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SEMI E130-1104 © SEMI 2003, 2004 44 R1-1.7 Scenar io VII – Inspect and Clean Probes — The host issues an INSPECT-PROBES command duri ng substrate processing. The probe insp ection fails so the host issues the CL EAN-PROB…

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SEMI E130-1104 © SEMI 2003, 2004 43
R1-1.6 Scenario VI – Recoverable Alarm — An error occurs when the prober is responding to a MOVE XYZ
command (the chuck could not complete the motion). The host is able to restart processing after the chuck is
initialized.
Host Prober
Alarm Notification
PS: MOVING XYZ to PROCESSING BLOCKED()
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ()
Internal Error Occurs()
Alarm Cleared()
PS: HANDLING MATERIAL to AWAITING COMMAND(X: RefX, Y:RefY)
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Resume normal processing
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PS: PROCESSING BLOCKED to HANDLING MATERIAL
Align Substrate
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ
Host notified user of alarm condition
User performs error recovery
procedure which ultimately results in
the re-initialization of the chuck
PS: MOVING XYZ to AWAITING COMMAND(X:targetX, Y:targetY)
Figure R1-19
Recoverable Alarm Scenario
SEMI E130-1104 © SEMI 2003, 2004 44
R1-1.7 Scenario VII – Inspect and Clean Probes — The host issues an INSPECT-PROBES command during
substrate processing. The probe inspection fails so the host issues the CLEAN-PROBES command. The prober is
configured to automatically inspect the probes after the probe cleaning operation. The host resumes processing after
the successful clean/inspection:
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Host Prober
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ()
PS: MOVING XYZ to AWAITING COMMAND(X:targetX, Y:targetY)
Move Chuck to Designated Coordinates()
Host attributes repeat unit defect to probes()
Tester
Start()
Device Test Complete(Result:Fail)
INSPECT-PROBES()
PS: AWAITING COMMAND to SERVICE TASK(TaskId:INSPECT-PROBES)
Perform Inspection()
PS: SERVICE TASK to AWAITING COMMAND(X:targetX, Y:targetY, Fail)
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
CLEAN-PROBES()
PS: AWAITING COMMAND to SERVICE TASK(TaskId:CLEAN-PROBES)
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
CLEAN-PROBES()
Since the INSPECT-PROBES service task failed,
the host issues the CLEAN-PROBES command
If the prober automatically performs a probe inspection
after performing a probe cleaning, the Process State
model transition #14 would signify the transition from
the CLEAN-PROBES service task to the INSPECT-PROBES
service task
PS: SERVICE TASK to SERVICE TASK(Task Id: INSPECT-PROBES)
PS: SERVICE TASK to AWAITING COMMAND(X:targetX, Y:targetY, Task Result: Passed)
SERVICE TASK
14
SERVICE TASK
Task Id:
CLEAN-PROBES
Task Id:
INSPECT-PROBES
Figure R1-20
Probe Inspection and Cleaning Scenario
SEMI E130-1104 © SEMI 2003, 2004 45
R1-1.7.2 Cleaning Probes – Detail — This scenario assumes the recipe is setup for cleaning probes using a cleaning
substrate. The cleaning substrate is stored in an internal storage site. The substrates currently loaded on the chuck
and pre-align stage(s) are returned to the source carrier so that the cleaning substrate can be loaded on the chuck.
When the cleaning substrate is removed from the chuck, the substrate(s) that occupied the chuck/pre-align stage(s)
are restored.
R1-1.7.2.1 Points of Interest
R1-1.7.2.1.1 The service task involves moving substrates between substrate locations. This is not reflected in the
Process State model. The host is not involved in the service task. Therefore, there is no need for the Process State
model to transition to the HANDLING MATERIAL state.
R1-1.7.2.2 Pre-Conditions
R1-1.7.2.2.1 Job Setup — See Section R1-1.1.2.1
R1-1.7.2.2.2 Job Start — See Section R1-1.1.2.2.
R1-1.7.2.2.3 State Models
Table R1-3 Object States for Probe Cleaning Scenario
Object Reference Description States Occupied
PS Process State model AWAITING COMMAND
CJ1 Control Job 1 EXECUTING
PJ01 Process Job 1 PROCESSING
PJ02 Process Job 2 POOLED
SubstPJ01.01 PJ1 Substrate 1 AT WORK; IN PROCESS
SubstPJ01.02 PJ1 Substrate 2 AT WORK; NEEDS PROCESSING
SubstPJ01.03 PJ1 Substrate 3 AT SOURCE; NEEDS PROCESSING
SubstPJ02.01 PJ2 Substrate 1 AT SOURCE; NEEDS PROCESSING
SubstPJ02.02 PJ2 Substrate 2 AT SOURCE; NEEDS PROCESSING
SubstPJ02.03 PJ2 Substrate 3 AT SOURCE; NEEDS PROCESSING