semi合集-English.pdf - 第403页

SEMI E52-0703 © SEMI 1995, 2003 39 MIXED GAS NAME SYMBOL CODE 1% DIBORANE/HYDROGEN 1% B2H6/H2 0557 1% DIBORANE/NITROGEN 1% B2H6/N2 0558 1% FLUORINE/NEON 1% F2/Ne 0733 1% GERMANE/HYDROGEN 1% GeH4/H2 0898 1% GERMANE/NITROG…

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SEMI E52-0703 © SEMI 1995, 2003 38
MIXED GAS NAME SYMBOL CODE
.1%PHOSPHINE/NITROGEN .1%PH3/N2 0789
.2%HYDROGEN SULFIDE/NITROGEN .2%H2S/N2 0902
.2%SULFUR DIOXIDE/AIR .2%SO2/Air 0794
.25%CARBON MONOXIDE/.1%HYDROGEN/1%OXYGEN/NITROGEN .25%CO/.1%H2/1%O2/N2 0795
.25%DIBORANE/HYDROGEN .25%B2H6/H2 0796
.25%OXYGEN/.5%HYDROGEN/1.5%CA RBON MONOXIDE/NITROGEN .25%O2/.5%H2/1.5%CO/N2 0797
.3%PHOSPHINE/SILANE .3%PH3/SiH4 0660
.4%CHLORINE/NITROGEN .4%Cl2/N2 0905
.4%HYDROGEN CHLORIDE/AIR .4%HCl/Air 0798
.48%NITROGEN TRIFLUORIDE/NITROGEN .48%NF3/N2 0900
.5%ARSINE/SILANE .5%AsH3/SiH4 0799
.5%BORON TRICHLORIDE/HYDROGEN .5%BCI3/H2 0655
.5%DIBORANE/ARGON .5%B2H6/Ar 0549
.5%PHOSPHINE/HELIUM .5%PH3/He 0889
.5%PHOSPHINE/HYDROGEN .5%PH3/H2 0656
.5%PHOSPHINE/NITROGEN .5%PH3/N2 0550
.5%SILANE/HYDROGEN .5%SiH4/H2 0551
.7%ARSINE/HELIUM .7%AsH3/He 0721
.7%ARSINE/HYDROGEN .7%AsH3/H2 0673
.7%GERMANIUM/HYDROGEN .7%GeH4/H2 0771
.8%ARSINE/HYDROGEN .8%AsH3/H2 0741
.8%CO/.8%O2/20%CO2/32%N2/H2 SELOX GAS MIX 0774
.8%DIBORANE/HYDROGEN .8%B2H6/H2 0743
.8%DIBORANE/NITROGEN .8%B2H6/N2 0662
.8%GERMANIUM TETRAFLUORIDE/HYDROGEN .8%GeF4/H2 0742
.8%PHOSPHINE/DISILANE .8%PH3/Si2H6 0681
.8%PHOSPHINE/HELIUM .8%PH3/He 0675
.8%PHOSPHINE/HYDROGEN .8%PH3/H2 0707
.8%PHOSPHINE/NITROGEN .8%PH3/N2 0552
.8%PHOSPHINE/SILANE .8%PH3/SiH4 0553
.9%ARSINE/HYDROGEN .9%AsH3/H2 0554
1%ACETYLENE/ETHYLENE 1%C2H2/C2H4 0772
1%ARSINE/HYDROGEN 1%AsH3/H2 0724
1%ARSINE/NITROGEN 1%AsH3/N2 0555
1%ARSINE/SILANE 1%AsH3/SiH4 0556
1%BORON TRICHLORIDE/HYDROGEN 1%BCI3/H2 0559
1%BORON TRICHLORIDE/NITROGEN 1%BCI3/N2 0560
1%BUTADIENE/BUTENE 1%C4H6-e)/C4H8-i) 0750
