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SEMI E139-0705 © SEMI 2005 2 8.4 RaP Servic es ............................................................................................................... ....................................... 21 8.5 RaPnode Requir…

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SEMI E139-0705 © SEMI 2005 1
SEMI E139-0705
SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT
(RaP)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published March 2005.
Table of Contents
1 Purpose .......................................................................................................................................................................3
2 Scope ..........................................................................................................................................................................3
3 Limitations..................................................................................................................................................................4
4 Referenced Standards .................................................................................................................................................4
4.1 SEMI Standards...................................................................................................................................................4
4.2 ISO Standards......................................................................................................................................................4
4.3 OMG Standards...................................................................................................................................................4
5 Terminology ...............................................................................................................................................................5
5.1 SEMI Compilation of Terms ................................................................................................................................5
5.2 Acronyms.............................................................................................................................................................5
5.3 Definitions ...........................................................................................................................................................5
6 Conventions................................................................................................................................................................6
6.2 Object Modeling ..................................................................................................................................................6
6.2.1 Unified Modeling Language (UML).................................................................................................................6
6.2.2 Class Diagrams ................................................................................................................................................6
6.2.3 Name of a Class................................................................................................................................................6
6.2.4 Abstract and Concrete Classes.........................................................................................................................6
6.2.5 Class Attribute Definition.................................................................................................................................6
6.2.6 Association Documentation..............................................................................................................................7
6.2.7 Association Navigability...................................................................................................................................7
7 Overview of RaP ........................................................................................................................................................8
7.3 RaP Participants..................................................................................................................................................8
7.6 RaP Environment.................................................................................................................................................8
7.7 Execution of Recipes............................................................................................................................................8
7.8 Creation and Editing of Recipes..........................................................................................................................9
7.9 Tracking and Storage of Recipes.........................................................................................................................9
7.10 Communication Overview .................................................................................................................................9
7.11 Key Recipe Concepts .........................................................................................................................................9
7.12 ProcessDefinitionElement .................................................................................................................................9
7.12.2 Recipe Structure............................................................................................................................................11
7.12.3 Parameterization ..........................................................................................................................................13
7.12.4 TransferContainer ........................................................................................................................................15
7.13 Realizing the Purpose......................................................................................................................................15
8 Requirements............................................................................................................................................................15
8.1 Requirements Overview.....................................................................................................................................15
8.2 Recipe Object Model .........................................................................................................................................16
8.3 PDE Class Diagram ..........................................................................................................................................16
8.3.2 PDEheader Class ...........................................................................................................................................17
8.3.3 AntecedentData Class.....................................................................................................................................18
8.3.4 ReferencedPDE Class.....................................................................................................................................19
8.3.5 ExecutionTarget Class....................................................................................................................................19
8.3.6 PDEparameter Class......................................................................................................................................20
8.3.7 PDEbody Class...............................................................................................................................................21
8.3.8 PDEbodyReference Class...............................................................................................................................21
SEMI E139-0705 © SEMI 2005 2
8.4 RaP Services......................................................................................................................................................21
8.5 RaPnode Requirements and Clarifications........................................................................................................33
9 Compliance...............................................................................................................................................................36
10 Related Documents.................................................................................................................................................37
List of Figures
Figure 1 — RaP Subject Matter.....................................................................................................................................3
Figure 2 — RaPnodes....................................................................................................................................................8
Figure 3 — PDE Contents ...........................................................................................................................................10
Figure 4 — PDE With Separate PDEbody ..................................................................................................................11
Figure 5 — Recipe Structure Illustration.....................................................................................................................12
Figure 6 — Parameter Flow Illustration......................................................................................................................14
Figure 7 — PDE Class Diagram..................................................................................................................................16
Figure 8 — RaPnode Class Diagram...........................................................................................................................22
Figure 9 — TransferContainer Illustration ..................................................................................................................32
List of Tables
Table 1 — Attribute Table Format ................................................................................................................................6
Table 2 — Navigable Associations for Class xxx .........................................................................................................7
Table 3 — PDE Class Attributes.................................................................................................................................17
Table 4 — Navigable Associations for PDE ...............................................................................................................17
Table 5 — PDEheader Class Attributes......................................................................................................................17
Table 6 — Navigable Associations for PDEheader....................................................................................................18
Table 7 — AntecedentData Class Attributes...............................................................................................................19
Table 8 — Navigable Associations for AntecedentData .............................................................................................19
Table 9 — ReferencedPDE Class Attributes...............................................................................................................19
Table 10 — ExecutionTarget Class Attributes ............................................................................................................20
Table 11 — PDEparameter Class Attributes ..............................................................................................................20
Table 12 — PDEbody Class Attributes .......................................................................................................................21
Table 13 — PDEbodyReference Class Attributes .......................................................................................................21
Table 14 — RaPnode Class Attributes ........................................................................................................................22
Table 15 — Service Descriptions ................................................................................................................................23
Table 16 — Service Parameter Dictionary..................................................................................................................23
Table 17 — Service Parameters ..................................................................................................................................28
Table 18 — Req/Ind and Rsp/Cnf Codes ...................................................................................................................28
Table 19 — getPDEdirectory() Service Parameters....................................................................................................28
Table 20 — deletePDE() Service Parameters..............................................................................................................29
Table 21 — getPDEheader() Service Parameters .......................................................................................................29
Table 22 — getPDE() Service Parameters ..................................................................................................................29
Table 23 — requestToSendPDE() Service Parameters................................................................................................30
Table 24 — sendPDE() Service Parameters................................................................................................................30
Table 25 —
resolvePDE() Service Parameters............................................................................................................31
Table 26 — verifyPDE() Service Parameters ..............................................................................................................31
Table 27 — RaP Compliance Table ............................................................................................................................37
SEMI E139-0705 © SEMI 2005 3
1 Purpose
1.1 The purpose of this specification is to specify the cooperative interaction between the Factory Information &
Control System (FICS) and the equipment to manage the specifications of equipment processing (for instance,
equipment recipes).
1.2 There are six primary elements that must be supported to achieve this purpose:
On-tool & Off-tool Recipe Management — Support the management of multi-part recipes within the equipment
as well as at the FICS level without the requirement that these management applications be integrated.
Recipe Integrity — Guarantee that the recipes that define process execution on a piece of equipment are the
same as those intended for that use within the FICS.
Process Integrity — Ensure that all configuration values/settings of the tool that can be changed by the user and
which affect the process outcome can be managed by the host within the context of a process job.
Adjustable Parameter Definition — Support the definition of recipe parameters to be used by other SEMI
standards (for example SEMI E40) to adjust the parameter values in a consistent manner across all equipment.
On-tool & Off-tool Recipe Creation & Editing — Define a consistent interaction protocol between the FICS and
the systems(s) that support recipe creation/editing functionality.
Information Accessibility — Make key information about the recipes visible to the FICS.
1.2.1 See §7 for a discussion of how the purpose is achieved. A summary is contained in ¶7.13
2 Scope
2.1 This specification defines concepts, behavior, and services to support automated management of equipment
recipes and related process definition elements within a semiconductor factory. It addresses the mechanisms for
interaction between semiconductor equipment, recipe editors, and the Factory Information and Control System
(FICS).
Station
Controller
Equipment
PDE/Recipe
Management
Factory Information and
Control System (FICS)
PDE/Recipe
Editor
Figure 1
RaP Subject Matter
2.2 Figure 1 illustrates the interactions that are addressed in this specification. The thicker arrows are fully
specified interfaces. The dashed arrows are completely unspecified interfaces that are shown here to aid in
understanding the concepts of recipe management. The thinner arrow represents a partially specified interface
(between equipment and recipe editor) that may be proprietary to the supplier. For this last interface, the messaging