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SEMI E49.6-1103 © SEMI 1995, 2003 6 Table 4 Trace Moisture and Oxygen Test Report Trace Moisture and Oxygen Test Report Customer: Date: Location: Report: Type Instrument/Model Serial Number Trace O 2 Trace H 2 O Date Tim…

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SEMI E49.6-1103 © SEMI 1995, 2003 5
Table 2 Pressure Hold Test Report
Pressure Hold Test Report
Customer: Date:
Location: Report:
Project:
System:
Time Started: Time Finished:
Start Temperature: Finish Temperature:
Start Pressure: Finish Pressure:
Elapsed Time: Finish Pressure Corrected:
Pressure Difference Corrected:
Elapsed Time:
Gas (or Mixture) Used for Test:
Pressure Gauge Range:
Comments:
Tested by: Date:
QA Representative: Date:
Table 3 Particle Count Test Report
Particle Count Test Report
Customer: Date:
Location: Report:
Counter Instrument/Model Serial Number
LPC
CNC
Date Time System Particle Counts > 0 µ m Flow Rate/Pressure
Comments:
Tested by:
QA Representative:
SEMI E49.6-1103 © SEMI 1995, 2003 6
Table 4 Trace Moisture and Oxygen Test Report
Trace Moisture and Oxygen Test Report
Customer: Date:
Location: Report:
Type Instrument/Model Serial Number
Trace O
2
Trace H
2
O
Date Time System Inboard Leak Rate Comments
Comments:
Tested by:
QA Representative:
Table 5 Helium Leak Test Report
Helium Leak Test Report
Customer: Date:
Location: Report:
Project:
Type Instrument/Model Serial Number
He MSLD
Date Time System Inboard Leak
Rate
Outboard Leak
Rate
Comments
Comments:
Tested by:
QA Representative:
SEMI E49.6-1103 © SEMI 1995, 2003 7
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