1%CARBON DIOXIDE/NITROGEN 1%CO2/N2 0800
1%CARBON MONOXIDE/19% NITROGEN/30%OXYGEN/CARBON
DIOXIDE 1%CO/19%N2/30%O2/CO2 0801
1%CARBON MONOXIDE/AIR 1%CO/Air 0802
1%CARBON MONOXIDE/CARBON DIOXIDE 1%CO/CO2 0803
1%CHLORINE/NITROGEN 1%Cl2/N2 0804
1%DIBORANE/ARGON 1%B2H6/Ar 0805
SEMI E52-0703 © SEMI 1995, 2003 39
MIXED GAS NAME SYMBOL CODE
1%DIBORANE/HYDROGEN 1%B2H6/H2 0557
1%DIBORANE/NITROGEN 1%B2H6/N2 0558
1%FLUORINE/NEON 1%F2/Ne 0733
1%GERMANE/HYDROGEN 1%GeH4/H2 0898
1%GERMANE/NITROGEN 1%GeH4/N2 0658
1%HYDROGEN SELENIDE/HYDROGEN 1%H2Se/H2 0645
1%HYDROGEN SULFIDE/HYDROGEN 1%H2S/H2 0644
1%HYDROGEN SULFIDE/NITROGEN 1%H2S/N2 0806
1%HYDROGEN/NITROGEN 1%H2/N2 0561
1%METHANE/49.5%CARBON DIOXIDE/ARGON 1%CH4/49.5%CO2/Ar 0807
1%METHYLSILANE (MONO)/HYDROGEN 1%CH6Si/H2 0899
1%NITROGEN DIOXIDE/AIR 1%NO2/Air 0808
1%NITROGEN DIOXIDE/NITROGEN 1%NO2/N2 0781
1%NITROGEN/HYDROGEN 1%N2/H2 0871
1%OXYGEN/NITROGEN 1%O2/N2 0562
1%PHOSPHINE/ARGON 1%PH3/Ar 0537
1%PHOSPHINE/HELIUM 1%PH3/He 0546
1%PHOSPHINE/HYDROGEN 1%PH3/H2 0563
1%PHOSPHINE/NITROGEN 1%PH3/N2 0514
1%PHOSPHINE/SILANE 1%PH3/SiH4 0531
1%SILANE/DIBORANE 1%SiH4/B2H6 0684
1%SILANE/HELIUM 1%SiH4/He 0745
1%SULFUR DIOXIDE/ARGON 1%SO2/Ar 0809
1%SULFUR DIOXIDE/NITROGEN 1%SO2/N2 0782
1%TRIMETHYLBORATE(TMB)/HYDROGEN 1%(CH3O)3B/H2 0526
1.5%ARSINE/HYDROGEN 1.5%AsH3/H2 0564
1.5%GERMANE/HYDROGEN 1.5%GeH4/H2 0775
1.5%PHOSPHINE/SILANE 1.5%PH3/SiH4 0533
1.5%SILANE/ARGON 1.5%SiH4/Ar 0810
1.6%PHOSPHINE/21%SILANE/ARGON 1.6%PH3/21%SiH4/Ar 0515
1.65%ACETYLENE/70%ETHYLENE/NITROGEN 1.65%C2H2/70%C2H4/N2 0873
1.8%SILANE/NITROGEN 1.8%SiH4/N2 0811
1.9%SILANE/NITROGEN 1.9%SiH4/N2 0812
10%AMMONIA/NITROGEN 10%NH3/N2 0668
10%ARSINE/HYDROGEN 10%AsH3/H2 0504
10%ARSINE/NITROGEN 10%AsH3/N2 0907
10%CARBON DIOXIDE/10%OXYGEN/NITROGEN 10%CO2/10%O2/N2 0735
10%CARBON DIOXIDE/ARGON 10%CO2/Ar 0813
10%CARBON DIOXIDE/NITROGEN 10%CO2/N2 0783
10%CARBON MONOXIDE/AIR 10%CO/Air 0730
