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SEMI E130-1104 © SEMI 2003, 2004 43 R1-1.6 Scenario VI – Recoverable Alarm — An error occurs when the prob er is re sponding to a MOVE XYZ command (the chuck could not com plete the motion). The ho st is able to restart …

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SEMI E130-1104 © SEMI 2003, 2004 42
Host Prober
Load Substrate
PS: AWAITING LOAD to HANDLING MATERIAL
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
Move substrate to Pre-align
PS: HANDLING MATERIAL to AWAITING COMMAND(X:3, Y:16)
INDEX
PS: AWAITING COMMAND to MOVING XYZ
PS: MOVING XYZ to AWAITING COMMAND(X:4, Y:16)
INDEX
PS: MOVING XYZ to AWAITING COMMAND(X:5, Y:16)
PS: AWAITING COMMAND to MOVING XYZ
Tester
Start
Start
Device Test Complete(Passed)
MOVE-ABS(X:4, Y:16)
PS: MOVING XYZ to AWAITING COMMAND(X:4, Y:16)
PS: AWAITING COMMAND to MOVING XYZ
Start
Device Test Complete(Failed)
Start
Device Test Complete(Failed)
CLEAN-PROBES
PS: AWAITING COMMAND to SERVICE TASK(TaskId:CLEAN-PROBES)
PS: SERVICE TASK to AWAITING COMMAND(X:4, Y:16, Passed)
Start
Device Test Complete(Passed)
MOVE-ABS(X:5, Y:16)
PS: AWAITING COMMAND to MOVING XYZ
PS: MOVING XYZ to AWAITING COMMAND(X:5, Y:16)
Start
Device Test Complete(Passed)
INDEX
PS: AWAITING COMMAND to MOVING XYZ
PS: MOVING XYZ to AWAITING COMMAND(X:6, Y:16)
Start
Device Test Complete(Passed)
ControlMapCompleted
The INDEX command drives the chuck
to the next unprobed site contained
in the control map
Device Test Complete(Passed)
Host issues the MOVE XYZ command
to reprobe the sites previously probed
when the INDEX command was used.
INDEX
Figure R1-18
Control Map Usage Scenario
SEMI E130-1104 © SEMI 2003, 2004 43
R1-1.6 Scenario VI – Recoverable Alarm — An error occurs when the prober is responding to a MOVE XYZ
command (the chuck could not complete the motion). The host is able to restart processing after the chuck is
initialized.
Host Prober
Alarm Notification
PS: MOVING XYZ to PROCESSING BLOCKED()
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ()
Internal Error Occurs()
Alarm Cleared()
PS: HANDLING MATERIAL to AWAITING COMMAND(X: RefX, Y:RefY)
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Resume normal processing
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PS: PROCESSING BLOCKED to HANDLING MATERIAL
Align Substrate
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ
Host notified user of alarm condition
User performs error recovery
procedure which ultimately results in
the re-initialization of the chuck
PS: MOVING XYZ to AWAITING COMMAND(X:targetX, Y:targetY)
Figure R1-19
Recoverable Alarm Scenario
SEMI E130-1104 © SEMI 2003, 2004 44
R1-1.7 Scenario VII – Inspect and Clean Probes — The host issues an INSPECT-PROBES command during
substrate processing. The probe inspection fails so the host issues the CLEAN-PROBES command. The prober is
configured to automatically inspect the probes after the probe cleaning operation. The host resumes processing after
the successful clean/inspection:
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Host Prober
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ()
PS: MOVING XYZ to AWAITING COMMAND(X:targetX, Y:targetY)
Move Chuck to Designated Coordinates()
Host attributes repeat unit defect to probes()
Tester
Start()
Device Test Complete(Result:Fail)
INSPECT-PROBES()
PS: AWAITING COMMAND to SERVICE TASK(TaskId:INSPECT-PROBES)
Perform Inspection()
PS: SERVICE TASK to AWAITING COMMAND(X:targetX, Y:targetY, Fail)
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
CLEAN-PROBES()
PS: AWAITING COMMAND to SERVICE TASK(TaskId:CLEAN-PROBES)
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
CLEAN-PROBES()
Since the INSPECT-PROBES service task failed,
the host issues the CLEAN-PROBES command
If the prober automatically performs a probe inspection
after performing a probe cleaning, the Process State
model transition #14 would signify the transition from
the CLEAN-PROBES service task to the INSPECT-PROBES
service task
PS: SERVICE TASK to SERVICE TASK(Task Id: INSPECT-PROBES)
PS: SERVICE TASK to AWAITING COMMAND(X:targetX, Y:targetY, Task Result: Passed)
SERVICE TASK
14
SERVICE TASK
Task Id:
CLEAN-PROBES
Task Id:
INSPECT-PROBES
Figure R1-20
Probe Inspection and Cleaning Scenario