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SEMI F7-92 © SEMI 19 92, 1999 1 SEMI F7-92 (Reapproved 0299) TEST METHOD TO DETERMINE THE TENSILE STRENGTH OF TUBE FITTING CONNECTI ONS MA DE OF FLUOROCARBON M A TERI ALS This tes t method was te chnically re approved by…

SEMI F6-92 © SEMI 1992 4

10.1 SEMI S4, Safety Guideline for the

Segregation/Separation of Gas Cylinders Contained in

Cabinets

10.2 Materials Safety Data Sheets

10.3 NFPA Fire Protection Guide on Hazardous

Materials

11 Cross Connections

There should be no mechanical cross connection of

secondary containment systems with other systems not

designed specifically for the secondary containment of

the particular HPM’s.

12 Monitoring

The annulus should be monitored for leakage of the

primary system in accordance with the following:

12.1 The sensitivity of the detection system should be

sufficient to detect leakage at 1/2 Threshold Limit

Values (TLV’s) at the discharge to treatment of an open

secondary containment system.

12.2 Detection of leakage into the annulus of the

secondary containment system should include alarm

systems.

12.3 Detection methods may include:

12.3.1 Direct detection of the HPM or its reaction

products (open secondary containment system).

12.3.2 Pressure decay method (closed secondary

containment system).

12.3.3 Vacuum decay method (closed secondary

containment system).

13 Leak Management

The secondary containment system should be designed

to control and direct leaking materials. Control of

HPM’s may consist of dilution, absorption,

incineration, scrubbing, venting, or those methods

deemed safe and suitable to the governing authorities

responsible for the facility. The initiation of the

secondary containment alarm system should be

automated. This system should automatically institute

the management of the leaking HPM in the event of a

breach of the primary system.

14 Periodic Testing - After In stallation

14.1 Secondarily contained piping systems must be

inspectable. The method of inspection must be able to

reveal the current strength and leak integrity of the

primary and secondary containment systems.

14.2 The secondary containment must be periodically

leak tested in accordance with the criteria set forth in

Section 9.3 of the above. Structural testing of both the

process piping and the secondary containment should

be conducted to the maximum pressure specified in

Section 9.1 of the above.

14.3 Any secondarily contained piping system failing

the periodic inspection should be repaired or replaced

immediately.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F7-92 © SEMI 1992, 19991

SEMI F7-92 (Reapproved 0299)

TEST METHOD TO DETERMINE THE TENSILE STRENGTH OF TUBE

FITTING CONNECTIONS MADE OF FLUOROCARBON MATERIALS

This test method was technically reapproved by the Facilities Committee and is the direct responsibility of the

North American Facilities Committee. Current edition approved by the North American Regional Standards

Committee in October 1998. Initially available on www.semi.org February 1999; to be published February 1999.

Originally published in 1992.

1. Purpose

1.1 This method provides a uniform procedure to

determine the tensile strength of tube fitting

connections made of fluorocarbon materials.

2. Scope

2.1 This method can be used to characterize tube

fitting connections on the basis of test data developed

under the conditions described herein, but the results

are not intended to imply a performance rating.

2.2 Tube defined in this method has a circular cross

section and is made of fluorocarbon materials.

2.3 All parts of the tube fittings tested by this

method in contact with the internal fluid are made of

fluorocarbon materials.

2.3.1 Parts such as a nuts or grippers are not limited

to being made of a fluorocarbon material.

2.4 Only the seal between the tube and tube fitting

being evaluated is within the scope of this document.

All other, threaded seals are beyond the scope of this

document.

2.5 When using this method for making

comparisons among various tube fittings and/or

manufacturers, the user must be specific in the

selection of the tube and tube fittings to be evaluated.

2.6 The International System of Units (SI) is used as

the standard unit of measure in this document. The

U.S. Customary units are in parentheses for reference

purposes only and have been rounded to the nearest

whole value.

