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SEMI F13-1101 © SEMI 199 3, 2001 5 10 Labeling 10.1 T he GSCE panel should be labeled for the product. Fu rther labeling as defined i n SEMI F14 should be affixe d to the ou t side of the door of the enclosure. 11 Instru…

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SEMI F13-1101 © SEMI 1993, 2001 4
7.1.3 Excess Pressure Control — Provisions should be
made to protect the distribution piping and process
equipment from excessive pressure. This protection
may include a pressure transducer, pressure switch, or
indicating transmitter connected to close the ASO, a
relief valve piped into the exhaust, or a redundant
pressure regulator with primary regulator failure
indication.
7.1.4 Cylinder Contents — The product remaining in
the cylinder is determined by gas pressure measured by
either a pressure transducer or gauge, or in the case of
material in liquid/vapor phase, by the cylinder weight
measured by a scale.
7.1.5 Delivery Pressure — The pressure delivered by
the regulator is displayed by a pressure indicator. This
can be either a gauge or transducer readout.
7.1.6 Filters — Particles from ambient sources,
entering with the product or generated by the system
elements, can be captured by including one or more
filters at a variety of locations within the system. This
practice tends to protect the components and the
process.
7.1.7 Purge Gas Connection — A purge gas
connection is provided via a branched connection to
admit clean, dry, inert purge gas through an on-off
valve. This is commonly located between the cylinder
connection and high pressure isolation valve in the
panel system. Gas purging is used for installation of a
new system, before disconnecting a spent cylinder, after
connecting a fresh cylinder, and for removal of
equipment for maintenance purposes.
7.1.8 Vent Outlets — The normal purpose of the vent
valves is to discharge process gas, air, and purge gas in
conjunction with purging operations. Under special
circumstances, they are used to reduce pressure in the
equipment and/or transfer product. One or more vents
may be used at various locations, and downstream
venting may be either atmospheric pressure or vacuum
from a venturi or pump. Vacuum venting is strongly
recommended.
7.1.9 High Pressure Indication — A pressure indicator
in common with the high pressure line connected to the
cylinder valve is required to indicate the presence of
residual process gas, or an open or leaking cylinder or
panel valve. It also shows application of adequate purge
gas pressure, and, in cases where vacuum-assisted
purging is employed, an indication of the vacuum level
should be included.
7.1.10 Cylinder Connection Makeup — After a fresh
cylinder has been connected, the integrity of the
cylinder valve connection can be tested with the use of
the pressure indicator mentioned in Section 7.1.9.
7.2 Failure Modes — Any one of a number of
conditions will require emergency action. Some are
more serious than others. In some cases, the
consequence is shutdown of the panel equipment and
venting to a properly controlled discharge system.
These failures should be addressed in the hardware and
operational design phase of the system.
7.2.1 Excessive Delivery Pressure — Due to
equipment malfunction or operator error.
7.2.2 Leaking fitting or component malfunction may
require gas detection monitor.
7.2.3 Excess Flow — This can be the result of operator
error or catastrophic conditions, such as a sheared
delivery line.
7.2.4 Cabinet exhaust failure.
7.2.5 Mechanical failure of panel equipment parts or
downstream equipment.
7.2.6 Destruction to plant through fire, explosion,
earthquake, crash, etc.
7.2.7 Inadvertent mishandling of distribution
equipment.
7.2.8 Process tool problems.
7.2.9 Control system failure.
7.2.10 System Abuse/Misuse — Source gas quality may
affect service life and operability of the system. Poor
gas product quality may cause a reduction in
performance of the system that can lead to premature
hardware component failures.
8 Acceptance Test
8.1 All gas source control equipment should undergo
an acceptance test, agreed to and understood by the
customer and supplier, before it is delivered. This test
should ensure that all control and operational functions
perform as required by the customer’s and/or supplier’s
specifications.
9 Qualification Test
9.1 GSCE should be qualified at its installed location
with an inert gas prior to installing the process gas
cylinder. This test should include the operation of all
control and hardware functions, interface with the
process tool and all interconnected safety devices,
systems, and alarms. This should also include a system
wide leak test of all possible leak points, such as fittings
and welds.
SEMI F13-1101 © SEMI 1993, 20015
10 Labeling
10.1 The GSCE panel should be labeled for the
product. Further labeling as defined in SEMI F14
should be affixed to the outside of the door of the
enclosure.
11 Instructions
11.1 The purchaser’s requirements will dictate the
information provided with the equipment. Minimum
acceptable instructions will vary with the complexity of
the equipment (e.g., manual, automatic, microprocessor
or pneumatically controlled, analog or digital, etc.) In
all cases, the following information should be included:
11.1.1 “WARNING: Read Instructions Before
Proceeding. (Instructions No. xxx for System No. xxx)
Do not proceed without understanding the status of the
equipment as received, or damage may result.”
11.1.2 Installation
11.1.2.1 Certified status of equipment as shipped
should include:
11.1.2.2 Leak integrity,
11.1.2.3 Particle level,
11.1.2.4 Contaminants,
11.1.2.5 Storage requirements,
11.1.2.6 Status indicators,
11.1.2.7 Removal of shipping safeguards,
11.1.2.8 Physical mounting and connection details, and
11.1.2.9 Purging during preparation and start-up.
11.1.3 Start-Up Method
11.1.3.1 Perform purge for initial start,
11.1.3.2 Pre-process (with substitute inert gas),
11.1.3.2.1 Confirm all component functions,
11.1.3.2.2 Confirm all operating levels and setpoints,
and
11.1.3.2.3 Confirm leak integrity.
11.1.4 Process Service — Operational purge
procedures that include the number of purge cycles and
purge pressure and vent dwell times, that take into
account the configuration of the system and the
intended process gas, should be determined before
process gas is installed.
11.1.5 Maintenance — Maintenance purge procedures
and panel repair and replacement procedures should be
defined before process gas is installed.
NOTE 3: Special warnings about the potential for dead space
in components or fittings, etc. (in normal or failed mode)
should be identified to avoid producing a hazardous condition
for any subsequent operation or handling at any location.
SEMI F13-1101 © SEMI 1993, 2001 6
APPENDIX 1
NOTE: The material in this appendix is an official part of SEMI F13 and was approved by full letter ballot
procedures on August 27, 2001.
A1-1 Scope
A1-1.1 Under special circumstances, it may be
necessary to cease using a product and remove it from
the cabinet to a safer and/or less populated
environment. This can be done in a number of ways.
A1-1.2 If the cylinder valve cannot be opened or
closed, the gas supplier must be notified. Prior
arrangements between the supplier and user of
procedures should be in place, so that the required
actions can be readily accomplished.
A1-2 Transfer Out of Cylinder
A1-2.1 Close the low pressure isolation valve,
disconnect at the downstream side of either of the vent
valves and connect to a suitable receiver with means of
pumping if required. This depends upon knowledgeable
operators, and the procedure to be followed must reflect
the features of the particular GSCE and the product to
be transferred. Extreme caution must be observed.
A1-3 Removal of the Cylinder
A1-3.1 A cylinder with a faulty or questionable
cylinder valve may have to be removed. When a
redundant valve and disconnect is installed in the
pigtail, it may be closed, disconnected, and removed
with the cylinder with relative ease and security. When
a redundant valve is not present and a particular design
allows it, the purge inlet valve, vent valve, and the HP
isolation valve may be closed and removed with the
pigtail still connected to the questionable cylinder.
Adequate purging should precede this procedure.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
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