semi合集-English.pdf - 第339页

SEMI E49.6-1103 © SEMI 1995, 2003 5 Table 2 Pressure Hold Test Rep ort Pressure Hold Test Report Customer: Date: Location: Report: Project: Sys tem: Time Started: Time Finished: Start Temperature: Finish Temperature: Sta…

100%1 / 7923
SEMI E49.6-1103 © SEMI 1995, 2003 4
rates at specified pressures and flow schematic
indicating which flow paths were tested; and oxygen or
hydrocarbon levels plotted against time with specified
flow rates at specified pressures and flow schematic
indicating which flow paths were tested.
10 Labeling Protocol
10.1 All lines should be labeled by gas type and flow
direction.
11 Pre-Packaging Protocol
11.1 After testing is completed, the subassembly
should be pressurized with UHP grade Argon or N
2
.
Each process line should be sealed with a closed valve
and metal fitting cap or plug; all nonprocess lines
should be sealed with a plastic cap or plug before being
shipped.
11.2 Lines separate from gas system should be shipped
double bagged from the cleanroom. Bags should be
cleanroom compatible, and purged with inert gas, then
sealed from atmosphere.
12 Documentation Protocol
12.1 Documentation logs should be kept for all shop
activities. Example log sheets are shown as Tables 1–5
below.
Table 1 Stainless Steel Component Inspection Log
Stainless Steel Component Inspection Log
Customer: Date:
Location: Page __ of __
Project: Cert: Yes/No
Date Received: Lot No.: Heat No.:
Description Wall Thickness Diameter Visual Surface Finish RA QA
Min. Max. Min. Max.
SEMI E49.6-1103 © SEMI 1995, 2003 5
Table 2 Pressure Hold Test Report
Pressure Hold Test Report
Customer: Date:
Location: Report:
Project:
System:
Time Started: Time Finished:
Start Temperature: Finish Temperature:
Start Pressure: Finish Pressure:
Elapsed Time: Finish Pressure Corrected:
Pressure Difference Corrected:
Elapsed Time:
Gas (or Mixture) Used for Test:
Pressure Gauge Range:
Comments:
Tested by: Date:
QA Representative: Date:
Table 3 Particle Count Test Report
Particle Count Test Report
Customer: Date:
Location: Report:
Counter Instrument/Model Serial Number
LPC
CNC
Date Time System Particle Counts > 0 µ m Flow Rate/Pressure
Comments:
Tested by:
QA Representative:
SEMI E49.6-1103 © SEMI 1995, 2003 6
Table 4 Trace Moisture and Oxygen Test Report
Trace Moisture and Oxygen Test Report
Customer: Date:
Location: Report:
Type Instrument/Model Serial Number
Trace O
2
Trace H
2
O
Date Time System Inboard Leak Rate Comments
Comments:
Tested by:
QA Representative:
Table 5 Helium Leak Test Report
Helium Leak Test Report
Customer: Date:
Location: Report:
Project:
Type Instrument/Model Serial Number
He MSLD
Date Time System Inboard Leak
Rate
Outboard Leak
Rate
Comments
Comments:
Tested by:
QA Representative: