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SEMI E1.9-0701 E2 © SEMI 1994, 2004 15 Symbol Used Figure Number Value Specified Datum Measured from Boundary or Feature Measured to x 3† 1, 10, 12 125 mm (4.92 in.) minimum bilateral datum p lane inside of front cassett…
SEMI E1.9-0701
E2
© SEMI 1994, 2004 14
Table 1 Cassette Dimensions
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
ω
13 0° minimum
2° maximum
horizontal datum plane fork-lift area
r1† 1 151 mm (5.94 in.)
maximum
nominal wafer center line outer edge of wafer pick-up volume
r2† 1, 10 152 + 1 – 0 mm
(5.99 + 0.03 – 0 in.)
y1 in front of nominal
wafer center line
encroachment of cassette side domains on
wafer set-down volume
r3† 1, 10 r2 + 1 mm (0.04 in.)
minimum
y1 in front of nominal
wafer center line
encroachment of cassette side domains on
wafer extraction volume
r4† 1 170 mm (6.69 in.)
minimum
nominal wafer center line encroachment of tools or front-opening box
on end effector exclusion zone between
front and rear cassette side domains
r5 1, 2, 4 170 mm (6.69 in.)
maximum
nominal wafer center line outside of cassette domains
r6 2, 4, 6 157 mm (6.18 in.)
maximum
nominal wafer center line front of cassette top and bottom domains
r7 4, 8, 9 15 mm (0.59 in.)
minimum
nominal wafer center line encroachment of cassette bottom domain on
pod latch-pin hole
r8 4, 8, 12 7.5 ± 1 mm
(0.30 ± 0.04 in.)
vertical line contained in
facial datum plane and
x11 from bilateral datum
plane
sides of fork-lift pin hole
r9 1, 8, 12 2.5 ± 0.5 mm
(0.10 ± 0.02 in.)
horizontal line contained
in facial datum plane and
z19 above horizontal
datum plane
surface of optical cassette sensing hole
r10 4 166 ± 1 mm
(6.54 ± 0.04 in.)
nominal wafer center line cassette bottom outside of x15 and below
z22
r11‡ 2, 10 166 ± 1 mm
(6.54 ± 0.04 in.)
nominal wafer center line outside of top robotic flange
r12 2 152 mm (5.98 in.)
maximum
nominal wafer center line rear of the cassette top domain above the
area between the cassette side domains
r13* 5 2.5 mm (0.10 in.)
minimum
line segment along center
of cassette sensing pad
edge of cassette sensing pad
r14* 5 7.5 mm (0.30 in.)
minimum
intersection of x21 and
y10
edge of info pads A and B
r15 None 1 mm (0.04 in.)
maximum
not applicable all concave features (radius)
r16 None 2 ± 1 mm
(0.08 ± 0.04 in.)
not applicable all required convex features (radius)
r17* 5 10 mm (0.39 in.)
minimum
intersection of x22 and
y9
edge of info pads C and D
r19 None 10 mm (0.4 in.)
minimum (required)
15 mm (0.6 in.)
(recommended for
ergonomic reasons)
not applicable correctable cassette misalignment in any
horizontal direction
x1† 1, 2, 9 50 mm (1.97 in.)
minimum
bilateral datum plane inside of rear cassette side domains and the
part of the cassette top domain above them
x2† 1, 9 75 mm (2.95 in.)
maximum
bilateral datum plane outside of rear cassette side domains
SEMI E1.9-0701
E2
© SEMI 1994, 2004 15
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
x3† 1, 10, 12 125 mm (4.92 in.)
minimum
bilateral datum plane inside of front cassette side domains
x4‡ 1, 10, 12 8 mm (0.31 in.)
minimum
farthest protrusion of
cassette from bilateral
datum plane
encroachment of cassette side domain on
side grip pits
x5 2, 4 76 ± 1 mm
(2.99 ± 0.04 in.)
bilateral datum plane outside of cassette top and bottom domains
above and below rear cassette side domains
x6 2, 4, 9 112.5 mm (4.43 in.)
maximum
bilateral datum plane encroachment of cassette top and bottom
domains on near side of vertical optical
wafer sensing paths
x7‡ 2, 10 12 mm (0.47 in.)
minimum
farthest protrusion of
cassette from bilateral
datum plane
encroachment of cassette top domain on
space underneath robotic handling flanges
x8* 5 12.5 mm (0.49 in.) bilateral datum plane end of line segment along center of center
cassette sensing pad
x9 1, 2, 4, 10,
12
167 mm (6.57 in.)
maximum
bilateral datum plane left and right side of cassette
x10‡ 1, 10, 12 166 ± 1 mm
(6.54 ± 0.04 in.)
bilateral datum plane rim of opening of side grip pits
x11 4, 12 166 mm (6.54 in.) bilateral datum plane origin of radius of fork-lift pin hole
x12 4, 9 125 mm (4.92 in.)
minimum
bilateral datum plane encroachment of cassette bottom domain on
far side of vertical optical wafer sensing
paths
x13* 5 88.5 mm (3.48 in.) bilateral datum plane near end of line segment along center of
front cassette sensing pads
x14* 5 118.5 mm (4.67 in.) bilateral datum plane far end of line segment along center of front
cassette sensing pads
x15 4, 12 132 mm (5.2 in.)
maximum
bilateral datum plane intersection of cassette bottom domain and
conveyor rail
x16 4, 12 140 ± 1 mm
(5.51 ± 0.04 in.)
