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SEMI F1-96 © SEMI 19 90, 1996 7 NOTICE: T hese standards do n ot purport to address safety issues, if any, ass o ciated with their use. It is the responsibility of t he user of these standards to establish appropriate sa…

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SEMI F1-96 © SEMI 1990, 1996 6
8.5.2.2 Test each subsystem for internal leakage of
each shutoff valve.
8.5.2.3 Test time should be based on actual times to
record a standard capillary leak placed at the furthest
point in the subsystem from the leak detector.
8.5.3 Internal―Method 2 — As in Method 1, except
use 100% helium as the tracer gas.
8.5.4 Outboard――Method 1
8.5.4.1 Reference Method — ASTM E 493, Method B,
modified such that the subsystem shall be prefilled and
maintained at constant pressure during the test.
NOTE: The pressure may be different for different portions of
the subsystem.
8.5.4.2 Test Time — Monitor the leak rate for 15
seconds.
8.5.5 Outboard――Method 2
8.5.5.1 Reference Method — ASTM E 499, Method A,
direct probing. Examine each joint with a detector
probe.
8.6 Systems
8.6.1 Inboard
8.6.1.1 Reference Method — ASTM E 498, Method A.
8.6.1.2 Test each system for total inboard leakage by
spraying a small stream of tracer gas around each point
of possible leakage.
8.6.1.3 Test time should be based on actual times to
record a standard capillary leak placed at the furthest
point in the system from the leak detector.
8.6.2 Internal
8.6.2.1 Reference Method — ASTM E 498, Method A,
modified as follows:
a. Close the shutoff valve and pressurize the inlet with
tracer gas.
b. Connect the leak detector to the closest point
available to the valve outlet. Keep the evacuated
portion of the subsystem as small as practicable.
8.6.2.2 Test each subsystem for internal leakage of
each shutoff valve.
8.6.2.3 Test time should be based on actual time to
record a standard capillary leak placed at the furthest
point in the subsystem from the leak detector.
8.6.3 Internal―Method 2 — Same as in Method 1,
except use 100% helium as the tracer gas.
8.6.4 Outboard
8.6.4.1 Reference Method — ASTM E 499, Method A,
Direct Probing. Each joint shall be examined with a
detector probe.
9 Certification
When specified in the purchase order or contract, the
manufacturer’s or supplier’s certification shall be
furnished to the purchaser stating that the articles
furnished have been tested in accordance with
applicable paragraphs of this specification and the
requirements have been met. When specified in the
purchase order or contract, a report of the test results
shall be furnished.
10 Related Documents
10.1 ANSI Standard
2
ANSI/ASME B31.3 — Chemical Plant and Petroleum
Refinery Piping
10.2 ASTM Standards
3
ASTM E 425 — Standard Definitions of Terms Relating
to Leak Testing
ASTM E 479 — Standard Guide for Preparation of a
Leak Testing Specification
10.3 Other Document
4
McMaster, Robert C., ed., Nondestructive Testing
Handbook, 2nd ed., Volume One: Leak Testing.
2 American National Standards Institute, 1430 Broadway, New York,
NY 10018
3 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
4 American Society for Nondestructive Testing, 4153 Arlingate
Plaza, Caller Number 28518, Columbus, OH 43228
SEMI F1-96 © SEMI 1990, 19967
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F2-94 © SEMI 1990, 2004 1
SEMI F2-94 (Withdrawn 0703)
SPECIFICATION FOR 316L STAINLESS STEEL TUBING FOR
GENERAL PURPOSE SEMICONDUCTOR MANUFACTURING
APPLICATIONS
NOTICE: This document was balloted and approved
for withdrawal in 2003.
1 Purpose
The purpose of this specification is to identify the
applicable ASTM tubing specification requirements and
to define the special material chemical composition
requirements for 316L stainless steel tubing which is to
be used for general purpose applications in
semiconductor manufacturing facilities.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.