3. Referenced Documents

3.1 ASTM Standards

D3307 PFA



Fluorocarbon Molding and Extrusion

Materials

D3296



Standard Specification for FEP

Fluorocarbon Tube

1 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohoken, PA 19428-2959

4. Summary of Method

4.1 Subject tube fitting connections made of

fluorocarbon materials to extreme tensile forces.

5. Significance and Use

5.1 In the manufacturing of semiconductor products,

many types of hazardous chemicals and solvents are

required. As a result, tubing and various fitting

designs of fluorocarbon materials (which are

chemically resistant to these fluids) are used to

transport those fluids. It is important to control the

testing process when evaluating various fitting

designs, so that accurate comparisons of the tensile

strength can be made.

5.2 It is the intent of this method to provide a

procedure in which the tensile force will be applied to

tube fitting connections made of fluorocarbon

materials. By using this method, accurate

comparisons of various tube fitting designs can be

achieved.

5.3 The results obtained when using this method are

applicable only to conditions that specifically

duplicate the procedures used within this method.

5.4 When using this test method, it is assumed that

the test specimens are truly representative of the

material and manufacturing process specified for that

product. Departure from this assumption could

introduce discrepancies that are greater than those

introduced by departure from the details of the

procedure outlined in this method.

6. Terminology

6.1 characterize  To describe the quality of.

6.2 failure  Tube separation from a tube fitting

connection or tearing of the tube.

6.3 subject  To expose to.

6.4 tensile  Longitudinal, so as to lengthen the test

object.

7. Description of Test Equipment

7.1 A test apparatus capable of securing the test

specimen while accurately providing a uniform rate

of pull to the specimen. The test instrument shall

have the capability of recording the maximum tensile

force applied to the test specimen.

7.2 See Figure 1 for basic tensile test apparatus.

Figure 1

Basic Tensile Test Apparatus

8. Safety Precautions

WARNING: This test method will subject test

specimens to conditions that may exceed the

normal performance rating of the products

under evaluation. Adequate precautions

must be taken to prevent injury to the person

conducting the test.

9. Test Specimens and Conditioning

9.1 Sample Size  A minimum of three specimens

shall be tested.

9.2 Specimen Size  The specimen length shall be

no less than 10 cm (4 in) between the tensile fixture

and the tube end of the fitting connection.

9.3 Specimen Surface  All surfaces of the

specimens shall be free of visible flaws, scratches, or

other imperfections, unless typically found on a

representative sample of the product.

9.4 Specimen Conditioning  All specimens must

be conditioned for a minimum of one hour in an air

environment of 23° ± 2.8°C (73° ± 5°F) prior to

being subjected to tensile forces.

10. Calibration

10.1 Calibrate the tensile test equipment's rate of

pull to 2.5 cm (1 in) per minute, ± 5%.

10.2 Calibrate the tensile force instrument to ± 2%

full scale.

11. Test Procedure

11.1 Assemble a test fitting connection, per

manufacturer's specification, to one end of the tube.

(See 9.2.)

11.2 Install the fitting connection to the tensile

fixture (see Figure 1) in a manner that prevents

distortion of the connection.

11.3 Secure the open end of the tube to the tensile

fixture, leaving a minimum of 10 cm (4 in) of

exposed tube.

11.4 Begin pulling the test specimen at a rate of 2.5

cm (1 in) per minute.

11.5 Continue applying tensile force until the tube

pulls through the fitting connection or until tearing of

the tube occurs.

11.5.1 If the tube releases from the tensile fixture,

the data from that specimen must be disregarded and

an additional specimen tested.

11.6 Record on test data sheet (see Appendix 1 for a

sample) the mode of failure and the maximum tensile

force applied, in Newtons (lbs).

12. Calculations

12.1 Calculate the average "maximum tensile force"

and record.

12.2 Calculate the standard deviation of "maximum

tensile force" and record.

13. Data Accuracy

13.1 Tensile Force  Newtons: ± 2%.

14. Test Data Sheet

The test data sheet shall include the following

information: