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5.1.7 purifier an in-line device used for the removal of homogeneous impurities from gases, typically consisting of a packed-bed of active s olids contai ned in a stainless st eel housing. The act ive purification medi…
SEMI F36-0299 (Reapproved 1104)
GUIDE FOR DIMENSIONS AND CONNECTIONS OF GAS
DISTRIBUTION COMPONENTS
This standard was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published in 1993; last published February 1999.
1 Purpose
1.1 The purpose of this guide is standardization of
dimensional and mechanical/electrical connection
attributes for components used within gas distribution
systems. Standardization of these component interfaces
will allow for interchangeability of gas distribution
system components. Filters/purifiers, shut-off valves,
pressure regulators, MFC/MFMs, and pressure
transducers are the types of gas distribution components
that would benefit from being interchangeable.
2 Scope
2.1 This guide is for use with 1/4-inch distribution
systems at operating pressures no greater than 345 kPa
(50 psi).
2.2 The guide includes the following items:
2.2.1 Physical characteristics specific to each
component. These include a generalized drawing of the
component, specific end-to-end lengths for each type of
end connection, maximum envelope dimensions, base-
to-centerline dimensions, tolerances, and bottom
mounting information.
2.2.2 Electrical connections specific to each
component, where applicable. These include pin-outs
and types of connectors.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This guide is not intended to dictate how to build a
gas distribution system, but to allow for
interchangeability of components.
3.2 This standard does not include recommendations
for sensor-bus compliant interfaces.
3.3 This standard does not apply to surface mount
components used in modular type gas systems.
4 Referenced Standards
4.1 None.
5 Terminology
5.1 Definitions
5.1.1 component
an individual piece or a complete
assembly of individual pieces capable of being joined
with other pieces or components.
5.1.2 filter a porous device, generally constructed of
polymer, metal, or ceramics and housed in a metal
chamber, which traps particles, preventing them from
being transported downstream.
5.1.3 mass flow controller (MFC) a self-contained
device (consisting of a transducer, control valve, and
control and signal-processing electronics) commonly
used in the semiconductor industry to measure and
regulate the mass flow of gas.
5.1.4 mass flow meter (MFM) a self-contained
device, consisting of a mass flow transducer and signal-
processing electronics, commonly used in the
semiconductor industry to measure the mass flow of
gas.
5.1.5 pressure regulator a valve designed to reduce
a high incoming pressure (for example, from a cylinder)
to a lower outlet pressure by automatically opening to
allow flow until a desired, preset pressure on the outlet
side is reached, then automatically throttling closed to
stop further pressure increase.
5.1.6 pressure transducer
a component which
mechanically or electrically senses gas pressure. It
typically consists of a sensor and signal-processing
electronics which enables remote indication of gas
pressure.
SEMI F36-0299 © SEMI 1999, 2004 1
5.1.7 purifier an in-line device used for the removal of homogeneous impurities from gases, typically consisting
of a packed-bed of active solids contained in a stainless steel housing. The active purification media may remove
impurities such as moisture, oxygen, CO, CO
2
, hydrocarbons, hydrogen, or nitrogen from specific gases using a
variety of chemical reaction, physisorption, or chemisorption mechanisms. Point-of-use purifiers often contain a
particle filter within the same housing.
5.1.8 valve a device that controls the flow or pressure of a gas. Valve functions can include shutoff, metering,
backflow prevention, and pressure relief.
6 Ordering Information
6.1 Device manufacturers may use this guide when procuring processing equipment to communicate to the
equipment supplier the interface specifications required for interchangeability of components. This document may
also be used by semiconductor processing equipment suppliers to specify standardized interfaces to component and
module suppliers.
6.2 Orders for components in accordance with this standard shall include:
6.2.1 This standard number and date of issue.
6.2.2 Reference to the table number.
6.2.3 Reference to the option number, if applicable.
7 Filters and Purifiers
7.1 Filters less than 30 SLM and purifiers less than 1 SLM should conform to the interface design recommendations
appearing in Figure 1 and Table 1.
Figure 1
Filter and Purifier Interface Design
SEMI F36-0299 © SEMI 1999, 2004 2
Table 1 Filter and Purifier Interface Recommendations
Filter and Purifier
End-to-End Lengths:
1/4-inch Integral/fixed male face seal
1/4-inch Swivel face seal (male or female)
1/4-inch Tube weld
84 mm (3.31 in.)
-
-
NOTE 1: The tolerance on length for machined components is ± 0.15 mm (0.006 in.) from the component centerline to each
end.
NOTE 2: The tolerance on length for welded components is ± 0.5 mm (0.020 in.) from the component centerline to each end.
Overall Component Envelope:
Maximum Diameter
38 mm (1.5 in.)
Base to Centerline of Flow Path:
-
Mounting provisions:
Threaded holes
Pattern
None required
-
Fittings:
Process
1/4-inch
Control:
None required
SEMI F36-0299 © SEMI 1999, 2004 3