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SEMI E130-1104 © SEMI 2003, 2004 30 R1-1.1.2.2 Job Start — At this point, t he Process Jo b is in the PROCESSING state and t h e prober i s waiting for the host to begin processing the m ateri al identified in the PRMtlN…

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SEMI E130-1104 © SEMI 2003, 2004 29
R1-1.1.2 Sequence Diagram
R1-1.1.2.1 Job Setup
Host Prober
E87 Bind()
E40: PRMultiCreate()
E94 Create CJ1()
CJ1: to QUEUED()
PJ01: to POOLED()
PJ02: to POOLED()
CJ1: QUEUED to SELECTED()
PJ01: POOLED to SETTING UP()
PJ01: SETTING UP to PROCESSING()
PS: IDLE to SETTING UP
PS: SETTING UP to AWAITING LOAD
User
Deliver FOUP to tool
CA: IDNR to IDVO
CA: SMNR to SMVO()
LP: READY TO LOAD to TRANSFER BLOCKED()
LPCA: NOT ASSOCIATED to ASSOCIATED
Reference: SEMI E87
Normal Roundtrip 2
CA: to IDNR
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-2
Normal Run - Job Setup Scenario
SEMI E130-1104 © SEMI 2003, 2004 30
R1-1.1.2.2 Job Start — At this point, the Process Job is in the PROCESSING state and the prober is waiting for the
host to begin processing the material identified in the PRMtlNameList.
Host Prober
Load Substrate()
Move substrate to Pre-align()
Load substrate on Chuck()
Move next substrate to Pre-align()
Align and Profile
PS: HANDLING MATERIAL to AWAITING COMMAND
PS: AWAITING LOAD to HANDLING MATERIAL
CA: NOT ACCESSED to IN ACCESS()
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.01
SubstPJ01.02
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-3
Normal Run - Job Start Scenario
SEMI E130-1104 © SEMI 2003, 2004 31
R1-1.1.2.3 Process Material
Host Prober
MOVE-ABS()
PS: AWAITING COMMAND to MOVING XYZ()
Move Chuck to Designated Coordinates()
PS: MOVING XYZ to AWAITING COMMAND()
The Host issues Move XYZ command
as required to achieve full step coverage
on the substrate. Host determines which
sites will be processed
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-4
Normal Run - Material Processing Scenario
R1-1.1.2.4 Load 2
nd
Substrate
Host Prober
Load Substrate()
Unload substrate from chuck
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile()
PS: AWAITING COMMAND to HANDLING MATERIAL()
PS: HANDLING MATERIAL to AWAITING COMMAND
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.02
SubstPJ01.03
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-5
Normal Run - Load 2
nd
Substrate Scenario