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SEMI F52-1101 © SEMI 200 0, 2001 2 4.2.5 wa ll thickness — thickness of the wall of the PFA tube. 4.2.6 wa ll thickness devia tion — dev iation of w al l thickness. 4.2.7 wa ll thickness tolera nce — allowable deviation …
SEMI F52-1101 © SEMI 2000, 20011
SEMI F52-1101
DIMENSIONAL SPECIFICATION FOR METRIC PFA TUBES FOR
LIQUID CHEMICAL DISTRIBUTION IN SEMICONDUCTOR AND FLAT
PANEL DISPLAY MANUFACTURING
This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee
and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current
edition approved by the Japanese Regional Standards Committee on June 19, 2001. Initially available on
www.semi.org August 2001; to be published November 2001. Originally published June 2000.
1 Purpose
1.1 This document defines sizes and their measurement
methods of metric PFA tubes for liquid chemical
distribution in semiconductor and flat panel display
manufacturing equipment and facilities.
2 Scope
2.1 This document applies to metric tubes made from
PFA.
2.2 This specification does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this specification to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use.
3 Referenced Standards
3.1 ISO Standards
1
ISO 4397 — Fluid Power System and Components –
Connectors and Associated Components – Outside
Diameters of Tubes and Inside Diameters of Hoses
3.2 JASO Standards
2
JASO F 409-91 — Fittings for Polyamide (Nylon) Tube
JASO M 317-73 — Nylon Tube for Automobile Air
Brake Piping
3.3 JIS Standards
3
JIS B 7502 — External Micrometer
JIS B 8381 — Fittings for Flexible Tube Used at
Atmospheric Pressure
JIS K 6890 — Tube Made from Tetra-fluoroethylene
Resin
1 International Organization for Standardization, 1, rue de Varembe,
Case postale 56 CH-1211 Geneve.
2 Japanese Automobile Standards Organization / Society of
Automotive Engineers of Japan, Goban-cho Center Bldg., 10-2
Goban-cho, Chiyoda-ku, Tokyo 102-0076.
3 Japan Standards Association, 4-1-24 Akasaka, Minato-ku, Tokyo
107-8440.
3.4 SAE Standards
4
SAE J 844 — Nonmetallic Air Brake System Tubing
SAE J 1394 — Metric Nonmetallic Air Brake System
Tubing
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 ID — Inside Diameter
4.1.2 ISO — International Organization for Standard-
ization
4.1.3 JASO — Japan Automobile Standard
4.1.4 JIS — Japanese Industrial Standard
4.1.5 OD — Outside Diameter
4.1.6 PFA — Tetrafluoroethylene Perfluoroalkylvinyl-
ether Copolymer
4.1.7 SAE — Society of Automotive Engineers
4.2 Definitions
4.2.1 dial thickness gauge — an instrument used to
measure wall thickness with a dial meter.
4.2.2 liquid chemical — acid, alkali, organic solvent,
and pure water used for wet stations; resists and
developers used for track system; and other chemicals
used for process or maintenance (such as slurry of
chemical-mechanical polishing) of equipment or
facilities.
4.2.3 outside diameter tolerance — allowable
deviation of the outside diameter of PFA tube from the
specified dimension.
4.2.4 projector — an instrument used to measure shape
and dimension of an object by optically projecting it at
a given magnification. Also referred to as a measuring
projector or profile projector.
4 Society of Automotive Engineers, 400 Commonwealth Drive,
Warrendale, PA 15096-0001.
SEMI F52-1101 © SEMI 2000, 2001 2
4.2.5 wall thickness — thickness of the wall of the
PFA tube.
4.2.6 wall thickness deviation — deviation of wall
thickness.
4.2.7 wall thickness tolerance — allowable deviation
of actual measurement of wall thickness from its
specification.
5 Nominal Size and Dimensional Specification
5.1 A nominal tube size is indicated by “outside
diameters/inside diameter”. This document provides
specifications for eight nominal tube sizes as shown in
Table 1.
5.2 The indication of the nominal size for metric PFA
tubes is preferably printed on each package for
shipping.
