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SEMI E52-0703 © SEMI 1995, 2003 25 Code Gas Name Symbol Formula Synonym Ref 320 Triallylamine C9H15N C 9 H 15 N 2 209 Dibromodifluoromethane CBr2F2 Br 2 CF 2 R-12B2, FREON-12B2 2 200 Carbon Tetrab romide CBr4 CBr 4 2 199…

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SEMI E52-0703 © SEMI 1995, 2003 24
Code Gas Name Symbol Formula Synonym Ref
306 Triethyl arsine C6H15As (C
2
H
5
)
3
As Arsine; Triethylarsenic 2
307 Trietoxy arsine C6H15AsO3 (C
2
H
5
O)
3
As Triethyl ester arsenous acid;
Triethyl arsenite
2
308 Triethoxyborane C6H15BO3 (C
2
H
5
O)
3
B Boron triethoxide; 2
148 Triethylgallium C6H15Ga (C
2
H
5
)
3
Ga TEGa 4
309 Triethylindium C6H15In (C
2
H
5
)
3
In Indium triethyl 2
310 Triethylamine C6H15N (C
2
H
5
)
3
N UN 1296; Ethanamine; 2
163 Triethylborate C6H15O3B B(OC
2
H
5
)
3
TEB, Triethoxyborane 2
311 Triethoxyphosphine C6H15O3P (C
2
H
5
O)
3
P Triethyl phosphite; UN 2323;
Phosphorous acid, triethyl ester
2
274 TEAsat C6H15O4As (C
2
H
5
O)
3
AsO 1
224 Fluorotriethoxysilane C6H15OSiF (C
2
H
5
O)
3
SiF 2
258 Triethylantimony C6H15Sb (C
2
H
5
)
3
Sb 2
188 Diethoxy Dimethyl Silane C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
2
312 Triethoxy silane C6H16O3Si (C
2
H
5
O)
3
SiH 2
313 Triethyl silane C6H16Si (C
2
H
5
)
3
SiH (C2H5)3SiH; 2
139 Hexamethyldisilane C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS 3
228 Hexamethyldisiloxane C6H18Si2O (CH
3
)
6
Si
2
O 2
227 Hexamethyldisilazane C6H19Si2N (CH
3
)
6
Si
2
NH 2
172 Chlorobenzene C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride 2
197 Benzene C6H6 C
6
H
6
2
180 Phenol C6H6O C
6
H
5
OH 2
314 Trimethylisoxazole C6H9NO CH
3
CH=CHCH=CHCON
H
2
3,4,5-Trimethylisoxazole,
Sorbamide
3
273 Tungsten Hexacarbonyl C6O6W W(CO)
6
1
177 Methylcyclohexane C7H14 CH
3
C
6
H
11
Hexahydrotoluene 2
181 Toluene C7H8 C
6
H
5
CH
3
Methylbenzene 2
174 Ethylbenzene C8H10 C
6
H
5
C
2
H
5
2
179 o-Xylene C8H10 1,2-(CH
3
)
2
C
6
H
4
1,2-Dimethylbenzene 2
263 Xylene m- C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene 3
264 Xylene p- C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene 3
342 3-one-2,5-dimethyl hexadiene C8H10 CH
2
=C(CH
3
)C=CC(CH
3
)C
H
2
3
343 1,7-Octadiyne C8H10 HC=C(CH
2
)
4
C=CH 3
344 2,6-Octadiyne C8H10 CH
3
C=CCH
2
CH
2
C=CCH
3
3
345 1,3,5,7-Octatetraene C8H10 CH
2
=CHCH=CHCH=CHC
H=CH
2
3
237 Octane C8H18 CH
3
(CH
2
)
6
CH
3
2
315 Tetraethylgermane C8H20Ge (C
2
H
5
)
4
Ge (C2H5)4Ge; Germanium
tetraethyl
2
144 Tetraethoxysilane C8H20O4Si (C
2
H
5
O)
4
Si TEOS 2
316 Tetraethyl lead C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN 1649 2
317 Tetraethyl silane C8H20Si C
8
H
20
Si Tetraethylsilane;
Tetraethylsilicon; (C2H5)4Si
2
318 Tetrakis(dimethylamino)-
titanium
C8H24N4Ti C
8
H
24
N
4
Ti 2
319 Styrene C8H8 C
8
H
8
Ethenylbenzene; Un 2055 2
SEMI E52-0703 © SEMI 1995, 2003 25
Code Gas Name Symbol Formula Synonym Ref
320 Triallylamine C9H15N C
9
H
15
N 2
209 Dibromodifluoromethane CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2 2
200 Carbon Tetrabromide CBr4 CBr
4
2
199 Bromochlorodifluoromethane CBrClF2 BrClCF
2
2
80 Bromotrifluoromethane CBrF3 BrCF
3
F-13B1, R-13B1 1
84 Dichlorodifluoromethane CCl2F2 CCl
2
F
2
F-12, R-12 1
