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SEMI E130-1104 © SEMI 2003, 2004 38 R1-1.2.5 Process Remaining Material — The Substrate Tracking events are identi cal for t he remaining substrates in the two process jo bs. R1-1.3 Scenario III – PJ1 is Stopp ed on 2 nd…

SEMI E130-1104 © SEMI 2003, 2004 37

R1-1.2.2 Job Start

Host Prober

Load Substrate()

Move substrate to Pre-align()

Load substrate on Chuck

Move next substrate to Pre-align

Align and Profile

PS: HANDLING MATERIAL to AWAITING COMMAND

PS: AWAITING LOAD to HANDLING MATERIAL

CA: NOT ACCESSED to IN ACCESS()

Pre-align: UNOCCUPIED to OCCUPIED()

CarrierA.01: OCCUPIED to UNOCCUPIED

Main Chuck: UNOCCUPIED to OCCUPIED

Pre-align

Pre-align: OCCUPIED to UNOCCUPIED

Pre-align: UNOCCUPIED to OCCUPIED

CarrierA.02: OCCUPIED to UNOCCUPIED

SubstPJ01.01: AT SOURCE to AT WORK()

SubstPJ01.01: AT WORK to AT WORK()

SubstPJ01.01: NEEDS PROCESSING to IN PROCESS()

SubstPJ01.02: AT SOURCE to AT WORK()

Pre-align

Loading a substrate onto the Pre-align

stage begins as soon as the Pre-align

stage becomes available. The timing of

this task is asynchronous with respect to

the processing of the substrate on the

main chuck.

Figure R1-12

Substrate Tracking – Job Start Scenario

R1-1.2.3 Process Material — No Substrate Tracking events occur as the substrate on the main chuck is processed.

R1-1.2.4 Load 2

Substrate

Host Prober

Load Substrate()

Unload substrate from chuck

Load substrate on Chuck

Move next substrate to Pre-align

Align and Profile

PS: AWAITING COMMAND to HANDLING MATERIAL()

PS: HANDLING MATERIAL to AWAITING COMMAND

SubstPJ01.01: IN PROCESS to PROCESSED()

CarrierA.01: UNOCCUPIED to OCCUPIED()

Main Chuck: OCCUPIED to UNOCCUPIED()

Main Chuck: UNOCCUPIED to OCCUPIED()

SubstPJ01.01: AT W O RK to AT DESTINATION()

SubstPJ01.02: AT WORK to AT W ORK()

SubstPJ01.02: NEEDS PROCESSING to IN PROCESS()

Pre-align: OCCUPIED to UNOCCUPIED()

Pre-align: UNOCCUPIED to OCCUPIED

CarrierA.03: OCCUPIED to UNOCCUPIED()

SubstPJ01.03: AT SOURCE to AT WORK()

Pre-align

Unloading a substrate from the main chuck

triggers the substrate state transition from

PROCESSING to PROCESSED. The host is

responsible for determining the processing

for a given substrate. If the host doesn't

issue any MOVEXYZ remote commands for a

substrate (i.e. no die on the substrate are probed),

the substrate will still proceed to the PROCESSED

state by virtue of having been loaded and unloaded

from the main chuck.

Figure R1-13

Substrate Tracking – Load 2

Substrate Scenario

SEMI E130-1104 © SEMI 2003, 2004 38

R1-1.2.5 Process Remaining Material — The Substrate Tracking events are identical for the remaining substrates in

the two process jobs.

R1-1.3 Scenario III – PJ1 is Stopped on 2

Substrate — This scenario involves the same job description as

Scenario I. After the 2nd substrate from PJ1 is loaded on the chuck, the host issues a PJStop service message. PJ1

is unloaded and PJ2 continues processing. The purpose of this scenario is to demonstrate the affect of an abnormal

job event as it relates to the Process State model.

R1-1.3.1 Preconditions — This section provides a summary of the sequence steps from scenario I leading up to the

PJStop.

R1-1.3.1.1 Job setup. See Section R1-1.1.2.1

R1-1.3.1.2 Job Start. See Section R1-1.1.2.2.

R1-1.3.1.3 Process Material. See Section R1-1.1.2.3

R1-1.3.1.4 Load 2

substrate. See Section R1-1.1.2.4.

R1-1.3.1.5 Process Material. See Section R1-1.1.2.3

R1-1.3.1.6 Physical View

Pre-Align Chuck

CarrierA

PJ02

PJ01

SubstPJ01.02SubstPJ01.03

Figure R1-14

Physical View after 2

Substrate Loaded

R1-1.3.1.7 State Models

Table R1-1 Object States after 2

Substrate Loaded

Object Reference Description States Occupied

PS Process State model AWAITING COMMAND

CJ1 Control Job 1 EXECUTING

PJ01 Process Job 1 PROCESSING

PJ02 Process Job 2 PROCESSING

SubstPJ01.01 PJ1 Substrate 1 AT DESTINATION; PROCESSED

SubstPJ01.02 PJ1 Substrate 2 AT WORK; IN PROCESSED

SubstPJ01.03 PJ1 Substrate 3 AT WORK; NEEDS PROCESSING

SubstPJ02.01 PJ2 Substrate 1 AT SOURCE; NEEDS PROCESSING

SubstPJ02.02 PJ2 Substrate 2 AT SOURCE; NEEDS PROCESSING

SubstPJ02.03 PJ2 Substrate 3 AT SOURCE; NEEDS PROCESSING

R1-1.3.1.8 Stop PJ1

Host Prober

PRJobCommand.req (PRCmdName=STOP)()

Return PJ01 Substrate 3 to FOUP()

Unload substrate from chuck()

PS: AWAITING COMMAND to HANDLING MATERIAL()

Move PJ02 Substrate 1 to Pre-align()

Load substrate on Chuck()

PJ01: PROCESSING to STOPPING()

SubstPJ01.02: PROCESSING to STOPPED()

SubstPJ01.03: AT WORK to AT SOURCE()

SubstPJ01.02: AT WORK to AT DESTINATION()

Move next substrate to Pre-align()

Align and Profile()

PJ01: STOPPING to Terminal()

PJ02: POOLED to SETTING UP()

PJ02: SETTING UP to PROCESSING()

PS: HANDLING MATERIAL to AWAITING COMMAND()

Figure R1-15

Stop PJ01 Scenario

R1-1.3.1.9 Post Conditions

R1-1.3.1.9.1 State Models

Table R1-2 Object States After PJ01 Stopped

Object Reference Description States Occupied

PS Process State model AWAITING COMMAND

CJ1 Control Job 1 EXECUTING

PJ01 Process Job 1 Terminal (non existent)

PJ02 Process Job 2 PROCESSING

SubstPJ01.01 PJ1 Substrate 1 AT DESTINATION; PROCESSED

SubstPJ01.02 PJ1 Substrate 2 AT DESTINATION; STOPPED

SubstPJ01.03 PJ1 Substrate 3 AT SOURCE; NEEDS PROCESSING

SubstPJ02.01 PJ2 Substrate 1 AT WORK; IN PROCESS

SubstPJ02.02 PJ2 Substrate 2 AT WORK; NEEDS PROCESSING

SubstPJ02.03 PJ2 Substrate 3 AT SOURCE; NEEDS PROCESSING

R1-1.3.1.10 Post Processing — The following sequence would be followed to complete the job:

R1-1.3.1.10.1 Load PJ02 Substrate 2. See Section R1-1.1.2.7

R1-1.3.1.10.2 Process Material. See Section R1-1.1.2.3