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SEMI F22-1102 © SEMI 1997, 2002 8 6.1.1 Cryogeni c Liquid St orage Tank Pad 6.1.1.1 Product fill hose manifold 6.1.1.2 Gas, liqui d withdraw mani fold 6.1.1.3 Liqui d vaporizers 6.1.1.4 Pressure relie f valve(s) 6.1.1.5 …

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SEMI F22-1102 © SEMI 1997, 2002 7
Figure 1
Bulk Gas (Cryogenic) Supply System Flow Chart (cont.)
SEMI F22-1102 © SEMI 1997, 2002 8
6.1.1 Cryogenic Liquid Storage Tank Pad
6.1.1.1 Product fill hose manifold
6.1.1.2 Gas, liquid withdraw manifold
6.1.1.3 Liquid vaporizers
6.1.1.4 Pressure relief valve(s)
6.1.1.5 Automatic shutoff valve (ASO)
6.1.1.6 Low temperature sensing and shutoff device
6.1.1.7 Liquid level indicator (local and remote)
6.1.1.8 Vessel design specification (e.g., ASME
1
in
US)
6.1.1.9 Tank pressure building coil
6.1.1.10 Emergency Manual Off (EMO) — hydrogen
and oxygen only
6.1.1.11 Product purity standards
6.1.2 Primary Pressure Regulation Manifold
6.1.2.1 Regulator design specification
6.1.2.2 Large diameter valve design specification
6.1.2.3 Bypass configuration
6.1.2.4 Pressure relief valves
6.1.3 Initial Particle Filter Skid
6.1.3.1 Qualification standard
6.1.3.2 Filtration medium design
6.1.3.3 Bypass configuration
6.1.4 Central Purifier
6.1.4.1 Purification medium, type, and qualification
standards
6.1.4.2 Regeneration requirements
6.1.4.3 Electronics
6.1.4.4 Control system
6.1.4.5 Malfunction alarms
6.1.5 Gas Monitoring System
6.1.5.1 Sampling system and standards
6.1.5.2 Analytical methodologies and standards
6.1.5.3 Calibration and baselining
6.1.5.4 Sensitivity and accuracy
6.1.5.5 Data collection and archiving
1 American Society of Mechanical Engineers — An industry trade
organization which sets standards for storage vessels, etc.
6.1.5.6 Purity standards and operational alarms
6.1.5.7 Test stand design and safety considerations
6.1.5.8 Portable system specifications
6.2 High Pressure Tube Trailer Supply (See Figure 2)
6.2.1 Regional regulatory cylinder specification (e.g.,
DOT
2
in US region)
6.2.2 Regional valve specification (e.g., CGA
3
in US
region)
6.2.3 High pressure manifold
6.2.4 Relief devices
6.2.5 Excess flow devices (e.g., for H
2
)
6.2.6 Product purity standard
6.2.7 Transfer hose
6.2.8 Emergency manual off (EMO) (e.g., for H
2
, O
2
)
6.2.9 Pressure billing gauge
Tube retest specification (e.g., DOT in US region)
6.3 On-Site Nitrogen Supply (see Figure 3)
6.3.1 Air compressor
6.3.2 Production control system
6.3.3 Air prepurifier for moisture and hydrocarbon
removal
6.3.4 Process instrumentation
6.3.5 Control valves
6.3.6 Distillation column
6.3.7 Product booster compressor
6.3.8 National electric codes
6.3.9 Regional vessel guidelines (e.g., ASME
(American Society of Mechanical Engineers) in US
region)
6.3.10 Vacuum-insulated piping for liquid
add/withdraw
6.3.11 EMO station
6.3.12 Chiller
2 Department of Transportation (DOT) — The US regulatory agency
governing transport of hazardous materials.
3 Compressed Gas Association (CGA) — An industry trade
organization which sets standards for cylinder outlet connections in
the US.
SEMI F22-1102 © SEMI 1997, 2002 9
7 Specialty Gas Distribution Systems
7.1 Process Gas Panel System (see Figure 4)
7.1.1 High Pressure
7.1.1.1 “Pigtail”/Cylinder connection assembly
7.1.1.2 Pressure transducer
7.1.1.3 Excess flow sensor
7.1.1.4 Nitrogen check valve
7.1.1.5 Nitrogen flow restrictor
7.1.1.6 Nitrogen purge valve
7.1.1.7 Vent valve
7.1.1.8 Process valve (regulator isolation)
7.1.1.9 Valve specifications
7.1.1.10 Tubing material specifications
7.1.2 Low Pressure
7.1.2.1 Pressure relief valve
7.1.2.2 Pressure transducer
7.1.2.3 Particle filter
7.1.2.4 Vent valve
7.1.2.5 Process valve
7.1.3 Pressure Regulator and Component
Specifications
7.1.4 Vacuum Generator System
7.1.4.1 Venturi
7.1.4.2 Venturi supply valve
7.1.4.3 Supply check valve
7.1.4.4 Vacuum/pressure gauge
7.2 Nitrogen Purge Panel System
7.2.1 High Pressure
7.2.1.1 “Pigtail”/Cylinder connection assembly
7.2.1.2 Pressure gauge
7.2.1.3 Vent valve
7.2.1.4 Process valve (regulator isolation)
7.2.1.5 Pressure regulator
7.2.1.6 Low Pressure
7.2.1.7 Pressure gauge
7.2.1.8 Particle filter
7.2.1.9 Process valve
7.3 Distribution Lines — Gas Delivery System
(Facilities)
7.3.1 Tubing specifications
7.3.2 Welding specifications
7.3.3 Valve specifications
7.3.4 System design specifications
7.3.5 Segregation specifications (cross contamination
prevention)
7.3.6 System Quality Assurance/Quality Control
standards
7.3.6.1 Static leak test and specification
7.3.6.2 He leak rate test and specification
7.3.6.3 Particle generation test and specification
7.3.6.4 Gaseous impurity test and specification
7.3.7 Hazardous gas detection requirements
7.4 Gas Box
7.4.1 Secondary pressure regulator
7.4.2 Secondary particle filtration
7.4.3 Isolation valves
7.4.4 Sampling point(s)
7.4.5 POU purification
7.5 Valve Manifold Box
7.5.1 Face seal connection
7.5.2 Isolation valve
7.5.3 Micro weld fitting
7.5.4 3/8 inch or 1/2 inch 316L SS tubing manifold
7.5.5 Micro weld fitting
7.5.6 1/4 inch 316L SS tubing stick line
7.5.7 Isolation valve
7.5.8 Pneumatic isolation valve
7.5.9 Face seal connection
7.5.10 Purge gas inlet micro weld fitting
7.5.11 Pressure regulator
7.5.12 Flow through pressure transducer or dead space
pressure transducer or pressure gauge
7.5.13 Excess flow device
7.5.14 Vent gas outlet micro tee weld fitting
7.5.15 Face seal connection