10%CARBON MONOXIDE/CARBON DIOXIDE 10%CO/CO2 0729
10%CYCLOPROPANE/HELIUM 10%C3H6-a)/He 0716
10%DIBORANE/ARGON 10%B2H6/Ar 0881
10%DIBORANE/HYDROGEN 10%B2H6/H2 0701
10%DIBORANE/NITROGEN 10%B2H6/N2 0666
SEMI E52-0703 © SEMI 1995, 2003 40
MIXED GAS NAME SYMBOL CODE
10%DISILANE/ARGON 10%Si2H6/Ar 0670
10%DISILANE/HELIUM 10%Si2H6/He 0647
10%DISILANE/HYDROGEN 10%Si2H6/H2 0731
10%ETHYLENE/HELIUM 10%C2H4/He 0718
10%FLUORINE/ARGON 10%F2/Ar 0754
10%FLUORINE/HELIUM 10%F2/He 0566
10%FLUORINE/NITROGEN 10%F2/N2 0759
10%FLUORINE/OXYGEN 10%F2/O2 0814
10%GERMANE/ARGON 10%GeH4/Ar 0698
10%GERMANE/HELIUM 10%GeH4/He 0704
10%GERMANE/HYDROGEN 10%GeH4/H2 0509
10%HELIUM/HYDROGEN 10%He/H2 0749
10%HYDROGEN SELENIDE/HYDROGEN 10%H2Se/H2 0511
10%HYDROGEN/NITROGEN 10%H2/N2 0532
10%METHANE/ARGON 10%CH4/Ar 0710
10%METHANE/HELIUM 10%CH4/He 0744
10%METHANE/HYDROGEN 10%CH4/H2 0815
10%METHYLSILANE/HYDROGEN 10%CH6Si/H2 0689
10%NITROGEN TRIFLUORIDE/OXYGEN 10%NF3/O2 0570
10%NITROGEN/ARGON 10%N2/Ar 0576
10%OXYGEN/30%CARBON DIOXIDE/ARGON 10%O2/30%CO2/Ar 0816
10%OXYGEN/HELIUM 10%O2/He 0649
10%OZONE/NITROGEN 10%O3/N2 0817
10%OZONE/OXYGEN 10%O3/O2 0571
10%PHOSPHINE/ARGON 10%PH3/Ar 0538
10%PHOSPHINE/HELIUM 10%PH3/He 0674
10%PHOSPHINE/HYDROGEN 10%PH3/H2 0516
10%PHOSPHINE/NITROGEN 10%PH3/N2 0527
10%PHOSPHINE/SILANE 10%PH3/SiH4 0572
10%SILANE/ARGON 10%SiH4/Ar 0565
10%SILANE/HELIUM 10%SiH4/He 0573
10%SILANE/HYDROGEN 10%SiH4/H2 0575
10%SILANE/NITROGEN 10%SiH4/N2 0646
10%SULFUR DIOXIDE/NITROGEN 10%SO2/N2 0818
10%TRIMETHYSILANE/HYDROGEN 10%(CH3)3SiH/H2 0739
10%WATER VAPOR/NITROGEN 10%H2O/N2 0568
11%OZONE/OXYGEN 11%O3/O2 0868
12%HYDROGEN/NITROGEN 12%H2/N2 0819
12%OZONE/OXYGEN 12%O3/O2 0651
13%DISELENIUM DICHLORIDE/HYDROGEN 13%Se2Cl2/H2 0894
13%HYDROGEN CHLORIDE/1.32%XENON/NEON 13%HCI/1.32%Xe/Ne 0512
13%HYDROGEN/NITROGEN 13%H2/N2 0643
13%TRICHLOROSILANE/HYDROGEN 13%SiHCI3/H2 0682
15%ARGON/PHOSPHINE 15%Ar/PH3 0578
15%ARSINE/HYDROGEN 15%AsH3/H2 0579