(required)
140 ± 0.25 mm
(5.512 ± 0.010 in.)
(recommended for
roller conveyors)
bilateral datum plane end of conveyor rail and encroachment of
cassette bottom domain on fork-lift area
x17* 5 17.5 mm (0.69 in.) bilateral datum plane line segment along center of rear cassette
sensing pads
x21* 5 30 mm (1.18 in.) bilateral datum plane origin of radius r14 at center of info pads A
and B
x22* 5 70 mm (2.76 in.) bilateral datum plane origin of radius r17 at center of info pads C
and D
x25‡ 14, 16 30 mm (1.18 in.)
minimum
bilateral datum plane far end of top and bottom cassette
identification tag areas
x27 None ± 1 mm (± 0.04 in.)
flatness over tag area
bilateral datum plane surface of side cassette identification tag
area
y1† 1 3 mm (0.12 in.)
maximum
facial datum plane origin of r2 and r3 on bilateral datum plane
y2‡ 1, 7, 8 10 ± 1 mm
(0.39 ± 0.04 in.)
facial datum plane front wall of side grip pits
y3‡ 1, 7, 8 10 ± 1 mm
(0.39 ± 0.04 in.)
facial datum plane rear wall of side grip pits
SEMI E1.9-0701
E2
© SEMI 1994, 2004 16
Symbol
Used
Figure
Number
Value Specified Datum Measured from Boundary or Feature Measured to
y4 1, 2, 6 85 mm (3.35 in.)
maximum
facial datum plane rear of front cassette side domains and the
part of the cassette top domain above them
y5† 1, 6 120 mm (4.72 in.)
minimum
facial datum plane front of rear cassette side domains
y6 1, 6 152 mm (5.98 in.)
maximum
facial datum plane rear of rear cassette side domains
y7‡ 2, 7 2 ± 0.5 mm
(0.08 ± 0.02 in.)
facial datum plane rear side of top robotic handling flange
supports
y8‡ 2, 7 2 ± 0.5 mm
(0.08 ± 0.02 in.)
facial datum plane front side of top robotic handling flange
supports
y9* 5 92.5 mm (3.64 in.) facial datum plane front end of the line segment along center of
rear carrier sensing pads and origin of
radius r17 at center of info pads C and D
y10* 5 123.5 mm (4.86 in.) facial datum plane rear end of the line segment along center of
rear carrier sensing pads and origin of
radius r14 at center of info pads A and B
y11† 1, 6 85 mm (3.35 in.)
maximum
facial datum plane front of front cassette side domains
y14‡ None 142 mm (5.59 in.)
maximum
facial datum plane front of the cassette top
y15 2, 4, 6 95 mm (3.74 in.)
maximum
facial datum plane encroachment of cassette top and bottom
domains on vertical optical wafer sensing
paths
y16 2, 4, 6, 16 155 ± 1 mm
(6.10 ± 0.04 in.)
facial datum plane rear end of cassette top and bottom domains
y17* 5 27.5 mm (1.08 in.) facial datum plane line segment along center of center cassette
sensing pad
y18 5 40.2 mm (1.58 in.) facial datum plane near end of line segment along center of
front cassette sensing pads
y19* 5 61.1 mm (2.41 in.) facial datum plane far end of line segment along center of front
cassette sensing pads
y20‡ None 158 mm (6.22 in.) facial datum plane maximum protrusion of wafers toward the
front of the cassette
y21 14 136 mm (5.35 in.)
facial datum plane recommended center of label on top
cassette identification tag area
y22 16 145 mm (5.71 in.)
facial datum plane recommended center of label on bottom
cassette identification tag area
y23 4, 6 140 mm (5.51 in.)
maximum
facial datum plane rear of cassette bottom domain outside of x5
y24‡ 16 136 mm (5.35 in.)
maximum
facial datum plane near side of bottom cassette identification
tag area
y25‡ 14 127 mm (5.00 in.)
maximum
facial datum plane near side of top cassette identification tag
area
y26‡ 14 145 mm (5.71 in.)
minimum
facial datum plane far side of top cassette identification tag
area
y27‡ 15 9 mm (0.35 in.)
minimum
facial datum plane front side of side cassette identification tag
area
y28‡ 15 9 mm (0.35 in.)
minimum
facial datum plane rear side of side cassette identification tag
area
y29 13 89 mm (3.50 in.) facial datum plane axis of rotation of fork-lift area
z1 8, 12 0 mm (0 in.) minimum horizontal datum plane bottom of cassette bottom domain