semi合集-English.pdf - 第3926页

SEMI F34-0998 © SEMI 1998 4 7.5 U nite d States Departm ent of T r a nsportation Document 5 Title 49, Code of Federal Regulations NOTICE: T hese standards do n ot purport to address safety issues, if any, ass o ciated wi…

100%1 / 7923
SEMI F34-0998 © SEMI 19983
Table 2 Recommended Label and Text Sizes for Various Piping Diameters
Outside Diameter of Pipe or Covering Minimum Length of Label Minimum Height of Letters
Millimeters Inches Millimeters Inches Millimeters Inches
Less than 13 Less than 0.5 51 2 3 0.125
13–19 0.5–0.75 102 4 6 0.25
19–38 0.75–1.5 203 8 13 0.5
38–64 1.5–2.5 203 8 19 0.75
64–203 2.5–8 305 12 32 1.25
203–254 8–10 610 24 64 2.5
Over 254 Over 10 813 32 89 3.5
6.11 Where it is impractical to attach markings or labels directly to the pipe, a tag may be used. The tag should be
durable for the environment in which it is used and should be securely attached to the piping system such that it
cannot be easily removed or relocated from its installed position. The tag or tags should contain the same
information as defined for labels in Sections 6.4 and 6.5. Standard color-coding for tags should be the same as
defined for labels in Table 1. Tags should be installed at the same locations as required for other identification
methods defined in Section 6.10.
7 Related Documents
7.1 ANSI Document
ANSI Z535.1 — Safety Color Code
7.2 BSI Document
2
BS 1710 — Identification of Pipelines and Services
7.3 DIN Document
3
DIN 2403 — Kennzeichnung von Rohrleitungen nach dem Durchflußstoff (Identification Code for Pipe Lines
According to Media)
7.4 ISO Documents
4
ISO 3864 — Safety Colours and Safety Signs
ISO/DIS 14726-1 — Ships and Marine Technology — Identification Colours for the Contents of Piping Systems —
Part 1: Main Colours and Media (Revision of ISO/R 508:1966) { ISO/R 508:1966 was withdrawn by TC 8 in 1986}
2 British Standards Institution, 389 Chiswick High Road, GB-London W4 4AL, Telephone:+ 44.181.996.90.00, Telefax:+ 44.181.996.74.00, E-
mail: info@bsi.org.uk, WWW: http://www.bsi.org.uk/
3 DIN Deutsches Institut für Normung, Burggrafenstrasse 6, D-10787 Berlin, Germany, Postal Address: D-10772 Berlin, Telephone:+
49.30.26.01.0, Telefax:+ 49.30.26.01.12.31, Telex: 18 42 73 din d, Telegram: deutschnormen berlin, E-mail: postmaster@din.de, WWW:
http://www.din.de/
4 International Organization for Standardization, Central Secretariat, 1 rue de Varembe, Case postale 56, CH-1211, Geneve 20, Switzerland,
Telephone:+ 41.22.749.01.11, Fax:+ 41.22.733.34.30, E-mail: central@iso.ch, WWW: http://www.iso.ch/
SEMI F34-0998 © SEMI 1998 4
7.5 United States Department of Transportation
Document
5
Title 49, Code of Federal Regulations
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
5 US Government Printing Office, Washington, D.C., USA
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F35-0304 © SEMI 1998, 2004 1
SEMI F35-0304
TEST METHOD FOR ULTRA-HIGH PURITY GAS DISTRIBUTION
SYSTEM INTEGRATION VERIFICATION USING NON-INVASIVE
OXYGEN MEASUREMENT
This test method was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 4, 2003. Initially available at www.semi.org February 2004; to be published March
2004. Originally published September 1998.
1 Purpose
1.1 This test method defines a procedure to monitor the
integrity of ultra-high purity (UHP) gas distribution
systems by detecting the ingress of atmospheric
oxygen. This test method would be used to evaluate an
“active” UHP gas distribution system on a continuous
basis by using non-invasive O
2
measurement, without
requiring an interruption of the process tools using the
UHP gases of interest.
1.2 This test method should be used to protect
semiconductor fabrication processes using the UHP
gases, which may be sensitive to contamination by any
of the common atmospheric impurities, such as N
2
, O
2
,
H
2
O, CO
2
, before product yield problems develop.
1.3 This is the first such test method that describes a
noninvasive leak detection and locating procedure. It
differs from SEMI F1, which is an invasive technique
for identifying leak sources using a mass spectrometer
and a helium tracer gas.
2 Scope
2.1 This test method applies to UHP gas distribution
systems used in semiconductor manufacturing facilities
and comparable research and development areas.
2.2 This test method applies to bulk gas distribution
systems carrying UHP gases such as N
2
, Ar, He, H
2
,
N
2
O, SF
6
, and many halocarbons. In most cases, O
2
is
present only in ultra-low trace levels (typically less than
1.0 ppb).
2.3 This test method will provide real-time monitoring
of UHP gas distribution systems, resulting in
meaningful system integrity verification, atmospheric
contaminant trending analysis, and leak locating.
2.4 This test method will provide the user with
sufficient information to identify and troubleshoot
sources of atmospheric leakage into the UHP gas
distribution system.
2.5 This test method includes the specification of the
required O
2
analytical equipment, standard methods for
proper use of the O
2
analytical equipment, and
manipulation of the O
2
data in identifying atmospheric
leak sources.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This test method will only be successful in
identifying the presence and location of leaks from
atmospheric air using O
2
as the tracer gas representative
of all atmospheric air contaminants (i.e., N
2
, O
2
, H
2
O,
CO
2
). There is no capability to identify cross-
contaminant species between different UHP gases
which only contain ultra-low trace levels of O
2
or
outward leaks to atmosphere.
3.2 This test method will not focus specifically on the
process of detecting the exact location of every possible
atmospheric air leakage source. Rather, it will describe
techniques and examples demonstrating how
atmospheric air leaks can be reliably identified and
located, in general.
3.3 Results from this test method may not ensure that
other common atmospheric impurities (e.g., H
2
O) are
below their required specification limits after a leak has
been identified, corrected, and O
2
levels have returned
to normal. For example, since O
2
diffuses more quickly
and has a weaker surface adsorption than H
2
O, O
2
will
be the first atmospheric impurity detected. However,
H
2
O will likely be the last atmospheric impurity to be
purged out once a leak has been identified and repaired.
3.4 This test method is not a direct substitution for
SEMI F1.
4 Referenced Standard
4.1 SEMI Standard
SEMI F1 — Specification for Leak Integrity of High
Purity Gas Piping Systems and Components