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SEMI F53-0600 © SEMI 2000 4 13.7.1.10 Bef ore changing frequency as d e scribed in Section s 13.7.1.10 –13.7.1.15, r educe the volta ge amplitude to zero. 13.7.1.11 Set frequency to 20 k Hz and re p e at Sections 13.7.1.…
SEMI F53-0600 © SEMI 20003
10.2 The user must have a working knowledge of the
respective instrumentation, must practice proper
handling of test components, and must understand good
laboratory practices. The user should not operate the
components in such a manner as to exceed the ratings
(i.e., pressure, temperature, flow, and voltage).
10.3 Technical Precautions — These tests are to be
performed in a shielded or screened room to prevent
possible problems with nearby instrumentation or
electrical systems caused by the EM fields. At a
minimum, the instrumentation associated with this test
series (see Figure 2) must be shielded from the EM
fields to ensure their proper operation.
11 Preparation of Apparatus
11.1 The test gas source and delivery system must be
capable of satisfying the test volume flow rate at a
constant pressure, ± 0.1 psia.
11.2 The test gas source and delivery system must be
capable of delivering a gas at ambient temperature ±
1°C for the duration of each analysis. The ambient
temperature shall be held to 22°C ± 1°C.
12 Calibration and Standardization
12.1 For each test, verify that calibration of test
equipment is up-to-date.
13 Procedure
13.1 Install the MFC into the test setup per
manufacturer’s recommendations.
13.2 Apply power to all devices sho wn in Figure 3 per
manufacturer’s specifications. Allow the devices to
warm up for the duration specified by the equipment
manufacturer.
13.3 Purge the system with nitrogen for a length of
time equal to ten times the amount of time it takes to
replace the system volume once, when the test MFC is
at its full-scale rated flow rate.
13.4 Close inlet shut-off valve. Then close the outlet
shut-off valve located adjacent to the MFC (see Figure
2). Adjust the MFC setpoint to zero flow. Wait for the
signals to become stable. Record the following on the
data sheet:
• MFC indicated flow,
• Flow standard flow,
• Ambient temperature,
• Gas temperature, and
• Gas pressure.
13.5 Ensure that the inlet and outlet shut-off valves
adjacent to the MFC (see Figure 2) are open. Adjust
the MFC setpoint to 50%. Ensure that all
manufacturer’s recommended conditions are met for the
MFC. Once the output signals become stable, record
the MFC output signal, the flow standard output signal,
the ambient and gas temperature, and the gas pressure
on the data sheet in Table 1.
13.6 Ensure that the MFC power leads and control sig-
nal cables are shielded in the area that will be irradiated
by the EM fields. The cable shielding shall be intact up
to the connector. The type of shielding and connector
shall be recorded on the data sheet in Table 1.
13.7 Radiated Electric Field Susceptibility (RS-03)
13.7.1 Testing from 14 kHz to 20 MHz:
13.7.1.1 Mount the parallel element antenna on a
tripod at a distance of one meter from the controller and
connect the antenna to the audio power amplifier using
the 50-ft length of RG-58 coaxial cable (see Figure 3).
Set the switch to low frequency range.
13.7.1.2 Connect the amplifier input to the signal
generator output.
13.7.1.3 Turn on amplifier and signal generator.
13.7.1.4 Using the X10 probe, connect the scope
across the antenna terminals.
NOTE 2: It is important to use the X10 probe rather than a
coax that terminates in 50 ohms. The audio amplifier will not
drive the required voltage into 50 ohms.
13.7.1.5 Set frequency output of the signal generator
to 14 kHz.
13.7.1.6 Turn off signal generator modulation and set
voltage across the antenna input connector at 35-V rms.
NOTE 3: With this voltage applied to the antenna at
frequencies below one MHz, the required field strength of 10
V/m at a distance of one meter from the antenna should be
established.
13.7.1.7 If, at any frequency, the required voltage
cannot be developed across the antenna terminals, set to
the maximum possible without exceeding equipment
ratings.
13.7.1.8 When voltage is set, turn on modulation and
adjust for 50% amplitude modulation with the internal
one kHz source.
13.7.1.9 Check operation of the controller in the
presence of this radiated field. Record the MFC
indicated flow, flow standard output, and the frequency
on the data sheet in Table 1.
SEMI F53-0600 © SEMI 2000 4
13.7.1.10 Before changing frequency as described in
Sections 13.7.1.10–13.7.1.15, reduce the voltage
amplitude to zero.
