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SEMI E142-0705 © SEMI 2005 7 Attribute Name Definition Access Reqd Form GoodDevices The total num ber of “good” devices on the substrate. The definition of “good” is beyond the scope of this document. RO N Positive Integ…

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Table 4 XYDimensions Type
Attribute Name Definition Access Reqd Form
X The physical offset from the origin along the X axis,
according to the values of SubstrateMap coordinate
attributes; SubstrateSide, Orientation, OriginLocation, and
AxisDirection.
RO Y Floating point value
Y The physical offset from the origin along the Y axis,
according to the values of SubstrateMap coordinate
attributes; SubstrateSide, Orientation, OriginLocation, and
AxisDirection.
RO Y Floating point value
Units The units in which X and Y coordinates are represented.
If omitted then the Layout, DefaultUnits is used.
RO N Text
Table 5 ZDimensions Type
Attribute Name Definition Access Reqd Form
Order The order of the layouts in the Z dimension, according to
the values of SubstrateMap coordinate attributes;
SubstrateSide, and Orientation.
Layouts with higher values for Order are in front of those
with smaller values.
If this is the top level layout, then Order =0
.
If not present, then Order =0.
RO N Integer
Height The height of the device above (or below) the parent
layout, according to the values of SubstrateMap
coordinate attributes; SubstrateSide, and Orientation.
If this is the top level layout, then Height =0
.
If not present, then Height =0.
RO N Floating point value
Units The units in which Height is represented.
If omitted then the Layout.DefaultUnits is used.
RO N Text
11 Substrate
11.1 The Substrate object identifies a substrate to which a SubstrateMap may be assigned. A Substrate object may
have one or more AliasId objects.
Table 6 Substrate Attributes
Attribute Name Definition Access Reqd Form
SubstrateType The type of substrate. A choice of ‘Wafer’, ‘Frame’,
‘Strip” or ‘Tray”.
RO Y Text
SubstrateId The substrate identifier. RO Y Text 1 to 32 characters
LotId Production lot identifier for this data. RO N Text 1 to 32 characters
CarrierType The type of wafer carrier, e.g. ‘Cassette’, ‘FOUP’, etc. RO N Text
CarrierId A character code that may be printed or encoded on the
substrate carrier, which uniquely identifies the substrate
carrier.
RO N Text 1 to 32 characters
SlotNumber This identifies the slot in the carrier in which the substrate
is placed.
RO N Positive Integer
SubstrateNumber Identifies the substrate within a lot. RO N Positive Integer
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Attribute Name Definition Access Reqd Form
GoodDevices The total number of “good” devices on the substrate. The
definition of “good” is beyond the scope of this document.
RO N Positive Integer
SupplierName Name of the supplier of the substrate. RO N Text
CreateDate Date and time when the map data is acquired: formatted a
s
YYYYMMDDhhmmsscc (year-month-date-hour-minute-
second-centisecond).
RO N Text
LastModified Date and time when the map data was last modified:
formatted as YYYYMMDDhhmmsscc (year-month-date-
hour-minute-second-centisecond).
RO N Text
Status Status of map data supplying process or preceding
process.
RO N Text
11.2 AliasId
11.2.1 The AliasId object contains other substrate identifiers that may be used to trace the substrate throughout the
substrate’s life cycle.
Table 7 AliasId Attributes
Attribute Name Definition Access Reqd Form
Type Type of identifier, e.g. “FrontsideId”, “BacksideId”,
“WaferId”, “FrameId” .
RO Y Text
Value Value of the identifier. RO Y Text 1 to 32 characters
12 SubstrateMap
12.1 The SubstrateMap object relates to a single substrate and layout and contains a list of one or more Overlay
objects. It may also include a substrate type specific object depending on the value of [SubstrateType].
12.2 If there are more than one SubstrateMap assigned to a Substrate and Layout combination they should differ in
either their Orientation, OriginLocation or both. For example there may be a map for the top side and one for the
bottom side of a Layout.
Table 8 SubstrateMap Attributes
Attribute Name Definition Access Reqd Form
SubstrateType A reference to the type of substrate to which the map data
applies.
RO Y Text
SubstrateId A reference to the substrate identifier to which the map
data applies.
RO Y Text 1 to 32 characters
LayoutSpecifier A reference to the layout to which the map data applies.
The LayoutSpecifier defines the full path, using / as a
delimiter from the top level layout to the layout to be
specified for example; ”WaferLayout/L1/DeviceLayout”.
RO Y Text
SubstrateSide Coordinate system attribute that defines the side of the
substrate. Restricted to the values;
TopSide*
Bottom Side
* Default value if this item is not present.
RO N Text
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Attribute Name Definition Access Reqd Form
Orientation Coordinate system attribute that defines the orientation of
the substrate in relation to the map data. This variable
will increase in the right (clockwise) direction from 0°. It
is restricted to values from 0°-359°.
* Default value if this item is not present is 0°..
RO N Integer
OriginLocation Coordinate system attribute that defines location of the
coordinate system origin. Restricted to the values (see
Figure A2-1 for an example);
LowerLeft*
UpperLeft
LowerRight
UpperRight
Center
* Default value if this item is not present.
RO N Text
AxisDirection Coordinate system attribute that defines direction in whic
h
the Y and X axis, respectively increase. Restricted to the
values (see Figure A2-1 for an example);
UpRight*
DownRight
UpLeft
DownLeft
* Default value if this item is not present.
RO N Text
13 Overlay
13.1 The Overlay object is an array of data that corresponds to the dimensions on the Layout to which the
containing SubstrateMap is assigned. The specialized objects (e.g. BinCodeMap, DeviceIdMap, TransferMap) are
extensions of the Overlay object which each define a different type of data. See the definitions of the specialized
objects in the sections below. An Overlay object may have one or more ReferenceDevice objects.
Table 9 Overlay Attributes
Attribute Name Definition Access Reqd Form
MapName A name that describes the purpose of the bin codes in the
map. Possible examples include: “CellStatus”,
“DefectCode”, “MarkGrade”, “PackageGrade”,
“SortGrade”, DeviceId”, “Transfer”.
RO Y Text
MapVersion The version is used to distinguish between multiple versions
of maps for the same substrate with the same MapName.
RO N Text
13.2 ReferenceDevice
13.2.1 The ReferenceDevice object defines a reference device on the substrate.
Table 10 ReferenceDevice Attributes
Attribute Name Definition Access Reqd Form
Coordinates X and Y coordinate of the reference device to align device
matrix on physical substrate with the map data.
RO Y LogicalCoordinates
(see Table 3)
Position Offset of the center of a reference device in the X and Y
directions from the center of substrate.
RO N XYDimensions
(see Table 4)