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SEMI F16-94 © SEMI 1994, 2004 1 SEMI F16-94 (Withdrawn 0304) SPECIFICATION FOR 316L STAINLE SS STEEL TUBING WHICH IS TO BE FINISHED AND ELECTROP OLISHED FOR HIGH PURITY SEMICONDUCTOR MANUFACT URING APPLICATIONS NOTICE: T…

APPENDIX 3

GENERAL EQUATION RELATING PROCESS GAS FLOW RATE TO

TRACER INJECTION RATE

NOTICE: The material in this appendix is an official part of SEMI F15-93 and was approved by full letter ballot procedures.

A3-1

A3-1.1 In this appendix, a general equation relating

process gas flow rate, tracer injection flow rate, and

measured SF

concentration outside an enclosure to the

ERC is provided. In the following, Q and L are given

in volume units per unit time. Concentrations C are

given in units of either vol./vol. or %. Whatever units

are chosen should be used consistently in Equation A3-

A3-1.2

Let the tracer injection rate into a volume be Q

and the ventilation rate in this volume is L. At

equilibrium, the concentration of tracer within this

volume is Q/L = C

source

. If, in the laboratory, one

measures a concentration of tracer gas C

lab

, then the

Dilution Ratio, D, can be calculated as equal to

lab

source

]

tracer

= D

tracer

(A3-1)

For any conserved chemical species, D is constant.

Thus, for a process gas released within the volume, one

can form an analogous ratio

lab

source

]

process

= D

process

(A3-2)

For all conserved chemical species, D is constant, hence

tracer

= D

process

(A3-3)

From this, one can form

lab

source

]

tracer

= C

lab

source

]

process

(A3-4)

so that

lab

source

]

tracer

 C

source

]

process

= C

lab

]

process

(A3-5)

Here C

lab

]

process

is the previously identified ERC.

For releases in the same test volume, this equation can

be written

lab

]

tracer

 (Q/L)]

process

}/ (Q/L)]

tracer

= ERC (A3-6)

Since the ventilation rate is the same

lab

]

tracer

 Q

process

/ Q

tracer

= ERC (A3-7)

A3-1.2.1 This equation allows the calculation of ERC

when simulating a leak within an enclosure using a

different diameter tubing or different flowrate. In the

case where the flowrates (or tubing size and injection

pressure) are the same for the tracer and the process

gas, Equation A3-7 simplifies to that in Section 5.1.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F15-93 © SEMI 1993, 2004 7

SEMI F16-94 © SEMI 1994, 2004 1

SEMI F16-94 (Withdrawn 0304)

SPECIFICATION FOR 316L STAINLESS STEEL TUBING WHICH IS TO

BE FINISHED AND ELECTROPOLISHED FOR HIGH PURITY

SEMICONDUCTOR MANUFACTURING APPLICATIONS

NOTICE: This document was balloted and approved for withdrawal in 2004.

1 Purpose

The purpose of this specification is to identify the

applicable ASTM tubing specification requirements and

to define the special material composition, wall

thickness, ordering, and quality assurance requirements

for 316L stainless steel tubing which is to be finished

into electropolished tubing, component tube stubs, and

fittings made from tubing for use in high purity

semiconductor manufacturing facility applications.

2 Scope

This specification defines the special criteria for

procuring nominal sizes of unfinished 316L stainless

steel tubing which is to be finished into tubing,

component tube stubs, and fittings made from tubing

for use in high purity chemical (gas or liquid)

distribution systems in semiconductor manufacturing

facilities.

3 Referenced Documents

The referenced documents are to be their current

editions as published by their sponsors.

3.1 ASTM Standards

A 262 — Practices for Determining Susceptibility to

Intergranular Attack in Austenitic Stainless Steels

A 269 — Specification for Seamless and Welded

Austenitic Stainless Steel Tubing for General Service

A 270 — Seamless and Welded Austenitic Stainless

Steel Sanitary Tubing

A 450/A 450M — Specification for General

Requirements for Carbon, Ferritic Alloy, and Austenitic

Alloy Steel Tubes

A 632 — Specification for Seamless and Welded

Austenitic Stainless Steel Tubing (Small Diameter) for

General Service

E 112 — Methods for Determining Average Grain Size

1 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohoken, PA 19428-2959

3.2 Military Standards

3.3 MIL-STD-105 — Sampling Procedures and Tables

for Inspection by Attributes

3.4 ANSI/ASME Standards

B31.1 — Power Piping

B31.3 — Chemical Plant and Petroleum Refinery

Piping

Boiler and Pressure Vessel Code — Section III NCA,

The Rules for Construction of Nuclear Power Plant

Components

4 General Requirements

Tubing furnished under this specification shall conform

to the requirements of ASTM A 450 and A 269 for

nominal sizes 1/2 inch diameter and larger and to the

requirements of ASTM A 450 and A 632 for nominal

sizes smaller than 1/2 inch diameter, and to the

additional requirements herein.

