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SEMI E133-0705 © SEMI 2004, 2005 15 9.2.3.4 Additio nal Requirements of an AnalysisEngineDataSet 9.2.3.4. 1 If multiple AnalysisEngineDataSet instances are “related ”, as defined in ¶9.2.3.2.1 and both contain the same D…

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SEMI E133-0705 © SEMI 2004, 2005 14
9.2.3.3.4 In each DataCollection all DataItems whose role is “Context” shall occur before the first DataItem whose
role is “Data” occurs.
Figure 6
Illustration of Ordering of Information in an AnalysisEngineDataSet Instance
(Partial example; “…” is used to indicate possible continuation in the listed format; PCSJobID in this
example is aligned with specifications in SEMI E120.1)
PCSJobID == “[0-9a-fA-F]{8}-[0-9a-fA-F]{4}-[0-9a-fA-F]{4}-[0-9a-fA-F]{4}-[0-9a-fA-F]{12}”
PCSAETargets
APCSAETarget: PCSAETarget
AEType == “R2R”
AEInstance == 1
Instructions
Instruction == “R2RCalculateControlAdvice”
Extension == “execute serially”
Status
AStatusElement: StatusElement
Source == “urn:semi-org:E132”
Code == 0
ADataCollection: DataCollection
BinCategory == “Globals”
Role == “Context”
ADataItem: DataItem
AName: (type == text)
AValue: (type == any)
ADataItem
AName: (type == text)
AValue: (type == any)
BinCategory == “ModuleData”
Role == “Context”
ADataItem: DataItem
AName: (type == text)
AValue: (type == any)
…
Role == “Data”
ADataItem: DataItem
AName: (type == text)
AValue: (type == any)
…
BinCategory == “ProcessData”
Role == “Context”
ADataItem: DataItem
AName: (type == text)
AValue: (type == any)
…
Role == “Data”
ADataItem: DataItem
AName: (type == text)
AValue: (type == any)
…
…
SEMI E133-0705 © SEMI 2004, 2005 15
9.2.3.4 Additional Requirements of an AnalysisEngineDataSet
9.2.3.4.1 If multiple AnalysisEngineDataSet instances are “related”, as defined in ¶9.2.3.2.1 and both contain the
same DataCollection with the same value of BinCategory, and further contain the same DataItem (with the same
“Name”) within that DataCollection, the last DataItem shall be assumed to be correct. The interpretation of ordering
of information as communicated by the underlying protocol is beyond the scope of this document.
9.2.3.4.2 Within an AnalysisEngineDataSet instance or a group of instances that are “related”, as defined in
¶9.2.2.1, a DataItem may exist within multiple DataCollections that has a role of context. If this condition exists,
the following rules shall apply.
9.2.3.4.2.1 Any Context DataItems defined in a DataCollection with BinCategory = “Globals” should be used as
Context DataItems for all other BinCategorys in any related message except as defined in ¶9.2.3.3.2.2 below.
9.2.3.4.2.2 If a DataCollection with a BinCategory other than “Globals” defines a Context DataItem that is also
defined in the Global BinCategory of the current message or a related message, the local BinCategory DataItem
value should be used as context, i.e., the local Context DataItem overrides the Global value inside this
DataCollection.
9.2.3.5 Utilizing multiple application-to-applications to communicate a PCS — A PCS message may be broken into
a number of application-to-application communications or partitions, however it is not required that a PCS AE
support this partitioning capability. Each of these communication partitions must conform to the data model of
Figure 3, with the following modifications:
9.2.3.5.1 PCSAETarget minimum cardinality is zero.
9.2.4 Common Interface Services
9.2.4.1 All PCS Analysis Engines shall support the following common interface services:
A set of services shall exist to support input of data into the engine,
A set of services shall exist to support access to data from the engine,
A set of services shall exist to support logging and exception handling, and
A set of services shall exist to support execution and model update.
9.2.4.2 These services will be defined further in §10. Each class in the interface could be part of an input or an
output message.