13.7.1.11 Set frequency to 20 kHz and repeat Sections
13.7.1.6–13.7.1.9.
13.7.1.12 Set frequency to 50 kHz and repeat Sections
13.7.1.6–13.7.1.9.
13.7.1.13 Set frequency to 100 kHz and repeat
Sections 13.7.1.6–13.7.1.9.
13.7.1.14 Set frequency to 200 kHz and repeat
Sections 13.7.1.6–13.7.1.9.
13.7.1.15 Set frequency to 500 kHz and repeat
Sections 13.7.1.6–13.7.1.9.
13.7.1.16 Set frequency to one MHz and repeat
Sections 13.7.1.6–13.7.1.9.
13.7.1.17 Shut down the test equipment. Then remove
the audio amplifier and install RF power amplifier #1 in
its place.
13.7.1.18 Having exceeded one MHz, turn antenna
switch to the high frequency range.
13.7.1.19 Turn on test equipment and resume testing.
13.7.1.20 Set output of the signal generator to two
MHz and set field strength to 10 V/m, using field
strength meter at the controller location.
NOTE 4: If, at any frequency, the required field cannot be
developed, set to the maximum possible without exceeding
equipment ratings.
13.7.1.21 When voltage is set, turn on modulation and
adjust for 50% amplitude modulation with the internal
one kHz source.
13.7.1.22 Check operation of the controller in the
presence of this radiated field. Record the MFC
indicated flow, the flow standard output, and the
frequency on the data sheet.
13.7.1.23 Before changing frequency as described in
Sections 13.7.1.23–13.7.1.25 reduce the field amplitude
to zero.
13.7.1.24 Set frequency to 5 MHz and repeat Sections
13.7.1.19–13.7.1.22.
13.7.1.25 Set frequency to 10 MHz and repeat
Sections 13.7.1.19–13.7.1.22.
13.7.1.26 Set frequency to 20 MHz and repeat
Sections 13.7.1.19–13.7.1.22.
13.7.1.27 After testing at fixed frequencies, sweep the
signal source from 50 kHz to 20 MHz at an amplitude
of about 35 V rms or 10 V/m. If a malfunction occurs
during the sweep, stop and go back to that frequency
range and try to find the malfunction by testing at single
frequencies. Record the MFC indicated flow, the flow
standard outputs, and the frequency. If the malfunction
cannot be found by testing at single frequencies and
only shows up when sweeping, the problem is probably
that the signal source has to switch ranges at certain
frequencies and during the switching can create strong
transient noise. Only the results at single frequencies
can be trusted; the sweep is only to locate the problems,
not to completely define them.
13.7.1.28 Reduce signal source output to zero and de-
energize test equipment.
13.7.1.29 Disconnect and remove parallel element
antenna.
13.7.1.30 Testing from 30 MHz to 200 MHz:
13.7.1.31 Mount biconical antenna on the tripod. Test
in a sequence similar to that in Sections 13.7.1.1–
13.7.1.9.
13.7.1.32 Verify that RF power amplifier #1 is still in
place.
13.7.1.33 At a minimum, test at the follo wing
frequencies: 30 MHz, 40 MHz, 50 MHz, 60 MHz, 70
MHz, 80 MHz, 90 MHz, 100 MHz, 120 MHz, 140
MHz, 160 MHz, 180 MHz, and 200 MHz.
13.7.1.34 At each frequency, set the field strength to
10 V/m using the field strength meter at the controller
location with the antenna in both the vertical and the
horizontal positions.
13.7.1.35 Check operation of the controller in the
presence of the radiated fields generated. Record the
MFC indicated flow, the flow standard outputs, and the
frequency on the data sheet.
13.7.1.36 After testing at fixed frequencies, sweep the
signal source from 30 MHz to 200 MHz. If a
malfunction occurs during the sweep, stop and go back
to the faulty frequency range and try to find the
malfunction by testing at single frequencies. Record
the MFC indicated flow, the flow standard outputs, and
the frequency on the data sheet. If the malfunction
cannot be found by testing at single frequencies and
only shows up when sweeping, the problem is probably
that the signal source has to switch ranges at certain
frequencies and can create strong transient noise during
the switching. Only the results at single frequencies
can be trusted; the sweep is only to locate problems, not
to completely define them.
13.7.1.37 Reduce signal source output to zero and de-
energize test equipment.
