semi合集-English.pdf - 第3336页

SEMI E130-1104 © SEMI 2003, 2004 50 R1-1.11.2. 3 Physical View Pre-Align Chuck CarrierA PJ02 PJ01 SubstPJ01.01 SubstPJ01.02 AUX Tray SubstAUX Figure R1-25 Correlation Scenario - Physical View R1-1.11.2. 4 State Models Ta…

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R1-1.10 Scenario X – Pre-align Fails on Subsequent Substrate. User Fails to Clear the Condition Prior to the Host
Issuing the Next LOAD-SUBSTRATE Command — The prober fails to pre-align a substrate while the host is
processing a substrate on the main chuck. The user manually aligns the substrate but fails to complete the manual
alignment prior to the host issuing the LOAD-SUBSTRATE command. The Process State model transitions to the
PROCESSING BLOCKED state until the user clears the alarm. When the alarm is cleared, the Process State model
transitions to the HANDLING MATERIAL state and processing resumes as normal.
Host Prober User
Load Substrate
Move substrate to Pre-align
Pre-align
Load Substrate on Chuck
Align and Profile
Move Next Substrate to Pre-align
PS: AWAITING LOAD to HANDLING MATERIAL
PS: HANDLING MATERIAL to AWAITING COMMAND
Pre-align Failure
Alarm Notification (Pre-align Failed)
Load Substrate
Process Substrate
Manually align Substrate
Start
PS: HANDLING MATERIAL to PROCESSING BLOCKED(Pre-align Failed)
Proceed as normal
PS: PROCESSING BLOCKED to HANDLING MATERIAL()
Alarm Cleared(Pre-align Failed)
Figure R1-24
Pre-Align Failure 3 – User Failed to clear Alarm
R1-1.11 Scenario XI – Correlation Substrate Testing
R1-1.11.1 Overview — This scenario describes the use of a correlation substrate. The correlation substrate is
loaded on the chuck to verify the test results for the current setup. From the Process/Control Job perspective,
correlation substrate testing is a normal task available to the host. Therefore, there are no job related collection
events associated with correlation testing.
R1-1.11.1.1 The correlation substrate is not part of a Process Job. The correlation substrate must be run using the
same recipe as the currently loaded process job.
R1-1.11.2 Pre-Conditions
R1-1.11.2.1 Job Setup — See Section R1-1.1.2.1
R1-1.11.2.2 Job Start — See Section R1-1.1.2.2.
SEMI E130-1104 © SEMI 2003, 2004 50
R1-1.11.2.3 Physical View
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.01
SubstPJ01.02
AUX Tray
SubstAUX
Figure R1-25
Correlation Scenario - Physical View
R1-1.11.2.4 State Models
Table R1-4 Correlation Scenario Object States
Object Reference Description States Occupied
PS Process State model AWAITING COMMAND
CJ1 Control Job 1 EXECUTING
PJ01 Process Job 1 PROCESSING
PJ02 Process Job 2 POOLED
SubstPJ01.01 PJ1 Substrate 1 AT WORK; IN PROCESS
SubstPJ01.02 PJ1 Substrate 2 AT WORK; NEEDS PROCESSING
SubstPJ01.03 PJ1 Substrate 3 AT SOURCE; NEEDS PROCESSING
SubstPJ02.01 PJ2 Substrate 1 AT SOURCE; NEEDS PROCESSING
SubstPJ02.02 PJ2 Substrate 2 AT SOURCE; NEEDS PROCESSING
SubstPJ02.03 PJ2 Substrate 3 AT SOURCE; NEEDS PROCESSING
SubstAUX Correlation Substrate AT SOURCE; NEEDS PROCESSING
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R1-1.11.2.5 Process Correlation Substrate — The substrates in the pipeline are returned to the source FOUP.
Substrate SubstPJ01.01 is suspended and remains in the IN PROCESS state.
Host Prober
LOAD-TEST-SUBST(SubstLoc: AUX Tray)
PS: AWAITING COMMAND to HANDLING MATERIAL()
CarrierA.02: UNOCCUPIED to OCCUPIED
SubstPJ01.02: AT WORK to AT SOURCE
Pre-align: OCCUPIED to UNOCCUPIED
CarrierA.01: UNOCCUPIED to OCCUPIED
SubstPJ01.01: AT WORK to AT SOURCE
Chuck: OCCUPIED to UNOCCUPIED
AUX Tray: OCCUPIED to UNOCCUPIED
Pre-align: UNOCCUPIED to OCCUPIED
Pre-align
SubstAUX: AT SOURCE to AT WORK()
Load Substrate on Chuck
Align and Profile
Unload SubstPJ01.02 from Pre-align()
Chuck: UNOCCUPIED to OCCUPIED
SubstAUX: AT WORK to AT WORK()
SubstAUX: NEEDS PROCESSING to IN PROCESS()
Pre-align: OCCUPIED to UNOCCUPIED
Process Correlation Substrate
PS: HANDLING MATERIAL to AWAITING COMMAND
1
2
3
5
6
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Subst PJ01. 02
1
2
3
56
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Subst PJ01. 01
Unload SubstPJ01.01 from the Chuck()
Load SubstAUX on Pre-align()
Figure R1-26
Correlation Substrate Processing Scenario