9.2.5 Common Behavior
9.2.5.1 All PCS Analysis Engines shall support the following common behavior:
Accept inputs, and
Provide outputs.
9.2.6 Analysis Engine General Capability Description
9.2.6.1 An AE module should accept the following inputs and outputs using the common interface structure
described in Figure 3. Not all inputs and outputs are required depending on the functionality needed by the AE.
9.2.7 Inputs—The following data types and data values are used in AE input messages.
9.2.7.1 No data types or data values are specified for the general AE.
9.2.8 Outputs—The following data types and data values are used in AE output messages.
9.2.8.1 No data types or data values are specified for the general AE.
9.3 Run-to-Run Control Functional Group
9.3.1 This section defines the common capabilities and interface data structures of the R2R Control functional
group.
SEMI E133-0705 © SEMI 2004, 2005 16
9.3.2 Table 9 below describes the specialization for the R2R Control functional group of each inherited general
capability described in Table 5.
9.3.3 Table 10 describes the additional capabilities unique to the R2R Control functional group.
Table 11 R2R Control Functional Group Inherited Capabilities
# Description Req’d Comments
R2R.I.1.
Provide a R2R control capability as defined in §5
The R2R Control Analysis Engine shall be able to accept process
quality data, and utilize this data to generate advice on how to
improve future processing; specifically, a R2R implementation
shall provide a capability for modifying recipe parameters or the
selection of control parameters between runs to improve
processing performance. A “run” can be a batch, lot, or an
individual wafer (specified in the context).
Y Based on definition of R2R control.
R2R.I.2.
Provide the required PCS Analysis Engine Methods
The R2R Control Analysis Engine shall provide the required
interface methods as defined in this standard.
Y Execute, Update.
R2R.I.3.
Provide the required PCS Analysis Engine method
capabilities
The R2R Control Analysis Engine shall provide the required
interface method capabilities as defined in this standard.
Y Log Data, Exception Handling, Get
Topic List, Subscribe to Topic, Get
Topic Data.
R2R.I.4.
Maintain R2R models of selected process control system
environment
The R2R Control Analysis Engine shall maintain explicit or
implicit R2R models of the selected process control environment.
These models shall be utilized to provide the R2R control
capability. These models shall dynamically represent the state of
the system based on information received by the Analysis Engine
relating to the selected process control environment as well as
configuration information.
Y The specific form and behavior of these
models is beyond the scope of this
standard; however they generally model
aspects of the process(es) or tool(s)
being controlled.
R2R.I.5.
Provide a mechanism to uniquely instruct the Analysis Engine
to perform an action
The R2R Control Analysis Engine shall support an input
mechanism whereby the Analysis Engine can be instructed to take
a specific unique action.
Y The mechanism could be a a single key
variable, e.g., model name or a complex
set of context data utilized internally to
perform context matching, etc. The
action could include application of a
specific model and generation of a PCS
result, update of a model, or
communication of model parameters.
R2R.I.6.
Interface with multiple external systems
The R2R Control Analysis Engine shall be capable of accepting
inputs from, or generating outputs to multiple external systems.
Y The definition of these systems will be a
function of the application environment;
these could include process tool or
metrology systems, or user interfaces.
R2R.I.7.
Basic Model Management
The R2R Control Analysis Engine shall provide the capability to
create/add, edit configuration, and delete R2R control models.
Y This capability will be supported through
the Analysis Engine interface.
R2R.I.8.
Interface with other Analysis Engines
The R2R Control Analysis Engine shall be capable of either
accepting outputs from other Analysis Engines as inputs, or
producing outputs that are utilized by other Analysis Engines.
N The R2R Control Analysis Engine is not
required to interface with other Analysis
Engines, however examples of use of
interface capabilities would be utilizing
SPC and/or FD information to determine
model parameter updates or controller
actions.
R2R.I.9.
Advanced Model Management
The R2R Control Analysis Engine shall provide advanced model
management capabilities including but not limited to: secure
access to models, and automatic updating of models based on
process control environment changes.
N