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SEMI E139.1-0705 © SEMI 2005 1 SEMI E139.1-0705 XML SCHEMA FOR THE RaP PDE This standard was techni cally approved by the global Information & Control Committee. This edition was approved for publication by the globa…

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SEMI E139-0705 © SEMI 2005 48
supplierInfo — Again, good information for an extended display.
R2-10.2 In general, a display of the name, groupName, type and createDate should be adequate to support a recipe
selection in most cases. An extended display should be available when more help is needed.
R2-11 Optimizing getPDEdirectory() Service
R2-11.1 A poor implementation of the getPDEdirectory() service may be inefficient. It is clear that some
getPDEdirectory() requests may require the RaPnode to return information from the header of all the recipes stored
at this node. Reading bits of information from hundreds of potentially large files can be time consuming. It is
suggested that steps be taken to optimize this implementation. For instance, if key parts of the header from each
PDE on the RaPnode are stored separately (for example, in a database), then retrieval of this information can be
very fast. However, this cataloging of all recipes requires careful management of the PDEs and some overhead to
maintain. The software designer should consider all these factors when implementing this service.
R2-12 PDEeditor Identification
R2-12.1 Not all PDEeditors are EditorNodes. There may be standalone editors that create PDEs that are moved to
the equipment (or to the Recipe Management System) by other means – email, floppy disk, or other transport
mediums. Some recipes may originate from the supplier. It is important that all PDEeditors embed meaningful
nodeID’s that identify the source clearly to the eventual user of the recipe. It is recommended that all nodeID’s
contain URN strings as defined in Internet standards.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E139.1-0705 © SEMI 2005 1
SEMI E139.1-0705
XML SCHEMA FOR THE RaP PDE
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005.
Table of Contents
1 Purpose .......................................................................................................................................................................2
2 Scope ..........................................................................................................................................................................2
3 Limitations..................................................................................................................................................................2
4 Referenced Standards and Documents .......................................................................................................................2
5 Terminology ...............................................................................................................................................................2
6 Conventions................................................................................................................................................................3
7 PDE Schema Definition..............................................................................................................................................6
8 Manifest Schema Definition.....................................................................................................................................13
9 Related Documents...................................................................................................................................................14
List of Figures
Figure 1 XML Example Diagram..................................................................................................................................5
Figure 2 XML for Sample .............................................................................................................................................6
Figure 3 PDE .................................................................................................................................................................7
Figure 4 PDEheader.......................................................................................................................................................8
Figure 5 ExecutionTarget ..............................................................................................................................................9
Figure 6 ReferencedPDE...............................................................................................................................................9
Figure 7 AntecedentData .............................................................................................................................................10
Figure 8 PDEparameter ...............................................................................................................................................11
Figure 9 PDEbody .......................................................................................................................................................11
Figure 10 PDEbodyReference .....................................................................................................................................11
Figure 11 Manifest.......................................................................................................................................................14
List of Tables
Table 1 Example Translation Table...............................................................................................................................3
Table 2 Altova XMLSPY® Schema Diagram Symbols................................................................................................4
Table 3 Translation Table For PDE Class .....................................................................................................................7
Table 4 Translation Table For PDEheader Class...........................................................................................................7
Table 5 Translation Table For ExecutionTarget............................................................................................................9
Table 6 Translation Table For ReferencedPDE.............................................................................................................9
Table 7 Translation Table For AntecedentData...........................................................................................................10
Table 8 Translation Table For PDEparameter.............................................................................................................10
Table 9 Translation Table For PDEbody.....................................................................................................................11
Table 10 Translation Table For PDEbodyReference...................................................................................................11
Table 11 simpleTypes In The PDE Schema ................................................................................................................12
Table 12 complexTypes In The PDE Schema .............................................................................................................12
Table 13 Translation Table For Manifest Class...........................................................................................................13
Table 14 simpleTypes In The PDE Schema ................................................................................................................14
SEMI E139.1-0705 © SEMI 2005 2
1 Purpose
1.1 The purpose of this document is to define an XML-based format for transferring recipe components. This
includes an XML schema that corresponds to the UML model for the RaP Process Definition Element (PDE) as
defined by SEMI E139. In addition, an XML schema is defined for the Manifest that must be included in the
TransferContainer with the PDE’s during transfer.
2 Scope
2.1 The scope of this document is the faithful representation of the PDE and Manifest definition from SEMI E139
in an XML schema. It will not add new domain information or concepts to the model. The only additions made are
those needed to render a useful XML schema.
3 Limitations
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
4.2 OMG Standards
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67,
(
http://www.omg.org/technology/documents/modeling_spec_catalog.htm
).
4.3 W3C Standards
Canonical XML Version 1.0 — W3C, 15 March 2001 (http://www.w3.org/TR/xml-c14n).
Extensible Markup Language (XML) 1.0 (Second Edition) — W3C, 6 October 2000
(http://www.w3.org/TR/2000/REC-xml-20001006/).
Namespaces in XML — W3C, 14 January 1999 (http://www.w3.org/TR/1999/REC-xml-names-19990114/).
XML Schema Part 0: Primer — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-0/).
XML Schema Part 1: Structures — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-1/).
XML Schema Part 2: Datatypes — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-2/).
XML Path Language (Xpath) — W3C, 16 November 1999 (http://www.w3.org/TR/xpath/).
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 UML — Unified Modeling Language
5.1.2 W3C — World Wide Web Consortium
5.1.3 XML — eXtensible Markup Language
5.2 Definitions And Acronyms
5.2.1 UML (Unified Modeling Language) — A notation for representing object-oriented designs and views created
by Booch, Rumbaugh, and Jacobson in order to merge their three popular notations plus aspects of other existing
notations into a single object-oriented notation intended to be usable by all.
5.2.2 XML (eXtensible Markup Language) — A markup language used for representing data rich with context and
content in documents and in communications. XML is an extension of SGML, a document-oriented markup
language. It was created by W3C for use on the Internet. XML can represent object-oriented structures.