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SEMI PR8-0703 © SEMI 2003 66 NOTICE: SEMI makes no warranties or represen tations as to the suitability o f the standards set forth herein for any particular application . The determinati on of the suitability o f the st…

SEMI PR8-0703 © SEMI 2003 65

RELATED INFORMATION 8

CONTENTS OF FILE “OpSeg.xsd”

NOTICE: This related information is not an official part of SEMI PR8. This related information is not intended to

modify or supersede the official proposed standard. Determination of the suitability of the material is solely the

responsibility of the user.

NOTICE: The code displayed below is available as a file at www.semi.org.

R8-1 OpSeg.xsd

<?xml version="1.0" encoding="utf-8" ?>

<!--

SEMI makes no warranties or representations as to the suitability

of this software for any particular application. The determination

of the suitability of the software is solely the responsibility

of the user.

By publication of this software, SEMI takes no position respecting

the validity of any patent rights or copyrights asserted in connection

with any items contained in this software. Users of this software are

expressly advised that determination of any such patent rights or

copyrights, and the risk of infringement of such rights are entirely

their own responsibility.

-->

<xs:schema id="OpSeg" targetNamespace="urn:semi-org:schema:opseg_v0.0"

elementFormDefault="qualified" xmlns="urn:semi-org:schema:opseg_v0.0"

xmlns:xs="http://www.w3.org/2001/XMLSchema">

<xs:simpleType name="EventTypeEnumerator">

<xs:restriction base="xs:nonNegativeInteger">

<xs:enumeration value="0" />

<xs:enumeration value="1" />

<xs:enumeration value="2" />

<xs:enumeration value="3" />

<xs:enumeration value="4" />

<xs:enumeration value="5" />

<xs:enumeration value="6" />

<xs:enumeration value="7" />

<xs:enumeration value="8" />

<xs:enumeration value="9" />

</xs:restriction>

</xs:simpleType>

<xs:complexType name="OpSegEventType">

<xs:sequence>

<xs:element name="SegmentType" type="xs:string" />

<xs:element name="EventType" type="EventTypeEnumerator" />

<xs:element name="TaskName" type="xs:string" minOccurs="0"

<xs:element name="Purpose" type="xs:string" minOccurs="0" />

<xs:element name="SegInstID" type="xs:string" minOccurs="0"

<xs:element name="ParSegInstID" type="xs:string"

minOccurs="0" />

</xs:sequence>

</xs:complexType>

<xs:element name="OpSegEvent" type="OpSegEventType" />

</xs:schema>

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

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