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SEMI F42-0600 © SEMI 199 9, 2000 7 Table 4 Example of Test Data Sheet for Characteri zing to Voltage S ag Ride-Through Specificatio n Limits Result Event % Va-n % Vb-n % Vc-n DUT Mode (Idle or Proces sing) Voltage S ag D…

100%1 / 7923
SEMI F42-0600 © SEMI 1999, 2000 6
the power supply output begins to decay 3 cycles (60/50
ms) into the 55% of nominal sag event, causing the
DUT to interrupt.
-200
-100
0
100
200
Second
s
Generator Out
p
ut
Figure 2
Sag Generator Output
0
1
2
3
4
5
6
Second
s
P/S Out
p
ut
Figure 3
Power Supply Voltage Sag Shut Down Example
12 Reporting Test Results
12.1 Report the specific test plan used and, if used, the
voltage sag ride-through specification.
12.2 Report the manufacturer, model number, revision
(if known) and process application for the DUT.
12.3 Report the type of sag generator and the accuracy
of the test apparatus.
12.4 Report the outcome of the voltage sag testing in
both a tabular form (see Tables 4 and 5) and plotted on
a graph(s), voltage magnitude (Y axis) and duration (X
axis). Separate graphs should be plotted in order to
represent the results of the single-phase testing and the
phase-to-phase testing. If used, overlay a plot of the
voltage sag ride-through specification onto the voltage
sag testing outcome graph(s) (see Figures 4 and 5).
12.5 Report the outcome of the sag event including the
cause of the DUT interrupt (e.g., EMO relay dropped
out, power supply shutdown, etc.).
12.6 Report conclusions of voltage sag immunity
testing of the DUT (e.g., Key immunity data points,
compliance/non-compliance with voltage sag ride-
through specification, corrective actions taken, etc.).
SEMI F42-0600 © SEMI 1999, 20007
Table 4 Example of Test Data Sheet for Characterizing to Voltage Sag Ride-Through Specification Limits
Result
Event % Va-n % Vb-n % Vc-n DUT Mode
(Idle or
Processing)
Voltage Sag
Duration
Actual Time to
Interrupt (Seconds)
Comments
1 95 100 100 Processing 0.05 OK Equipment OK.
2 95 100 100 Processing 0.20 OK Equipment OK.
3 95 100 100 Processing 0.50 OK Equipment OK.
4 95 100 100 Processing 1.00 OK Equipment OK.
5 90 100 100 Processing 0.05 OK Equipment OK.
6 90 100 100 Processing 0.20 OK Equipment OK.
7 90 100 100 Processing 0.50 OK Equipment OK.
8 90 100 100 Processing 1.00 OK Equipment OK.
↓↓ ↓ ↓ ↓ ↓ ↓ ↓
34 55 100 100 Processing 0.20 0.16 Equipment Shutdown: EMO Relay
CR1 dropout
35 55 100 100 Processing 0.50 INT No Test - Beyond Interrupt
36 55 100 100 Processing 1.00 INT No Test - Beyond Interrupt
37 50 100 100 Processing 0.05 OK Equipment OK.
38 50 100 100 Processing 0.20 0.16 Same result as event 34.
↓↓ ↓ ↓ ↓ ↓ ↓ ↓
77 100 50 100 Processing 0.05 OK Equipment OK.
78 100 50 100 Processing 0.20 OK Equipment OK.
79 100 50 100 Processing 0.50 OK Equipment OK.
80 100 50 100 Processing 1.00 OK Equipment OK.
↓↓ ↓ ↓ ↓ ↓ ↓ ↓
117 100 100 50 Processing 0.05 OK Equipment OK.
118 100 100 50 Processing 0.20 OK Equipment OK.
119 100 100 50 Processing 0.50 OK Equipment OK.
120 100 100 50 Processing 1.00 OK Equipment OK.
SEMI F42-0600 © SEMI 1999, 2000 8
Table 5 Example of Test Data Sheet for Characterizing Equipment Susceptibility to Voltage Sags
Result
Event % Va-n % Vb-n % Vc-n DUT Mode
(Idle or
Processing)
Voltage Sag
Duration
Actual Time to
Interrupt (Seconds)
Comments
1 95 100 100 Processing 0.05 OK Equipment OK.
2 95 100 100 Processing 0.20 OK Equipment OK.
3 95 100 100 Processing 0.50 OK Equipment OK.
4 95 100 100 Processing 1.00 OK Equipment OK.
↓↓ ↓ ↓ ↓ ↓ ↓ ↓
53 30 100 100 Processing 0.05 OK Equipment OK.
54 30 100 100 Processing 0.20 0.16 Equipment Shutdown: EMO Relay
CR1 dropout
55 30 100 100 Processing 0.50 INT No Test - Beyond Interrupt
56 30 100 100 Processing 1.00 INT No Test - Beyond Interrupt
↓↓ ↓ ↓ ↓ ↓ ↓ ↓
129 100 35 100 Processing 0.20 OK Equipment OK.
130 100 35 100 Processing 0.50 OK Equipment OK.
131 100 35 100 Processing 1.00 OK Equipment OK.
132 100 30 100 Processing 0.05 OK Equipment OK.
133 100 30 100 Processing 0.20 0.16 Power Supply PS1 dropout
↓↓ ↓ ↓ ↓ ↓ ↓ ↓
233 100 100 5 Processing 0.05 OK Equipment OK.
234 100 100 5 Processing 0.20 0.16 Equipment Shutdown: EMO Relay
CR1 dropout
235 100 100 5 Processing 0.50 INT No Test - Beyond Interrupt
236 100 100 5 Processing 1.00 INT No Test - Beyond Interrupt
237 100 100 0 Processing 0.05 OK Equipment OK.
238 100 100 0 Processing 0.20 0.16 Same result as event 234.
239 100 100 0 Processing 0.50 INT No Test - Beyond Interrupt
240 100 100 0 Processing 1.00 INT No Test - Beyond Interrupt
.. . .