semi合集-English.pdf - 第3946页
SEMI F37-0299 (Reapproved 1104) METHOD FOR DETERMINATIO N OF SURFACE ROUGHNESS PARAMETERS FOR GAS DISTRIBU TION SYSTEM COMPONENTS This guideline was technically approved by the Global Gases Com mittee and is the direct r…
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
SEMI F36-0299 © SEMI 1999, 2004 12
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F37-0299 (Reapproved 1104)
METHOD FOR DETERMINATION OF SURFACE ROUGHNESS
PARAMETERS FOR GAS DISTRIBUTION SYSTEM COMPONENTS
This guideline was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published February 1999.
1 Purpose
1.1 The purpose of this test method is to define a
method for determining numerical values for surface
roughness parameters measured on gas distribution
system components. Application of this method is
intended to yield comparable data among users of this
method.
2 Scope
2.1 This document will specify methods, measuring
equipment, and test conditions for mechanical profile
surface roughness measurement of gas distribution
system components. This test method will not require
nor recommend numerical values for specific surface
roughness parameters. This test method is intended for
use in quality control and process development for
specification of and manufacturing of gas distribution
system components.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 Numerical values for specific surface roughness
parameters obtained using this test method may not
provide sufficient information for determining the
performance of the component, such as dry down times,
corrosion resistance or amount of particle generation.
Surface roughness measurement is one of many
evaluation techniques for assessing the performance or
quality of a surface. This document is not concerned
with characteristics such as component design, material,
dimensions, appearance, etc. While surface defects
traversed by the stylus may be included in the
roughness measurement, this method does not govern
the evaluation of surface defects. Surface defects may
be measured by methods such as SEM and EDX. This
test method is intended to measure surface features on
the order of 10 m in size. It is not intended to detect
submicron surface features.
4 Referenced Standards
4.1 ASME Standards
1
B46.1 — Surface Texture (Surface Roughness,
Waviness, and Lay)
4.2 ASQ Standards
2
Z1.9 — Sampling Procedures and Tables for Inspection
by Variables for Percent Nonconforming
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 EDX Energy Dispersive X-Ray Spectroscopy
5.1.2 SEM Scanning Electron Microscopy
5.1.3 SEM Scanning Electron Microscope
5.2 Definitions
5.2.1 cutoff a length selected to limit the spacing of
surface irregularities. It separates a surface's roughness
from its waviness.
5.2.2 distinct regions visually unique areas of a
surface defined by patterns of lay or differences in the
appearance of surface roughness. In-line bores of
different sizes or orientations and each leg of a shaped
component should be considered distinct regions.
5.2.3 evaluation length the actual length over which
surface roughness is assessed.
5.2.4 lay the general direction of orientation of
surface features.
5.2.5 skid a stylus probe support which acts as both
a filter and a datum for probe movements.
1 The American Society of Mechanical Engineers, Three Park
Avenue, New York, NY 10016-5990, 800-843-2763,
http://www.asme.org/
2 American Society for Quality, 600 North Plankinton Avenue,
Milwaukee, WI 53203, http://www.asq.org/
SEMI F37-0299 © SEMI 1999, 2004 1
5.2.6 skidless a type of instrument that does not use
an external skid attached to the probe to act as a datum.
Instead, it references a datum plane internal to the
measurement equipment.
5.2.7 stylus the object which mechanically probes
the surface.
5.2.8 surface roughness the finer irregularities of
the surface texture, usually including those
irregularities that result from the inherent action of the
production process, for example traverse feed marks
from cutting tools [ASME B46.1-1995].
5.2.9 surface texture repetitive or random
deviations from the nominal surface that forms the
three-dimensional topography of the surface. Surface
texture includes roughness, waviness, lay, and flaws
[ASME B46.1-1995].
5.2.10 waviness the more widely spaced component
of surface texture. Waviness may result from such
factors as machine or workpiece deflections, vibrations,
chatter, heat treatment, or warping strains. Roughness
may be considered as superimposed on a “wavy”
surface.
6 Sampling
6.1 Acceptability criteria should be specified by the
user and be developed in accordance with published
sampling plans such as ASQ Z1.9, Sampling
Procedures and Tables for Inspection by Variables for
Percent Nonconforming.
7 Apparatus
7.1 The instrument should be a stylus type as defined
by ASME B46.1, Section 2. Due to the limitations of
skidded instruments (Type IV and V), a skidless
instrument (Type I) is preferable.
7.2 The instrument should be calibrated using standard
laboratory practices and manufacturer's
recommendations with a roughness metrology standard
calibrated by a certified testing laboratory and traceable
to NIST
3
.
7.3 In order to resolve the features of the surface, a
stylus with a conical tipped radius of 5 m (200 in)
should be used.
3 National Institute of Standards and Technology, 100 Bureau Drive,
Stop 3460, Gaithersburg, MD 20899-3460, (301) 975-6478,
http://www.nist.gov/
8 Units of Measure
8.1 Surface roughness should be described by means of
the Roughness Average, R
a
, as defined per ASME
B46.1.
8.2 Measurements should be specified in micro-meters
(m) or microinches (in).
9 Preparation of Apparatus
9.1 The surface should be clean and free from loose
debris before taking a measurement.
9.2 The instrument should be sufficiently isolated from
vibrations, which will artificially increase roughness
measurements.
9.3 Surfaces inaccessible to the stylus probe may be
exposed by sectioning a sample(s). Samples should be
sectioned to avoid damage to the surface to be
measured and should be cleaned appropriately to
remove sectioning debris.
10 Procedure
10.1 Select a single random location for measurement
within each distinct region of interest on each
component.
10.2 Measurements shall be taken perpendicular to the
lay. If this is not practical, measurements may be taken
in the direction of process gas flow through the
component.
10.3 Instrument cutoff length should be set to 0.800
mm (0.030 in.).
10.4 The evaluation length, or measurement length,
should be at least 3.81 mm (0.150 in.) where sufficient
length is available.
11 Reporting
11.1 Average R
a
is defined as the average of all R
a
measurements taken over a population.
11.2 Maximum R
a
is defined as the maximum of all R
a
measurements taken over a population.
11.3 Both Average R
a
and Maximum R
a
should be
reported for a given population. A population can be
defined as:
a set of single measurements on multiple
components
a set of multiple measurements on a single
component
a set of multiple measurements on multiple
components
SEMI F37-0299 © SEMI 1999, 2004 2