60 Phosgene CCl2O CCl
2
O Carbonyl Chloride 1
91 Trichlorofluoromethane CCl3F CCl
3
F F-11, R-11 1
101 Carbon Tetrachloride CCl4 CCl
4
Tetrachloromethane or Methane,
Tetrachloro
2
74 Chlorotrifluoromethane CClF3 ClCF
3
F-13, R-13 1
46 Carbonyl Fluoride CF2O CF
2
O 1
259 Trifluoroacetic Acid CF3CO2H CF
3
CO
2
H 2
63 Carbon Tetrafluoride CF4 CF
4
Tetrafluoromethane or Methane,
Tetrafluoro
1
321 Trifluoromethylhypofluorite CF4O CF
4
O CF3OF; Hypofluorous acid;
trifuoromethyl ester
2
268 Methylene Bromide CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide,
Dibromomethane
1
265 Dichloromethane CH2Cl2 CH
2
Cl
2
160 Difluoromethane CH2F2 CH
2
F
2
Methylene Fluoride 2
208 Diazomethane CH2N2 CH
2
N
2
Acomethylene 2
322 Formaldehyde CH2O CH
2
O H2C0; UN 1198; BFV 2
44 Methyl Bromide CH3Br CH
3
Br Bromomethane or Methane,
Bromo
1
36 Methyl Chloride CH3Cl CH
3
Cl Chloromethane or Methane,
Chloro
1
183 Methyltrichlorosilane CH3Cl3Si CH
3
SiCl
3
MTS 2
33 Methyl Fluoride CH3F CH
3
F Fluoromethane or Methane,
Fluoro
1
323 Iodomethane CH3I CH
3
I Methyl iodide; Un 2644 2
235 Nitromethane CH3NO2 CH
3
NO
2
2
28 Methane CH4 CH
4
1
176 Methanol CH4O CH
3
OH Methyl Alcohol 2
47 Methyl Mercaptan CH4S CH
3
SH 1
52 Methylamine CH5N CH
3
NH
2
Amino Methane,
Monomethylamine
2
234 Monomethyl hydrazine CH6N2 CH
3
N
2
H
3
2
185 Methylsilane CH6Si CH
3
SiH
3
Monomethylsilane 2
83 Tribromomethane CHBr3 CHBr
3
2
65 Dichlorofluoromethane CHCl2F CHCl
2
F F-21, R-21 1
71 Chloroform CHCl3 CHCl
3
Trichloromethane or Methane,
Trichloro
2
57 Chlorodifluoromethane CHClF2 CClHF
2
F-22, R-22 1
49 Fluoroform CHF3 CHF
3
Trifluoromethane or Methane,
Trifluoro, F-23, R-23
1
19 Chlorine Cl2 Cl
2
1
SEMI E52-0703 © SEMI 1995, 2003 26
Code Gas Name Symbol Formula Synonym Ref
37 Cyanogen Chloride ClCN ClCN 1
77 Chlorine Trifluoride ClF3 ClF
3
1
202 Chlorine Pentafluoride ClF5 ClF
5
2
201 Chlorine Dioxide ClO2 ClO
2
2
72 Perchloryl Fluoride ClO3F ClO
3
F 1
9 Carbon Monoxide CO CO 1
25 Carbon Dioxide CO2 CO
2
1
34 Carbonyl Sulfide COS COS 1
40 Carbon Disulfide CS2 CS
2
2
14 Deuterium D2 H
2
2
D2 2
18 Fluorine F2 F
2
1
217 Digermane Ge2H6 Ge
2
H
6
2
113 Germanium Tetrachloride GeCl4 GeCl
4
Tetrachlorogermane 2
99 Germanium Tetrafluoride GeF4 GeF
4
Tetrafluorogermane 2
43 Germane GeH4 GeH
4
1
7 Hydrogen H2 H
2
1
20 Water Vapor H2O H
2
O 2
22 Hydrogen Sulfide H2S H
2
S 1
23 Hydrogen Selenide H2Se H
2
Se 1
171 Sulfuric Acid H2SO4 H
2
SO
4
2
229 Hydrogen telluride H2Te H
2
Te 2
10 Hydrogen Bromide HBr HBr 1
11 Hydrogen Chloride HCl HCl 1
24 Hydrogen Cyanide HCN HCN 1
1 Helium He He 1
12 Hydrogen Fluoride HF HF 1
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
329 Mercury Hg Hg UN 2809 2
17 Hydrogen Iodide HI HI 1
269 Hydrazoic Acid HN3 HN
3
1
167 Nitric Acid HNO3 HNO
3
2
115 Iodine Pentafluoride IF5 IF
5
1
5 Krypton Kr Kr 1
124 Molybdenum Hexafluoride MoF6 MoF
6
2
13 Nitrogen N2 N
2
1
157 Tetrafluorohydrazine N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride 1
50 Hydrazine N2H4 H
2
NNH
2
2
27 Nitrous Oxide N2O N
2
O 1
78 Nitrogen Trioxide N2O3 N
2
O
3
1
95 Nitrogen Tetroxide N2O4 N
2
O
4
Dinitrogenoxide 2
346 Niobium Pentachloride NbCl5 NbCl
5
3
350 Deuterium Ammonia ND3 ND
3
3
2 Neon Ne Ne 1
232 Difluoroamidogen NF2 NF
2
2