semi合集-English.pdf - 第3310页

SEMI E130-1104 © SEMI 2003, 2004 24 22.3.13 MOVE-SUBSTEP — This command is used to perform a sub- index step. At least one of the optional parameters: XSubstep, YSubstep, or Z Substep must be included wit h this command.…

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SEMI E130-1104 © SEMI 2003, 2004 23
22.3.9 LOAD-TEST-SUBST — This command causes a test substrate from the specified substrate location to be
loaded onto the chuck.
22.3.9.1 A substrate occupying the chuck is suspended. When the host issues the UNLOAD-TEST-SUBST
command, a suspended substrate is automatically resumed.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOAD-TEST-SUBST”
SubstLocID M Text Substrate Location containing the test substrate.
Ack - M Integer Service Acknowledgement.
22.3.10 LOCKOUT-CONTROL — This command is used to enable and disable the equipment console during
remote operations. Passing a value of Lockout=TRUE disables the equipment console and requires the user to
switch the control state to ONLINE LOCAL to regain console control.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOCKOUT-CONTROL”
Lockout M C Boolean True = Lockout console control. User must switch to
ONLINE-LOCAL mode to regain control.
Ack - M Integer Service Acknowledgement.
22.3.11 MOVE — This commande is used to perform a relative move operation. At least one of the optional
parameters: X, Y, or Z must be included with this command. An omitted X, Y, or Z is equivalent to specifying zero.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE”
X C - Integer
Y C - Integer
Z C - Integer
Relative step value. At least one parameter must be included.
Ack - M Integer Service Acknowledgement.
22.3.12 MOVE-ABS — This command is used to perform an absolute move. At least one of the optional
parameters: X, Y, or Z must be included with this command. An omitted X, Y, or Z is equivalent to specifying the
current value, resulting in no net movement in that direction.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE-ABS”
X C - Integer
Y C - Integer
Z C - Integer
Absolute index. At least one parameter must be included.
Ack - M Integer Service Acknowledgement.
SEMI E130-1104 © SEMI 2003, 2004 24
22.3.13 MOVE-SUBSTEP — This command is used to perform a sub-index step. At least one of the optional
parameters: XSubstep, YSubstep, or ZSubstep must be included with this command. An omitted XSubstep,
YSubstep, or ZSubstep is equivalent to specifying zero.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE-SUBSTEP”
XSubstep C - Float
YSubstep C - Float
ZSubstep C - Float
Relative step value. At least one parameter must be
included.
Ack - M Integer Service Acknowledgement.
22.3.14 MOVE-TO-REF-DIE — Move to the Reference Die coordinate as defined within the recipe.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE–TO-REF-DIE”
Ack - M Integer Service Acknowledgement.
22.3.15 UNLOAD-TEST-SUBST — This command unloads the test substrate from the chuck to the specified
substrate location. A suspended substrate is automatically resumed.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “UNLOAD-TEST-SUBST”
SubstLocID M Text Target Substrate Location.
Ack - M Integer Service Acknowledgement.
22.3.16 RESET-CONTACT-CNT — This command is used to reset the accumulators associated with the number of
contacts made for a given probe card.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “RESET-CONTACT-CNT”
Ack - M Integer Service Acknowledgement.
22.3.17 RESET-CONTROL MAP — This command is used to reset the coordinate index within a current Control
Map. The host can designate the coordinate index within the Control Map by providing the optional XY coordinates
with this command.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “RESET-CONTROL-MAP”
X C - Integer
Y C - Integer
If coordinates are designated, both X and Y must be
provided. The host is responsible for providing XY
coordinates that match coordinates contained in the
Control Map.
Ack - M Integer Service Acknowledgement.
SEMI E130-1104 © SEMI 2003, 2004 25
22.3.18 SET-PROBE-CARD-ID — This command is used to set the probe card ID attribute on the tool.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “SET-PROBE-CARD-ID”
ProbeCardID M - Text Prober card identifier.
Ack - M Integer Service Acknowledgement.
22.3.19 SET-CONTROL-MAP — This command is used to identify the control map. See Section 15 for the
discussion of control maps.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “SET-CONTROL-MAP”
ControlMap M - Text Identifies the name of the control map.
X C - Integer
Y C - Integer
If coordinates are designated, both X and Y must be
provided. The host is responsible for providing XY
coordinates that match coordinates contained in the
Control Map.
Ack - M Integer Service Acknowledgement.
22.3.20 UNLOAD-SUBSTRATE — This command is used to unload the substrate occupying the chuck. The chuck
is unoccupied upon completion of this command.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “UNLOAD-SUBSTRATE”
Ack - M Integer Service Acknowledgement.
22.3.21 UNLOAD-ALLSUBSTRATES — This command is used to unload substrates occupying the chuck and
pipeline stages.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “UNLOAD-ALLSUBSTRATES”
SUSPEND C - Boolean If included, causes the substrate occupying the chuck to be
suspended.
Ack - M Integer Service Acknowledgement.
22.3.22 ONLINE-LOCAL — This command is used to change the control state from On-Line Remote to On-Line
Local.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “ONLINE-LOCAL”
Ack - M Integer Service Acknowledgement.