Table 1 Tube Size (mm)
OD/ID 25/22 19/16 12/10 10/8 8/6 6/4 4/3 3/2
OD Tolerance
± 0.2 ± 0.15 ± 0.15 ± 0.12 ± 0.12 ± 0.1 ± 0.1 ± 0.1
Wall Thickness 1.5 1.5 1.0 1.0 1.0 1.0 0.5 0.5
Wall Thickness Tolerance
± 0.15 ± 0.15 ± 0.1 ± 0.1 ± 0.1 ± 0.1 ± 0.05 ± 0.05
Wall Thickness Deviation 0.15 0.15 0.1 0.1 0.1 0.1 0.05 0.05
NOTE 1: The specified sizes should be measured at 23 ± 3°C. The specimen should be kept in the environment for more than 1 hour prior to the
measurement.
NOTE 2: Refer to JASO F 409-91 and JASO M 317-73 for outside and inside diameter of 10/8, 8/6 and 6/4 tubes.
NOTE 3: Refer to JIS B 8183 for outside and inside diameter of 8/6 and 6/4 tubes.
NOTE 4: Refer to JIS B 6890 for outside and inside diameter of 12/10, 10/8, 8/6, 6/4, 4/3 and 3/2 tubes.
NOTE 5: Refer to SAE J 844 for outside diameter of 19/16 tube.
NOTE 6: Refer to SAE J 1394 for outside and inside diameter of 8/6 and 6/4 tubes.
NOTE 7: Refer to ISO 4397 for outside diameter of 25/22, 12/10, 10/8, 8/6 and 4/3 tubes.
SEMI F52-1101 © SEMI 2000, 20013
6 Measurement Procedures
6.1 Outside Diameter — Measure the diameters at both
ends of tube with a dial thickness gauge at 4 points in
45 degree intervals (see Figure 1). It is calculated with
the following formula:
Outside Diameter = 1/2 * (maximum reading +
minimum reading)
Measuring Point No.1
Measuring Point No.2
Measuring Point No.3
Measuring Point No.4
Figure 1
Outside Diameter Measurement
6.2 Wall Thickness — Measure the wall thickness at
both ends of tube with a dial thickness gauge at 8 points
in 45 degree intervals (see Figure 2). If it is not
practical to use a dial thickness gauge, prepare a 1 mm
long test piece and measure it with a projector. It is
calculated with the
following formula:
Wall Thickness = 1/2 * (maximum reading + minimum
reading)
Measuring Point No.1
Measuring
Point No.2
Measuring
Point No.3
Measuring
Point No.4
Measuring Point No.5
Measuring
Point No.6
Measuring
Point No.7
Measuring
Point No.8
Figure 2
Wall Thickness Measurement
6.3 Wall Thickness Deviation — Use maximum and
minimum readings of Section 6.2 and calculate the
deviation with the following formula:
Wall Thickness Deviation = maximum reading –
minimum reading
6.4 Other specifications including surface roughness,
deviation from circular form, and physical property
values may be determined upon agreement between the
supplier and user.
6.5 Refer to JIS B 7502, External Micrometer for a dial
thickness gauge.
7 Related Documents
7.1 SEMI Standards
SEMI F7 — Test Method to Determine the Tensile
Strength of Tube Fitting Connections Made of
Fluorocarbon Materials
SEMI F8 — Test Method for Evaluating the Sealing
Capabilities of Tube Fitting Connections Made of
Fluorocarbon Materials, When Subjected to Tensile
Forces
SEMI F9 — Test Method to Determine the Leakage
Characteristics of Tube Fitting Connections Made of
Fluorocarbon Materials, When Subjected to a Side
Load Condition
SEMI F10 — Test Method to Determine the Internal
Pressure Required to Produce a Failure of a Tube
Fitting Connection Made of Fluorocarbon Materials
SEMI F11 — Test Method to Obtain an Indication of
the Thermal Characteristics of Tube Fitting
Connections Made of Fluorocarbon Materials
SEMI F12 — Test Method to Determine the Sealing
Capabilities of Fittings, Made of Fluorocarbon
Materials, after Being Subjected to a Heat Cycle
NOTICE: SEMI makes no warranties or
representations as to the suitability of the specification
set forth herein for any particular application. The
determination of the suitability of the specification is
solely the responsibility of the user. Users are
cautioned to refer to manufacturer’s instructions,
product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein.
These specifications are subject to change without
notice.
The user’s attention is called to the possibility that
compliance with this specification may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this specification,
SEMI takes no position respecting the validity of any
patent rights or copyrights asserted in connection with
any item mentioned in this specification. Users of this
specification are expressly advised that determination
of any such patent rights or copyrights, and the risk of
infringement of such rights, are entirely their own
responsibility.
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International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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