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SEMI E130-1104 © SEMI 2003, 2004 36 R1-1.2 Scenario II – Substr ate Tracking Event s — This scenario dem onstrates the E90 Substrate tracking events corresponding to the job defined in Scenario I. E40 and E9 4 messages a…

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SEMI E130-1104 © SEMI 2003, 2004 35
R1-1.1.2.9 Unload PJ02 substrate 3
User
If the host issues the LOAD-SUBSTRATE command when
there are no more unprocessed substrates contained in the
Process Job's PRMtlName list, and there is not another
Process Job ready to be processed, the prober will interpret
the command as an UNLOAD-SUBSTRATE command.
Host Prober
UNLOAD-SUBSTRATE()
PS: AWAITING COMMAND to HANDLING MATERIAL
Unload substrate from chuck
PS: HANDLING MATERIAL to IDLE()
PJ02: PROCESSING to PROCESS COMPLETE()
PJ02: PROCESSING COMPLETE to TERMINAL()
CJ1: EXECUTING to COMPLETED()
CA: IN ACCESS to CARRIER COMPLETE()
Undock FOUP()
LP: TRANSFER BLOCKED to READY TO UNLOAD()
Start Remove FOUP()
LP: READY TO UNLOAD to TRANSFER BLOCKED()
LP: TRANSFER BLOCKED to READY TO LOAD()
End Remove FOUP()
CA: to TERMINAL()
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-10
Normal Run – Unload 3
rd
Substrate of PJ02 Scenario
SEMI E130-1104 © SEMI 2003, 2004 36
R1-1.2 Scenario II – Substrate Tracking Events — This scenario demonstrates the E90 Substrate tracking events
corresponding to the job defined in Scenario I. E40 and E94 messages are omitted for clarity.
R1-1.2.1 Job Setup
Host Prober
E87 Bind
User
Deliver FOUP to tool
CA: IDNR to IDVO
CA: SMNR to SMVO
LP: READY TO LOAD to TRANSFER BLOCKED
LPCA: NOT ASSOCIATED to ASSOCIATED
CA: to IDNR
SubstPJ01.01: to AT SOURCE()
SubstPJ01.01: to NEEDS PROCESSING()
SubstPJ01.02: to AT SOURCE()
SubstPJ01.02: to NEEDS PROCESSING
SubstPJ01.03: to AT SOURCE
SubstPJ01.03: to NEEDS PROCESSING
SubstPJ02.01: to AT SOURCE
SubstPJ02.01: to NEEDS PROCESSING
SubstPJ02.02: to AT SOURCE
SubstPJ02.02: to NEEDS PROCESSING
SubstPJ02.03: to AT SOURCE
SubstPJ02.03: to NEEDS PROCESSING
CarrierA.01: to OCCUPIED()
CarrierA.02: to OCCUPIED()
CarrierA.03: to OCCUPIED
CarrierA.23: to OCCUPIED
CarrierA.24: to OCCUPIED()
CarrierA.25: to OCCUPIED()
Figure R1-11
Substrate Tracking – Job Setup Scenario
SEMI E130-1104 © SEMI 2003, 2004 37
R1-1.2.2 Job Start
Host Prober
Load Substrate()
Move substrate to Pre-align()
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
PS: HANDLING MATERIAL to AWAITING COMMAND
PS: AWAITING LOAD to HANDLING MATERIAL
CA: NOT ACCESSED to IN ACCESS()
Pre-align: UNOCCUPIED to OCCUPIED()
CarrierA.01: OCCUPIED to UNOCCUPIED
Main Chuck: UNOCCUPIED to OCCUPIED
Pre-align
Pre-align: OCCUPIED to UNOCCUPIED
Pre-align: UNOCCUPIED to OCCUPIED
CarrierA.02: OCCUPIED to UNOCCUPIED
SubstPJ01.01: AT SOURCE to AT WORK()
SubstPJ01.01: AT WORK to AT WORK()
SubstPJ01.01: NEEDS PROCESSING to IN PROCESS()
SubstPJ01.02: AT SOURCE to AT WORK()
Pre-align
Loading a substrate onto the Pre-align
stage begins as soon as the Pre-align
stage becomes available. The timing of
this task is asynchronous with respect to
the processing of the substrate on the
main chuck.
Figure R1-12
Substrate Tracking – Job Start Scenario
R1-1.2.3 Process Material — No Substrate Tracking events occur as the substrate on the main chuck is processed.
R1-1.2.4 Load 2
nd
Substrate
Host Prober
Load Substrate()
Unload substrate from chuck
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
PS: AWAITING COMMAND to HANDLING MATERIAL()
PS: HANDLING MATERIAL to AWAITING COMMAND
SubstPJ01.01: IN PROCESS to PROCESSED()
CarrierA.01: UNOCCUPIED to OCCUPIED()
Main Chuck: OCCUPIED to UNOCCUPIED()
Main Chuck: UNOCCUPIED to OCCUPIED()
SubstPJ01.01: AT W O RK to AT DESTINATION()
SubstPJ01.02: AT WORK to AT W ORK()
SubstPJ01.02: NEEDS PROCESSING to IN PROCESS()
Pre-align: OCCUPIED to UNOCCUPIED()
Pre-align: UNOCCUPIED to OCCUPIED
CarrierA.03: OCCUPIED to UNOCCUPIED()
SubstPJ01.03: AT SOURCE to AT WORK()
Pre-align
Unloading a substrate from the main chuck
triggers the substrate state transition from
PROCESSING to PROCESSED. The host is
responsible for determining the processing
for a given substrate. If the host doesn't
issue any MOVEXYZ remote commands for a
substrate (i.e. no die on the substrate are probed),
the substrate will still proceed to the PROCESSED
state by virtue of having been loaded and unloaded
from the main chuck.
Figure R1-13
Substrate Tracking – Load 2
nd
Substrate Scenario