13.7.2 Testing from 300 MHz to one GHz:
SEMI F53-0600 © SEMI 20005
13.7.2.1 Mount the conical log spiral antenna on the
tripod. Test in a sequence similar to that in Sections
13.7.1.1–13.7.1.9.
13.7.2.2 Verify that RF power amplifier #1 is still in
place.
13.7.2.3 Test at the following frequencies, using RF
power amplifier #1: 300 MHz and 400 MHz. Record
the MFC indicated flow, flow standard outputs, and the
frequency for each test point on the data sheet.
13.7.2.4 After completion of the test at 400 MHz,
reduce amplitude of signal source to zero and shut
down test equipment.
13.7.2.5 Disconnect RF power amplifier #1, install RF
power amplifier #2, turn on equipment, and resume
testing.
13.7.2.6 Test at the following frequencies using RF
power amplifier #2: 500 MHz, 600 MHz, 700 MHz,
800 MHz, 900 MHz, and 990 MHz.
13.7.2.7 Check operation of the controller in the
presence of the fields generated. Record the MFC
indicated flow, the flow standard outputs, and the
frequency for each test point on the data sheet.
13.7.2.8 After testing at fixed frequencies, sweep the
signal source from 300 MHz to 990 MHz. If a
malfunction occurs during the sweep, stop and go back
to that frequency range and try to find the malfunction
by testing at single frequencies. Record the MFC
indicated flow, the flow standard outputs, and the
frequency on the data sheet. If the malfunction cannot
be found by testing at single frequencies and only
shows up when sweeping, the problem is probably that
the signal source has to switch ranges at certain
frequencies and during the switching can create strong
transient noise. Only the results at single frequencies
can be trusted; the sweep is only to locate problems, not
to completely define them.
13.7.2.9 Reduce signal source output to zero, de-
energize test equipment, and disassemble test setup.
13.8 Transient Susceptibility of Power and Control
Leads (CS-06) (Conducted Susceptibility)
NOTE 5: If any calibration is required during the performance
of this procedure, such calibration shall be done in accordance
with manufacturers’ specifications.
13.8.1 Spikes on DC Power Lines
13.8.1.1 Verify that the test equipment and DC power
are off before making connections for performing tests
on DC-powered equipment.
13.8.1.2 Connect the parallel output of the spike gen-
erator between the binding posts as shown in Figure 4.
NOTE 6: The output from the spike generator must be from
the parallel output. Otherwise, the DC power supply would
be shorted by a low DC resistance.
13.8.1.3 The spike is injected across the DC power
line to ground, not in series.
13.8.2 Spike on positive DC Lead:
13.8.2.1 Connect spike generator output between
positive DC lead and ground and adjust spike generator
output control for minimum amplitude.
13.8.2.2 Using the X100 probe, connect one channel
on the scope to monitor the amplitude of the spike
applied on the positive lead. Put the scope probe
ground clip on the green wire safety ground, not on any
of the spike generator output terminals.
13.8.2.3 Energize test equipment and observe polarity
of low amplitude spikes to determine the polarity of the
transient. Connection to the generator output should be
such that positive spikes are applied on the positive
lead. If the pulses are negative, reverse leads at the
generator output.
13.8.2.4 Apply DC power.
13.8.2.5 With the scope synchronized to line voltage
and the spike repetition rate set so that the spike will
move slowly across the screen, increase spike
amplitude to 100% of the voltage rating of the input
power or MFC malfunction. Record the MFC indicated
flow, the flow standard outputs, and the spike amplitude
on the data sheet.
13.8.2.6 If the controller is not initially susceptible
below the voltage rating and if the equipment is digital,
hold the upper limit condition for five minutes. This
condition need only be held momentarily if the
controller is analog. Record the MFC indicated flow
and flow standard outputs on the data sheet.
13.8.2.7 Reduce spike amplitude control, de-energize
test equipment, and turn off DC power before switching
spike polarity.
13.8.2.8 Reverse leads at the spike generator output to
apply negative spikes to the controller.
13.8.2.9 Energize test equipment.
13.8.2.10 Repeat Sections 13.8.2.4 through 13.8.2.6
with the negative voltage spikes applied to the positive
lead. Then go on to Section 13.8.2.11.
13.8.2.11 Reduce spike amplitude to zero, de-energize
test equipment, and turn off DC power.
13.8.3 Spike on negative DC Lead: