the PSEM300. Values of
these variables will be available to the host through collection event reports and host status queries.
20.2 Requirements
20.2.1 All generic variable data items defined in GEM are required by all PSEM300 equipment. Any supplier-
defined variables shall be documented in the same format used by this document. The following minimum
information is required:
20.3 Data Types
20.3.1 Equipment constants remain in effect until they are overwritten either by manual entry or by a “New
Equipment Constant Send” remote command. Equipment constants have various uses in PSEM300, including the
following: