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SEMI F16-94 © SEMI 1994, 2004 2 7 Manufacture 7.1 Tubing shall be m ade by the seamless process for all sizes, except that welded tubi ng may be acceptable for nomi nal sizes 3 inches and a bove in diameter if t he permi…

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SEMI F16-94 © SEMI 1994, 2004 1
SEMI F16-94 (Withdrawn 0304)
SPECIFICATION FOR 316L STAINLESS STEEL TUBING WHICH IS TO
BE FINISHED AND ELECTROPOLISHED FOR HIGH PURITY
SEMICONDUCTOR MANUFACTURING APPLICATIONS
NOTICE: This document was balloted and approved for withdrawal in 2004.
1 Purpose
The purpose of this specification is to identify the
applicable ASTM tubing specification requirements and
to define the special material composition, wall
thickness, ordering, and quality assurance requirements
for 316L stainless steel tubing which is to be finished
into electropolished tubing, component tube stubs, and
fittings made from tubing for use in high purity
semiconductor manufacturing facility applications.
2 Scope
This specification defines the special criteria for
procuring nominal sizes of unfinished 316L stainless
steel tubing which is to be finished into tubing,
component tube stubs, and fittings made from tubing
for use in high purity chemical (gas or liquid)
distribution systems in semiconductor manufacturing
facilities.
3 Referenced Documents
The referenced documents are to be their current
editions as published by their sponsors.
3.1 ASTM Standards
1
A 262 — Practices for Determining Susceptibility to
Intergranular Attack in Austenitic Stainless Steels
A 269 — Specification for Seamless and Welded
Austenitic Stainless Steel Tubing for General Service
A 270 — Seamless and Welded Austenitic Stainless
Steel Sanitary Tubing
A 450/A 450M — Specification for General
Requirements for Carbon, Ferritic Alloy, and Austenitic
Alloy Steel Tubes
A 632 — Specification for Seamless and Welded
Austenitic Stainless Steel Tubing (Small Diameter) for
General Service
E 112 — Methods for Determining Average Grain Size
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
3.2 Military Standards
2
3.3 MIL-STD-105 — Sampling Procedures and Tables
for Inspection by Attributes
3.4 ANSI/ASME Standards
3
B31.1 — Power Piping
B31.3 — Chemical Plant and Petroleum Refinery
Piping
Boiler and Pressure Vessel Code — Section III NCA,
The Rules for Construction of Nuclear Power Plant
Components
4 General Requirements
Tubing furnished under this specification shall conform
to the requirements of ASTM A 450 and A 269 for
nominal sizes 1/2 inch diameter and larger and to the
requirements of ASTM A 450 and A 632 for nominal
sizes smaller than 1/2 inch diameter, and to the
additional requirements herein.
5 Ordering Information
5.1 Orders for material under this specification shall
include the following, as required to describe the
material adequately:
• Quantity (meters, feet, or number of lengths)
• Grade per Table 1 of ASTM A 269
• Size (nominal outside diameter and nominal wall
thickness)
• This specification number
• Surface condition (if applicable)
• Special requirements and any supplementary
requirements selected
6 Process
The steel shall be processed in accordance with the
section on Process of ASTM A 269.
2 Naval Publications and Forms Center, 5801 Tabor Avenue,
Philadelphia, PA 19120
3 American National Standards Institute, 1430 Broadway, New York,
NY 10018
SEMI F16-94 © SEMI 1994, 2004 2
7 Manufacture
7.1 Tubing shall be made by the seamless process for
all sizes, except that welded tubing may be acceptable
for nominal sizes 3 inches and above in diameter if the
permissible variations in outside diameter are in
accordance with Table 2 of ASTM A 270 and the other
criteria specified herein are met.
7.2 Tubing must be cold finished.
8 Heat Treatment
8.1 All tubing shall be furnished in the heat treated
condition in accordance with the section on Heat
Treatment in ASTM A 269. If grain size is restricted by
the supplementary requirement specified in Section
17.2 of this specification, the minimum annealing
temperature shall not apply, provided that the tubing
passes the intergranular corrosion test of Section 13 of
this specification.
8.2 All tubing shall be vacuum annealed, or bright
annealed in an undiluted hydrogen atmosphere,
followed by rapid cooling. The adequacy of the cooling
rate shall be confirmed by the intergranular corrosion
test of Section 13 of this specification.
9 Surface Condition
The surface condition of tubing shall be in accordance
with the requirements of the section on Finish of ASTM
A 270.
10 Cleanliness
10.1 Tubing shall be supplied in accordance with the
supplementary requirement for Cleanliness of ASTM A
632.
10.2 Tubing surface shall be sealed with polyethylene
caps after being purged with nitrogen or a suitable inert
gas. Capped tubing shall be heat sealed in a single 0.15
mm (6 mil) polyethylene bag.
11 Chemical Composition
11.1 Chemical composition of the steel shall conform
to the requirements of the section on Chemical
Composition in ASTM A 269 for nominal sizes 1/2
inch diameter and larger and to the section on Chemical
Composition in ASTM A 632 for nominal sizes smaller
than 1/2 inch diameter.
11.2 Sulfur content shall be from 0.003% to 0.010%
for all nominal sizes.
12 Mechanical Properties
12.1 Tubing shall conform to the applicable
requirements of ASTM A 450/A 450M unless
otherwise provided herein.
12.2 Hardness of all sizes shall conform to the section
on Hardness Requirements of ASTM A 269.
12.3 Tensile properties of all sizes shall conform to the
section on Mechanical Properties of ASTM A 632.
13 Metallurgical Requirements
Tubing shall pass an intergranular corrosion test
conducted in accordance with the supplementary
requirement for Intergranular Corrosion Test of ASTM
A 262. A minimum of two samples per lot shall be
tested.
14 Nondestructive Testing Requirement
14.1 Eddy current testing shall be performed in
accordance with the procedure and evaluation outlined
in the section on Nondestructive Electric Test of ASTM
A 450/A 450M except that the calibration reference
notches shall not exceed 10% of the specified wall
thickness of the tubing or 0.075 mm (0.003 inches),
whichever is greater. If the form of product supplied
makes this test technically infeasible, alternative non-
destructive testing methods shall be agreed upon by the
purchaser and supplier.
14.2 At the option of the purchaser, hydrostatic testing
shall be conducted and evaluated in accordance with the
requirements of the section on Hydrostatic Test of
ASTM A 450A/450M.
15 Permissible Variations in Dimensions
15.1 Sampling for dimensional variations shall be
performed in accordance with MIL-STD-105 with
double normal sampling and a 2 1/2% Acceptable
Quality Level (AQL).
15.2 The permissible variations in dimensions shall be
as outlined in Table 2 of ASTM A 270 for all sizes.
15.3 Nominal wall thickness for tubing to be finished
as shown in Table 1. The finished thicknesses must also
comply with ANSI/ASME B31.1 and B31.3
specifications for the intended service temperature and
pressure. A tolerance of ± 10% shall apply to the wall
thicknesses specified.
Table 1 Nominal Wall Thickness for Various Tube
Nominal Sizes
Nominal O.D. Tube Wall Thickness
1/4" , 3/8" 1.02 mm (0.040" )
SEMI F16-94 © SEMI 1994, 2004 3
1/2" 1.32 mm (0.052" )
3/4" , 1" , 1 1/2" , 2" , 3" 1.75 mm (0.069" )
4" , 6" 2.11 mm (0.083" )
16 Quality Assurance Requirements
The supplier’s quality assurance program shall meet the
requirements of the ASME Boiler and Pressure Vessel
Code, Section III, NCA-3800 or of ISO 9000.
17 Supplementary Requirements
The following supplementary requirements shall apply
only when specified by the purchaser on the inquiry,
contract, or order.
17.1 Alternative Finish (Inside Surface) — The
purchaser may specify alternate chemical treatment for
the inside surface. Such treatment shall not promote
grain boundary attack; the intergranular corrosion test
requirement of Section 13 shall apply after chemical
treatment.
17.2 Restricted Grain Size — At the option of the
purchaser, ASTM grain size number may be restricted
to 7 or finer, per ASTM E 112, provided that a
maximum hardness lower than that given in the section
on Hardness Requirements of ASTM A 269 is not also
imposed.
18 Certification
18.1 The supplier shall provide the following reports
and certifications with all shipments of tubing:
18.1.1 Type of tubing (seamless or welded)
18.1.2 Size (nominal outside diameter and nominal
wall thickness)
18.1.3 Material composition report shall be provided to
verify the above required grade, sulfur content, and
grain size
18.1.4 Tubing provided in accordance with this
specification shall be mill and heat traceable and
permanently etched for correspondence to the
applicable mill test reports.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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consent of SEMI.