semi合集-English.pdf - 第4055页

SEMI F53-0600 © SEMI 2000 12 Table 2 Res ults of Electrom agnetic Susceptibility Testing A. Radi ated Sus cepti bility Data Points Freq. (Hz) F ield Strength (V/m) MFC Indi cated Flow (%FS), co rrected for zero Flow Stan…

SEMI F53-0600 © SEMI 200011

Table 1 Data Sheet for EM Susceptibility Testing

Initial Condition

MFC Indicated Output

Flow Standard Output

Ambient Temperature

°C

Gas Temperature

°C

Gas Pressure psig

MFC Cable Shielding and Connector

Cable Shielding

Type of MFC Connector

EM Susceptibility Testing

I. EM Field-Radiated

Data Points Frequency

(Hz)

Field Strength

(V/m)

MFC Indicated

Flow (V)

Flow Standard

Output

MFC Indicated

Flow (%FS)

Flow Standard

(%FS)

EM Susceptibility Testing

II. EM Field-Conducted

Data Points Spike

Amplitude (V)

Location of

Spike Input

MFC Indicated

Flow (V)

Flow Standard

Output

MFC Indicated

Flow (%FS)

Flow Standard

(%FS)

SEMI F53-0600 © SEMI 2000 12

Table 2 Results of Electromagnetic Susceptibility Testing

A. Radiated Susceptibility

Data

Points

Freq. (Hz) Field Strength

(V/m)

MFC Indicated Flow

(%FS), corrected for zero

Flow Standard (FS%),

corrected for zero

Change in Flow from

Reference

MFC (%FS) Std. (%FS)

B. Conducted Susceptibility

Data

Points

Spike

Amplitude (V)

Location of

Spike Input

MFC Indicated Flow

(%FS), corrected for zero

Flow Standard (FS%),

corrected for zero

Change in Flow from

Reference

MFC (%FS) Std. (%FS)

NOTICE: SEMI makes no warranties or representations as to the suitability of the test method set forth herein for

any particular application. The determination of the suitability of the test method is solely the responsibility of the

user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other rele-

vant literature respecting any materials mentioned herein. These test methods are subject to change without notice.

The user’s attention is called to the possibility that compliance with this test method may require use of copyrighted

material or of an invention covered by patent rights. By publication of this test method, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this test

method. Users of this test method are expressly advised that determination of any such patent rights or copyrights,

and the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F54-1000 © SEMI 20001

SEMI F54-1000

TEST METHOD FOR MEASURING THE COUNTING EFFICIENCY OF

CONDENSATION NUCLEUS COUNTERS

This test method was technically approved by the Global Facilities Committee and is the direct responsibility

of the North American Facilities Committee. Current edition approved by the North American Regional

Standards Committee on July 13, 2000. Initially available on SEMI OnLine August 2000; to be published

October 2000. Previously published June 2000.

1 Purpose

1.1 Particle specifications for gases require the use of

condensation nucleus counters (CNCs) having specified

counting efficiencies. This document provides the test

method for determining the counting efficiencies of

CNCs.

2 Scope

2.1 This document provides the method for 1)

generating an aerosol standard consisting of sodium

chloride (NaCl) particles having sizes 0.01 micrometer

and larger suspended in air at atmospheric pressure (1 ×

Pa), 2) controlling the size and concentration of

particles in the aerosol, and 3) using the aerosol to

determine the counting efficiency of a CNC as a

function of particle size. This method is suitable for

CNCs having a lower size sensitivity of 0.01

micrometer or larger.

NOTE

1: Suitable test methods for calibrating optical particle

counters are contained in ASTM F328 and JIS B 9921.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This document does not provid e the method for

adjusting the CNC’s counting efficiency.

3.2 This document does not provid e the method for

determining the CNC

’s background noise level,

maximum concentration limit, or maximum detectable

particle size.

4 Referenced Standards

4.1 ASTM standards

ASTM D1193 — Standard Specification for Reagent

Water

1 American Society of Testing and Materials, 1916 Race Street,

Philadelphia, PA 19103, USA

ASTM F328 — Standard Practice for Calibration of an

Airborne Particle Counter Using Monodisperse

Spherical Particles

4.2 JIS standard

JIS B 9921 — Japanese Industrial Standard, Light

Scattering Automatic Particle Counter

NOTE 2: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 aerosol electrometer — an instrument that

converts the charge flow in an aerosol stream to an

electrical current signal.

5.2 aerosol standard — an aerosol containing particles

of a known size and concentration.

5.3 coincidence error — the inaccuracy in a measured

particle concentration caused by multiple particles in

the optical sensing volume of an instrument.

5.4 concentration limit — the maximum concentration

of particles in an aerosol to avoid a coincidence error of

10% or greater in an instrument.

5.5 counting efficiency — the ratio of the

concentration of particles reported by the CNC to that

reported simultaneously from the same aerosol by a

reference instrument.

5.6 lower size sensitivity — the particle size

corresponding to 50% counting efficiency for the CNC.

5.7 monodisperse aerosol — an ae rosol having a

narrow distribution of particle sizes. The maximum

band width of a monodisperse aerosol is defined in

Section 8.7.

5.8 particle concentration — the number of particles

per unit volume in a gas.

5.9 polydisperse aerosol — an aerosol having a wide

distribution of particle sizes.

NOTE 3: Additional terminology is contained in ASTM F328

and JIS B 9921.

2 Japanese Standards Association, 1-24, Akasaka 4-chome, Minato-

ku, Tokyo 107, Japan