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SEMI F33-0998 © SEMI 1998 5 of the user of t he method. If an accurac y sta tement is given, then a p rop agati on of er ror calc ulatio n must be provided to estim ate t he accuracy of t he validation. NOTICE: T hese st…

SEMI F33-0998 © SEMI 19984

Table 4 Common Masses in Helium Bulk Gas

m/z Ions Source

4He

Bulk Gas

5HeH

Analyte

8He

Bulk Gas

9He

Analyte

12 He

Bulk Gas

12 C

Analyte

14 N

Analyte

15 CH

Analyte

16 He

Bulk Gas

16 CH

Analyte

18 H

Analyte

20 Ne

Bulk Gas Isotope

22 HeH

Analyte

24 NeHe

Bulk Gas Impurity

26 He

Analyte

28 N

Analyte

28 CO

Analyte

28 He

Bulk Gas

32 O

Analyte

40 Ar

Bulk Gas Impurity

44 CO

Analyte

44 ArHe

Bulk Gas Impurity

NOTE: In APIMS, the same ion may be formed even though different

parent molecules are introduced into the ionization region. Thus, it is

necessary to be sure that the chosen m/z represents the ion of interest

and that the ion of interest originates from the molecule of interest.

14 Procedure

14.1 Zero gas should be passed through the dilution

system and the APIMS. Based on prior calibrations, the

system should be below 100 ppt, or at least an order of

magnitude lower than the lowest calibration point, for

the impurities to be calibrated.

14.2 Prior to beginning the calibration, record all

relevant parameters, such as discharge voltage, lens

voltages, ionization chamber pressure and/or flow, gas

type, etc.

14.3 The user should use the zero gas only, plus a

minimum of 5 challenge concentrations, with a

minimum of 5 data points, with the blended data points

spanning the range of interest of impurity measurement,

excluding the zero point, while maintaining constant

flow to the APIMS. Allow each challenge concentration

to stabilize for at least 15 minutes, and the signal

variation should be less than 3% before taking data

points at that concentration. Record the relevant ion

intensities as a function of time, for each stabilized

concentration.

14.4 Once the linearity of the calibration has been

established, a single point calibration check is

permitted, as long as the accuracy of the dilution system

is confirmed.

15 Calculations or Interpretation of Results

15.1 Perform a regression analysis for the individual

ion intensities against the impurity concentration. Be

sure to use only ion intensities below the saturation

region of your APIMS ion counting electronics, if using

counting detection. (Ask the manufacturer for the

saturation region of the units counting electronics.) The

from the fit of all the regression coefficients should

be 0.98 or above. If this is not the case, the calibration

will have to be repeated as described in the previous

section.

16 Reporting Results

16.1 As a minimum, the calibration will include the

following information for each impurity:

y = c

+ c

* x

(

where,

y is the ion intensity, c

is ion intensity

background, c

is the linear response factor,

and x is the impurity level.

16.2 As an option, a quadratic regression may be

reported for the calibration, and will include the

following information for each impurity:

y = c

+ c

* x + c

* x

(2)

where,

y is the ion intensity, c

is ion intensity

background, c

is the first order response

factor, c

is the second order response factor

and x is the impurity level.

The c

ratio or negative x - intercept is

useful to define the background concentration

of each particular ion. All regression coefficients

should be reported.

17 Precision and Accuracy

17.1 This method does not explicitly consider the

estimation of the accuracy of the impurity standard in

detail, because such a calculation can be made by

applying procedures described elsewhere. The precision

and accuracy required in validation will vary with the

proposed application and may be left to the discretion

SEMI F33-0998 © SEMI 19985

of the user of the method. If an accuracy statement is

given, then a propagation of error calculation must be

provided to estimate the accuracy of the validation.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

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consent of SEMI.

SEMI F34-0998

GUIDE FOR LIQUID CHEMICAL PIPE LABELING

1 Purpose

1.1 This document establishes a recommended scheme

for labeling liquid process chemical piping systems

used in semiconductor manufacturing facilities and

equipment.

1.2 consistent labeling system facilitates rapid

identification of piping contents and avoids confusion

within the industry by eliminating the need for each

company or locality to develop their own guides.

2 Scope

2.1 This guide applies to compone nts typically found

in a liquid process chemical piping system for

semiconductor manufacturing processes. The following

list of included components is not exhaustive:

• Piping

• Valves

• Filters

• Regulators

• Tubing

3 Limitations

3.1 This guide does not replace or supersede any

labeling or identification requirements established by

local, state, or national authorities. Local laws and

regulations should be reviewed to ensure compliance.

3.2 This guide does not apply to containers regulated

by the United States Department of Transportation

(DOT), International Air Transport Association (IATA)

or other regulatory bodies.

3.3 This guide was prepared to address piping systems

conveying liquid process chemicals located within

semiconductor facilities. See Sections 6.6 and 6.11 for

application inside equipment.

4 Referenced Documents

NOTE: All documents cited should be the latest published

versions.

4.1 ANSI Document

ANSI/ASME A13.1 — Scheme for the Identification of

Piping Systems

5 Terminology

5.1 liquid chemical distribution system — The

collection of components and subsystems used to

control and deliver liquid process chemicals from a

source location to a point of use in a semiconductor

manufacturing facility.

6 Recommendations

6.1 Piping system labels and identification, should be

designed, and implemented in accordance with the

following recommendations.

6.2 The following color schemes should be used to

identify all liquid process chemical piping systems.

When a chemical has characteristics of more than one

category, the color scheme should be determined by the

most significant health or safety hazard of the chemical.

6.3 Background colors may be applied to the piping by

using pigments, paints, or other means acceptable to the

owner; or may be applied as the background color for

labels or tags used to identify the contents of the piping

system.

6.4 Primary label information consists of the name of

the material contained in the piping system; spelled out

in the predominant language of the country or region

where the piping system is used. Additional languages

may be used to supplement the primary language.

1 American National Standards Institute, 11 West 42nd Street, 13th

floor, New York, NY 10036, USA, Telephone:+ 1.212.642.4900,

Telefax:+ 1.212.398.0023, E-mail: info@ansi.org, WWW:

http://www.ansi.org/