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SEMI F14-93 © SE MI 1993, 1999 3 6.7 Mechanical Sta b ilization 6.7.1 Provis ion for anchoring the en c l o sure to stable architectural elements should be made. 6.7.2 Fas tener s should meet anticipa t e d seismic loads…

SEMI F14-93 © SEMI 1993, 1999 2

equipment.

5.1.5 Gas Separation  Gases that are chemically

incompatible or belong to dissimilar hazard classes

should be separated.

6 Design Considerations

6.1 Regulatory Requirements  T he enclosure should

conform to local, state, and federal regulations.

6.2 Materials

6.2.1 Enclosure top, sides, and doors should be

constructed of 2.7 mm (12 gage) or thicker cold-rolled

sheet steel or other suitable material so as to provide

adequate mechanical stability.

6.2.2 Floors should be constructed of cold-rolled sheet

steel or other suitable material, typically 3.4 mm (10

gage) or thicker, so as to adequately resist deformation

by the heaviest intended cylinder.

6.2.3 Windows and skylights should be 6.5 mm (0.25

in) thick wired safety glass or other suitable material.

6.2.4 All materials should be noncombustible.

6.3 Dimensions  The enclosure should completely

surround the gas cylinders and requisite accessory

equipment. The design should incorporate minimum

internal dimensions while still allowing safe and easy

access to cylinders and equipment.

6.3.1 Heights of shelves for short cylinders should be

adjustable so that cylinder valves and associated

equipment are readily accessible through the limited-

area access port.

6.3.2 Distances above cylinders should be adequate

for installation and operation of associated equipment.

6.4 Enclosure Interior Access

6.4.1 Door  A gasketed door should enable safe and

convenient installation and removal of intended

cylinders, and installation, removal, and maintenance of

associated equipment. The door should be self-closing

and self-latching. The threshold should not interfere

with cylinder installation and removal.

6.4.2 Limited-Area Access Port  The enclosure

should have one or more limited-area ports that enable

access to controls and associated equipment within the

enclosure without compromising the air velocity across

the face of the access port(s). The average air velocity

across the faces of access ports should not be less than

1 m/s (200 fpm); a minimum air velocity of 0.75 m/s

(150 fpm) should exist at any point.

6.4.2.1 Access ports should be self-closing.

6.4.3 Window  One or more windows should be

provided to enable observation of equipment within the

enclosure without compromising enclosure integrity.

6.4.4 Security  Lockable doors and access ports

should be provided when unauthorized access to the

enclosure interior must be precluded.

6.5 Ventilation  The enclosure should enable

removal of leaking gas by local exhaust ventilation.

The advantages of local exhaust ventilation over

general ventilation are more fully described in NFPA

69, NFPA 91, and in Industrial Ventilation.

6.5.1 Exhaust Connection  The enclosure should

enable connection to an exhaust system that will handle

the required exhaust at an average duct velocity that

does not exceed 8.5 m/s (1,700 fpm). The total exhaust

flow includes that across open access ports as well as

that through any supplementary air inlets.

6.5.2 Air Flow Path  In addition to access ports, the

enclosure should include an air inlet located at the

extremity of the enclosure opposite from the exhaust

connection, so that ventilation of the entire enclosure is

provided. The air flow path should adequately

scavenge gas from all regions within the enclosure.

6.5.2.1 Structures (e.g., brackets or shelves) within the

enclosure should not adversely affect exhaust

capability.

6.5.2.2 Gaskets should be provided on all doors,

access ports, and other penetrations.

6.6 Fire Protection

6.6.1 Sprinklers  Provisions for internal sprinklers

should be made when necessary.

6.6.1.1 Sprinklers should be capable of providing

adequate cooling to maintain cylinders and associated

equipment at a temperature that will not actuate relief

devices in the event of an internal or external fire.

6.6.1.2 Sprinkler actuation temperature should be

greater than the anticipated maximum operating

temperature of the enclosure interior under typical

operating conditions, but less than the cylinder pressure

relief device actuation temperature.

6.6.1.3 When the enclosure may be exposed to

corrosive atmospheres, corrosion-resistant sprinklers

should be provided. (For further information, see

NFPA 13, Corrosion-Resistant, Wax-Coated, or

Similar Sprinklers.)

SEMI F14-93 © SEMI 1993, 19993

6.7 Mechanical Stabilization

6.7.1 Provision for anchoring the enclosure to stable

architectural elements should be made.

6.7.2 Fasteners should meet anticipated seismic loads

in seismically active areas.

6.7.3 A means of securing each cylinder within the

enclosure should be provided.

