semi合集-English.pdf - 第3788页

SEMI F8-0998 © SEMI 1992 , 1998 4 RELATED INFORM A TI ON 1 SA M PLE TEST DATA SHEET NOT E: This re lated informa tion is not a n officia l part of SEMI F 8 and is not intende d to modif y or superc ede the off ical test …

100%1 / 7923
SEMI F8-0998 © SEMI 1992, 19983
11.7 Begin pulling the test specimen at a rate of 2.5
cm (1 in) per minute.
11.8 Record on test data sheet (see Related
Information 1 for a sample), the minimum tensile force
in Newtons (lbs) when leakage is first observed from
the fitting connection.
11.9 Lower the air pressure to one atmosphere
immediately after observing any leakage.
11.10 Continue pulling until the tube pulls through the
fitting connection or until tearing of the tube occurs.
11.10.1 If the tube releases from the tensile fixture, the
data from that specimen must be disregarded and an
additional specimen tested.
11.11 Record on test data sheet the mode of failure
and the maximum tensile force applied in Newtons
(lbs).
11.11.1 It is possible that the tensile force required to
cause leakage and the maximum tensile force may be
the same. If this situation occurs, indicate the force
reading on both areas of the test data sheet.
12 Calculations
12.1 Calculate the average “force to cause leakage”
and record.
12.2 Calculate the average “maximum tensile force”
and record.
12.3 Using the three actual forces:
12.3.1 Calculate the standard deviation of “force to
cause leakage” and record.
12.3.2 Calculate the standard deviation of “maximum
tensile force” and record.
13 Data Accuracy
13.1 Tensile Force — Newtons: ± 2%
14 Test Data Sheet
The test data sheet shall include the following
information:
14.1 Date tested.
14.2 Operator and test facility.
14.3 Description of items tested, including:
Tubing — manufacturer, O.D., wall thickness, part
number, and material type.
Fitting — manufacturer, type, size, part number, and
material type.
14.4 Force to cause leakage for each specimen.
14.5 Average and standard deviation of the forces to
cause leakage.
14.6 Maximum tensile force for each specimen.
14.7 Average and standard deviation of maximum
tensile forces.
14.8 Mode of failure for each specimen.
NOTE: A sample test data sheet is provided as Related
Information 1.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
SEMI F8-0998 © SEMI 1992, 1998 4
RELATED INFORMATION 1
SAMPLE TEST DATA SHEET
NOTE: This related information is not an official part of SEMI F8 and is not intended to modify or supercede the offical test
method. It has been derived from industry specifications. Publication was authorized by full letter ballot procedure.
Determination of the suitability of the material is solely the responsibility of the user.
Test Date: Operator: Test Facility:
Tube Manufacturer: Fitting Manufacturer:
Tube O.D.: Fitting Type:
Tube Wall Thickness: Fitting Size:
Tube P/N: Fitting P/N:
Tube Material: Fitting Material:
Tensile Force — Newtons
Specimen Force to Cause Leakage Maximum Tensile Force Mode of Failure
1
2
3
Average =
Standard Deviation =
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F9-0998 © SEMI 1992, 19981
SEMI F9-0998
TEST METHOD TO DETERMINE THE LEAKAGE CHARACTERISTICS
OF TUBE FITTING CONNECTIONS MADE OF FLUOROCARBON
MATERIALS, WHEN SUBJECTED TO A SIDE LOAD CONDITION
1 Purpose
1.1 This method provides a uniform procedure to
determine the leakage characteristics of tube fitting
connections made of fluorocarbon materials, when
subjected to side loading.
2 Scope
2.1 This method can be used to characterize tube
fitting connections on the basis of test data developed
under the conditions described herein, but the results
are not intended to imply a performance rating.
2.2 Tube defined in this method has a circular cross
section and is made of fluorocarbon materials.
2.3 All parts of the tube fittings tested by this method
in contact with the internal fluid are made of
fluorocarbon materials.
2.3.1 Parts such as a nut or gripper are not limited to
being made of a fluorocarbon material.
2.4 Only the seal between the tube and tube fitting
being evaluated is within the scope of this document.
All other, threaded seals are beyond the scope of this
document.
2.5 When using this method for making comparisons
between various tube fittings and/or manufacturers, the
user must be specific in the selection of the tube and
tube fittings to be evaluated.
2.6 The International System of Units (SI) is used as
the standard unit of measure in this document. The U.S.
Customary units are in parentheses for reference
purposes only and may have been rounded to the
nearest whole value.
3 Summary of Method
3.1 Subject tube fitting connections made of
fluorocarbon materials to a side load condition that is a
result of bending the tube in a uniform arc, while
maintaining a specified pressure to the internal cavity of
the fitting and tube.
4 Significance and Use
4.1 In the manufacturing of semiconductor products,
many types of hazardous chemicals and solvents are
required. As a result, tubing and various fitting designs
made of fluorocarbon materials (which are chemically
resistant to these fluids) are used to transport those
fluids. It is important to control the testing process
when evaluating various fitting designs, so that accurate
comparisons of the side load capabilities can be made.
4.2 It is the intent of this method to provide a
procedure in which tube fitting connections made of
fluorocarbon materials will be subjected to extreme side
loading. By using this method, accurate comparisons of
various tube fitting designs can be achieved.
4.3 The results obtained when usin g this method are
applicable only to conditions that specifically duplicate
the procedures used within this document.
4.4 When using this test method, it is assumed that the
test specimens are truly representative of the material
and manufacturing process specified for that product.
Departure from this assumption could introduce
discrepancies that are greater than those introduced by
departure from the details of the procedure outlined in
this method.
5 Terminology
5.1 Acronyms
5.1.1 O.D. — Outside diameter
5.1.2 P/N — Part number
5.2 Definitions
5.2.1 bend radius — The distance from the center of
an imaginary circle on which the arc of the bent tube
falls to a point on the arc.
5.2.2 characterize — To describe the quality of.
5.2.3 kinking — A collapse of the tube wall caused by
excessive bending.
5.2.4 “L” — The tube length required to produce a
uniform 180° arc, at a specified tube bend radius.
NOTE: The symbol “L” is unique in that it is used only in this
test method.
5.2.5 “R” — The theoretical value to determine the
tube bend radius, used during testing.
NOTE: The symbol “R” is unique in that it is used only in this
test method.
5.2.6 side load — A result of bending a tube in a
specified arc, consequently subjecting the tube fitting
connection to a radial stress.