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SEMI E139-0705 © SEMI 2005 3 1 Purpose 1.1 The purpose of this specification is to specify the cooperative in teractio n between the Fact ory Information & Control System (FICS) and the equipment to manage the speci …

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SEMI E139-0705 © SEMI 2005 2
8.4 RaP Services......................................................................................................................................................21
8.5 RaPnode Requirements and Clarifications........................................................................................................33
9 Compliance...............................................................................................................................................................36
10 Related Documents.................................................................................................................................................37
List of Figures
Figure 1 — RaP Subject Matter.....................................................................................................................................3
Figure 2 — RaPnodes....................................................................................................................................................8
Figure 3 — PDE Contents ...........................................................................................................................................10
Figure 4 — PDE With Separate PDEbody ..................................................................................................................11
Figure 5 — Recipe Structure Illustration.....................................................................................................................12
Figure 6 — Parameter Flow Illustration......................................................................................................................14
Figure 7 — PDE Class Diagram..................................................................................................................................16
Figure 8 — RaPnode Class Diagram...........................................................................................................................22
Figure 9 — TransferContainer Illustration ..................................................................................................................32
List of Tables
Table 1 — Attribute Table Format ................................................................................................................................6
Table 2 — Navigable Associations for Class xxx .........................................................................................................7
Table 3 — PDE Class Attributes.................................................................................................................................17
Table 4 — Navigable Associations for PDE ...............................................................................................................17
Table 5 — PDEheader Class Attributes......................................................................................................................17
Table 6 — Navigable Associations for PDEheader....................................................................................................18
Table 7 — AntecedentData Class Attributes...............................................................................................................19
Table 8 — Navigable Associations for AntecedentData .............................................................................................19
Table 9 — ReferencedPDE Class Attributes...............................................................................................................19
Table 10 — ExecutionTarget Class Attributes ............................................................................................................20
Table 11 — PDEparameter Class Attributes ..............................................................................................................20
Table 12 — PDEbody Class Attributes .......................................................................................................................21
Table 13 — PDEbodyReference Class Attributes .......................................................................................................21
Table 14 — RaPnode Class Attributes ........................................................................................................................22
Table 15 — Service Descriptions ................................................................................................................................23
Table 16 — Service Parameter Dictionary..................................................................................................................23
Table 17 — Service Parameters ..................................................................................................................................28
Table 18 — Req/Ind and Rsp/Cnf Codes ...................................................................................................................28
Table 19 — getPDEdirectory() Service Parameters....................................................................................................28
Table 20 — deletePDE() Service Parameters..............................................................................................................29
Table 21 — getPDEheader() Service Parameters .......................................................................................................29
Table 22 — getPDE() Service Parameters ..................................................................................................................29
Table 23 — requestToSendPDE() Service Parameters................................................................................................30
Table 24 — sendPDE() Service Parameters................................................................................................................30
Table 25 —
resolvePDE() Service Parameters............................................................................................................31
Table 26 — verifyPDE() Service Parameters ..............................................................................................................31
Table 27 — RaP Compliance Table ............................................................................................................................37
SEMI E139-0705 © SEMI 2005 3
1 Purpose
1.1 The purpose of this specification is to specify the cooperative interaction between the Factory Information &
Control System (FICS) and the equipment to manage the specifications of equipment processing (for instance,
equipment recipes).
1.2 There are six primary elements that must be supported to achieve this purpose:
On-tool & Off-tool Recipe Management — Support the management of multi-part recipes within the equipment
as well as at the FICS level without the requirement that these management applications be integrated.
Recipe Integrity — Guarantee that the recipes that define process execution on a piece of equipment are the
same as those intended for that use within the FICS.
Process Integrity — Ensure that all configuration values/settings of the tool that can be changed by the user and
which affect the process outcome can be managed by the host within the context of a process job.
Adjustable Parameter Definition — Support the definition of recipe parameters to be used by other SEMI
standards (for example SEMI E40) to adjust the parameter values in a consistent manner across all equipment.
On-tool & Off-tool Recipe Creation & Editing — Define a consistent interaction protocol between the FICS and
the systems(s) that support recipe creation/editing functionality.
Information Accessibility — Make key information about the recipes visible to the FICS.
1.2.1 See §7 for a discussion of how the purpose is achieved. A summary is contained in ¶7.13
2 Scope
2.1 This specification defines concepts, behavior, and services to support automated management of equipment
recipes and related process definition elements within a semiconductor factory. It addresses the mechanisms for
interaction between semiconductor equipment, recipe editors, and the Factory Information and Control System
(FICS).
Station
Controller
Equipment
PDE/Recipe
Management
Factory Information and
Control System (FICS)
PDE/Recipe
Editor
Figure 1
RaP Subject Matter
2.2 Figure 1 illustrates the interactions that are addressed in this specification. The thicker arrows are fully
specified interfaces. The dashed arrows are completely unspecified interfaces that are shown here to aid in
understanding the concepts of recipe management. The thinner arrow represents a partially specified interface
(between equipment and recipe editor) that may be proprietary to the supplier. For this last interface, the messaging
SEMI E139-0705 © SEMI 2005 4
details are not specified, but the required function of the interface is defined. This will be further explained later in
the document.
2.3 In summary, these are the interfaces that are specified in this document:
FICS Equipment – full messaging services
FICS PDE/Recipe Editor – full messaging services
Equipment PDE/Recipe Editor – functional requirements only
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 The following items are out of scope and are not specified in this document:
The content or format of the PDEbody.
The message format and communication details of message services.
How PDEs are used or executed within the equipment.
How the FICS initiates execution of PDEs within the equipment.
How and when the parameter values are communicated to the equipment.
How data is collected to document what PDEs and parameter values were used in a specific situation.
The interactions between a human user and the PDE/Recipe Editor.
Design of FICS applications (for example, Station Controller and PDE/Recipe Manager as shown in Figure 1).
These applications are shown to enhance the clarity of the content of this specification.
4 Referenced Standards and Documents
4.1 SEMI Standards
1
SEMI E5 — SEMI Equipment Communication Standard 2 (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E40 — Standard for Process Job Management (PJM)
SEMI E120 — Common Equipment Module (CEM)
4.2 ISO Standards
2
uuid: ISO/IEC 11578:1996 Information technology - Open Systems Interconnection – Remote Procedure Call
(RPC), http://www.iso.ch/cate/d2229.htm.
4.3 OMG Standards
3
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67, available from
http://www.omg.org/technology/documents/modeling_spec_catalog.htm.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
1 Semiconductor Equipment and Materials International (SEMI), 3081 Zanker Road, San Jose, CA 95134, 408.943.6900, FAX 408.428.9600
2 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: /www.iso.ch
3 Object Management Group, Inc., 250 First Ave. Suite 100, Needham Mass. 02494, Telephone: 781.444.0404; Fax: 781.444.0320, Website:
www.omg.org