5 Ordering Information

5.1 Orders for material under this specification shall

include the following, as required to describe the

material adequately:

• Quantity (meters, feet, or number of lengths)

• Grade per Table 1 of ASTM A 269

• Size (nominal outside diameter and nominal wall

thickness)

• This specification number

• Surface condition (if applicable)

• Special requirements and any supplementary

requirements selected

6 Process

The steel shall be processed in accordance with the

section on Process of ASTM A 269.

2 Naval Publications and Forms Center, 5801 Tabor Avenue,

Philadelphia, PA 19120

3 American National Standards Institute, 1430 Broadway, New York,

NY 10018

SEMI F16-94 © SEMI 1994, 2004 2

7 Manufacture

7.1 Tubing shall be made by the seamless process for

all sizes, except that welded tubing may be acceptable

for nominal sizes 3 inches and above in diameter if the

permissible variations in outside diameter are in

accordance with Table 2 of ASTM A 270 and the other

criteria specified herein are met.

7.2 Tubing must be cold finished.

8 Heat Treatment

8.1 All tubing shall be furnished in the heat treated

condition in accordance with the section on Heat

Treatment in ASTM A 269. If grain size is restricted by

the supplementary requirement specified in Section

17.2 of this specification, the minimum annealing

temperature shall not apply, provided that the tubing

passes the intergranular corrosion test of Section 13 of

this specification.

8.2 All tubing shall be vacuum annealed, or bright

annealed in an undiluted hydrogen atmosphere,

followed by rapid cooling. The adequacy of the cooling

rate shall be confirmed by the intergranular corrosion

test of Section 13 of this specification.

9 Surface Condition

The surface condition of tubing shall be in accordance

with the requirements of the section on Finish of ASTM

A 270.

10 Cleanliness

10.1 Tubing shall be supplied in accordance with the

supplementary requirement for Cleanliness of ASTM A

632.

10.2 Tubing surface shall be sealed with polyethylene

caps after being purged with nitrogen or a suitable inert

gas. Capped tubing shall be heat sealed in a single 0.15

mm (6 mil) polyethylene bag.

11 Chemical Composition

11.1 Chemical composition of the steel shall conform

to the requirements of the section on Chemical

Composition in ASTM A 269 for nominal sizes 1/2

inch diameter and larger and to the section on Chemical

Composition in ASTM A 632 for nominal sizes smaller

than 1/2 inch diameter.

11.2 Sulfur content shall be from 0.003% to 0.010%

for all nominal sizes.

12 Mechanical Properties

12.1 Tubing shall conform to the applicable

requirements of ASTM A 450/A 450M unless

otherwise provided herein.

12.2 Hardness of all sizes shall conform to the section

on Hardness Requirements of ASTM A 269.

12.3 Tensile properties of all sizes shall conform to the

section on Mechanical Properties of ASTM A 632.

13 Metallurgical Requirements

Tubing shall pass an intergranular corrosion test

conducted in accordance with the supplementary

requirement for Intergranular Corrosion Test of ASTM

A 262. A minimum of two samples per lot shall be

tested.

14 Nondestructive Testing Requirement

14.1 Eddy current testing shall be performed in

accordance with the procedure and evaluation outlined

in the section on Nondestructive Electric Test of ASTM

A 450/A 450M except that the calibration reference

notches shall not exceed 10% of the specified wall

thickness of the tubing or 0.075 mm (0.003 inches),

whichever is greater. If the form of product supplied

makes this test technically infeasible, alternative non-

destructive testing methods shall be agreed upon by the

purchaser and supplier.

14.2 At the option of the purchaser, hydrostatic testing

shall be conducted and evaluated in accordance with the

requirements of the section on Hydrostatic Test of

ASTM A 450A/450M.

15 Permissible Variations in Dimensions

15.1 Sampling for dimensional variations shall be

performed in accordance with MIL-STD-105 with

double normal sampling and a 2 1/2% Acceptable

Quality Level (AQL).

15.2 The permissible variations in dimensions shall be

as outlined in Table 2 of ASTM A 270 for all sizes.

15.3 Nominal wall thickness for tubing to be finished

as shown in Table 1. The finished thicknesses must also

comply with ANSI/ASME B31.1 and B31.3

specifications for the intended service temperature and

pressure. A tolerance of ± 10% shall apply to the wall

thicknesses specified.

Table 1 Nominal Wall Thickness for Various Tube

Nominal Sizes

Nominal O.D. Tube Wall Thickness

1/4" , 3/8" 1.02 mm (0.040" )