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SEMI E132-0305 © SEMI 2004, 2005 1 SEMI E132-0305 SPECIFICATION FOR EQ UIPMENT CLI ENT AUTHENTICATION AND AUTHORIZATION This specification was technically approved by the Globa l Information & Control Committee and i…

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SEMI E130.1-1104 © SEMI 2004 6
Table 4 Variable Item Mapping Table
Variable Name Description Class SECS-II Type
ContactCount The number of times the probe card has come in
contact with a substrate.
SV U2
DieXCoordinate The coordinate of the die in the x direction (column). SV I2
DieYCoordinate The coordinate of the die in the y direction (row). SV I2
DieZPosition The position of the Chuck Z-axis in microns. A
user/supplier defined unit of measure other than
microns is permissible and must be documented.
SV F4
DieZCoordinate The coordinate of the die in the z direction. SV I2
InspectionResult Result of the last inspection. SV BOOLEAN
MinXStep The minimum step size in microns in the X direction. SV F4
MinYStep The minimum step size in microns in the Y direction. SV F4
MinZStep The minimum step size in microns in the Z direction
(Alternative user-defined unit of measure may be
specified for the Z motion).
SV F4
ProbeCardId The ID of the Probe Card. SV A [25]
TaskID The ID of the service task being performed. SV A [50]
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E132-0305 © SEMI 2004, 2005 1
SEMI E132-0305
SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND
AUTHORIZATION
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on July 11, 2004 and August 16, 2004. Initially available at
www.semi.org September 2004; to be published November 2004. Originally published March 2004;
previously published July 2004.
NOTICE: The designation of SEMI E132 was updated during the 0305 publishing cycle to reflect the creation of
SEMI E132.1.
1 Purpose
1.1 This specification describes a method for restricting access to communication with equipment by requiring
clients to authenticate to the equipment before proceeding with subsequent communication, and provides a flexible
authorization scheme to control client application access. Authorization allows parties who want to exchange
information with or control the equipment to do so on a need-to-know and/or need-to-use basis.
1.2 The authorization scheme specified in this standard allows equipment vendor the flexibility to provide access
control at any level of granularity, ranging from no access control restrictions, predefined role-based access control,
to very fine-grained control.
2 Scope
2.1 This is a standard that applies to all semiconductor manufacturing equipment that requires authentication and
authorization for its services. It does not apply to communication that is governed by the SEMI E30 communication
and control state models.
2.2 This standard does not require data transmitted over an established session to be encrypted, encryption is only
required as specified by the authentication protocol. It is assumed that the interface specified by this standard will
be operating in an environment where there are no malicious attacks such as inside a closed factory network.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 An adjunct standard will need to be defined that maps specific technologies and protocols to the defined
concepts in this document.
4 Referenced Standards
4.1 SEMI Standards
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
4.2 Other Standards
Uniform Resource Identifiers (URI): Generic Syntax, IETF RFC 2396, August 1998
(http://www.ietf.org/rfc/rfc2396.txt
)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Referenced Documents
5.1 Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67,
http://www.omg.org/technology/documents/
modeling_spec_catalog.htm
SEMI E132-0305 © SEMI 2004, 2005 2
6 Terminology
6.1 Definitions
6.1.1 administration — the process of configuring equipment client identities, associated credentials, and setting
authorizations.
6.1.2 Asymmetric Key Cryptography — see Public Key Cryptography.
6.1.3 authenticated communications — communications with equipment compliant to this specification to establish
an authenticated session, to grant authorizations and for administration. This includes any communications over the
authenticated session. Note that authenticated communications are not necessarily encrypted.
6.1.4 authenticated session — also referred to as session in this document, this is an application-level concept
defined by this specification and is independent of any physical or logical connection or communication protocol
“session” layer used in the actual exchange of messages. An authenticated session or session follows the session
establishment procedure, state models, and the defined services as described in this specification.
6.1.5 authentication — the process of determining whether a user or process is, in fact, who or what it is declared to
be. In private and public computer networks, authentication is often achieved through the use of passwords.
Knowledge of the password is assumed to guarantee that the user is authentic. This standard refers only to the
authentication of application processes, and does not support or address authentication of human users.
6.1.6 authorization — the process of granting the privilege to perform a specific action to a user or process. Note
that the user or process must be authenticated before authorization may take place.
6.1.7 client — an application process that communicates with the equipment to access equipment resources. This
specification uses the terms “client” and “client application” interchangeably.
6.1.8 communication session — a series of two-way message exchanges between a client and the equipment. A
session typically begins and ends at the request of the client.
6.1.9 cryptographic algorithm — a transformation of meaningful data into some meaningless data, a process called
encryption. If the transformation is reversible, then the reverse process is called decryption. Typically it is
computationally difficult to correctly decrypt the data without knowing both the algorithm used and some additional
information, referred to as keys.
6.1.10 encryption — see cryptographic algorithm.
6.1.11 message digest — see one-way hash.
6.1.12 one-way hash — a one-way transformation of an arbitrary length of data into a fixed-length code. The
transformation is computationally difficult to reverse, and unlikely to have collisions. The same message will
always result in the same hash, and any slight modification to the original message will result in a different hash,
thus providing message integrity. The terms One-way Hash, Hash and Digest are used interchangeably in this
document.
6.1.13
Persistent Session — an Authenticated Session established that survives equipment shutdowns or power offs,
it is set to persistent by a client through an equipment service defined in this specification. Behavior of a persistent
session during equipment shutdown and startup is as defined by the session state model described in this document.
6.1.14 Public Key Cryptography (PKC) — also known as Asymmetric Key Cryptography, a cryptographic
algorithm that employs two keys for encryption and decryption of data. One key is designated as the public key and
can be freely advertised, while the other key, designated as the private key, is never revealed. Data encrypted with
one key can only be decrypted with the other key. PKC is widely used for key exchange and message signing.
6.1.15 Secret Key Cryptography (SKC) — also known as Symmetric Key Cryptography, a cryptographic algorithm
that employs one single key for both encryption and decryption. SKC is widely used for bulk encryption of data due
to its speed over PKC.
6.1.16 Session — in this document, the term “session” refers to an Authenticated Session unless specified otherwise.
It has no relation to the sessions that may be defined elsewhere.
6.1.17 Symmetric Key Cryptography — see Secret Key Cryptography.