6.8 Surface Finishes

6.8.1 All exterior surfaces and equipment should be

treated or finished to resist attack by weather elements.

6.8.2 Interior surfaces and equipment should be

treated or finished to resist corrosive or solvent effects.

6.8.3 All surfaces should be free of burrs, sharp edges,

and other flaws that could injure users.

6.9 Interior Illumination  Illumination of the

enclosure interior should be adequate for safe operation

of contained equipment. When ambient light is

inadequate, several approaches may be taken to provide

additional lighting:

6.9.1 A skylight may be provided.

6.9.2 With nonflammable gases, internal electric lights

may be provided.

6.9.3 With flammable gases, power cables should not

penetrate the enclosure interior except as provided for

Class I, Division 2 locations (NEC, Article 501). Either

internal explosion-proof lights may be provided, or

external standard lights may project through an

unopenable window.

6.9.4 All interior surfaces should reflect light

efficiently.

6.10 Labels

6.10.1 Gas Labels  A label clearly displaying the

chemical formula and common name of the gas should

be attached to the enclosure exterior surface; its color

should contrast with that of the enclosure.

6.10.2 Hazard Warning Labels  A label clearly

stating requisite hazard warnings should be

mechanically attached to the enclosure exterior surface

in accordance with local building code requirements.

6.10.3 Information Labels  A label providing

important specific information such as, but not limited

to, emergency contacts, telephone numbers, manifold

schematics, and first aid recommendations should be

attached to the enclosure exterior surface.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F15-93 (Reapproved 1104)

TEST METHOD FOR ENCLOSURES USING SULFUR HEXAFLUORIDE

TRACER GAS AND GAS CHROMATOGRAPHY

This Test Method was technically reapproved by the Global Gases Committee and is the direct responsibility

of the North American Gases Committee. Current edition approved by the North American Regional

Standards Committee on July 11, 2004. Initially available on www.semi.org September 2004; to be

published November 2004. Originally published in 1993; last published June 1999.

1 Purpose

1.1 The purpose of this test method is to provide a

standardized method to test the ability of enclosures to

contain gases and vapors and a standardized format to

record and document test results.

2 Scope

2.1 This test method applies to any enclosure that

possesses a local exhaust (secondary ventilation)

system.

2.2 In this test method, the tracer gas of choice is sulfur

hexafluoride (SF

). It is recognized that other gases

have been used as tracers, but for the purposes of this

test method, tracer gas means SF

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This test method is intended to test the containment

ability of a local exhaust system within an enclosure

under the manufacturer’s specified operating

conditions. Thus, test data obtained by means of this

test method apply only to the local exhaust conditions

that existed within the enclosure during the testing.

Extrapolation of the test data to other exhaust operating

conditions is not usually possible.

3.2 Use of this test method requires knowledge of the

principles of gas analysis as well as flow and pressure

measurement, gas chromatographic instrumentation,

and gas sampling techniques.

3.3 An acceptable enclosure, as determined in Section

7.1, does not imply a safe condition for routine

equipment operation with a leak and/or a tubing/fitting

failure. An acceptable enclosure is one that will contain

potential worst case leaks in an emergency, non-routine

situation. The fact that an enclosure is acceptable does

not imply that the enclosure is safe to operate when a

hazardous gas leak has been detected.

4 Referenced Standards

4.1 SEMI Standard

SEMI S2  Environmental, Health, and Safety

Guidelines for Semiconductor Manufacturing

Equipment

4.2 ASTM Standards

ASTM E 260  Practice for Packed Column Gas

Chromatography

ASTM E 697  Practice for Use of Electron Capture

Detectors in Gas Chromatography

4.3 NFPA Standard

NFPA 704  Standard System for the Identification of

the Fire Hazards of Materials for Emergency Response

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Definitions

5.1.1 equivalent release concentration (ERC)  the

theoretical concentration of a process gas that would be

measured outside an enclosure in the event of a process

line failure. The ERC can be expressed as a percentage

of the TLV or PEL of the process gas.

5.1.2 hazardous production material (HPM)  for the

purposes of this test method, a gas or vapor that has a

degree-of-hazard rating in health, flammability, or

reactivity of 3 or 4, as ranked by NFPA 704, that is

used directly in a research, laboratory, or production

process that has as its end product materials which are

not hazardous.

1 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohoken, PA 19428-2959, Phone: (610) 832-9585,

Fax: (610) 832-9555, http://www.astm.org/

2 National Fire Protection Association, 1 Batterymarch Park, Quincy,

MA 02169, Phone: 1 617 770-3000, Fax: 1 617 770-0700,

http://www.nfpa.org/